Light source tracking in optical metrology system
    142.
    发明授权
    Light source tracking in optical metrology system 有权
    光学测量系统中的光源跟踪

    公开(公告)号:US09146156B2

    公开(公告)日:2015-09-29

    申请号:US13285712

    申请日:2011-10-31

    Abstract: The present invention may include loading a diagnostic sample onto a sample stage, focusing light from an illumination source disposed on a multi-axis stage onto the diagnostic sample, collecting a portion of light reflected from a surface of the diagnostic sample utilizing a detector, wherein the illumination source and the detector are optically direct-coupled via an optical system, acquiring a set of diagnostic parameters indicative of illumination source position drift from the diagnostic sample, determining a magnitude of the illumination source position drift by comparing the acquired set of diagnostic parameters to an initial set of parameters obtained from the diagnostic sample at a previously measured alignment condition, determining a direction of the illumination source position drift; and providing illumination source position adjustment parameters configured to correct the determined magnitude and direction of the illumination source position drift to the multi-axis actuation control system of the multi-axis stage.

    Abstract translation: 本发明可以包括将诊断样本加载到样本台上,将来自设置在多轴平台上的照明源的光聚焦到诊断样本上,利用检测器收集从诊断样品的表面反射的一部分光,其中 照明源和检测器通过光学系统光学直接耦合,获取指示来自诊断样本的照明源位置漂移的一组诊断参数,通过比较所获取的诊断参数集合来确定照明源位置漂移的大小 到在先前测量的对准条件下从诊断样本获得的初始参数集合,确定照明源位置漂移的方向; 以及提供照明源位置调整参数,其被配置为校正所确定的照明源位置漂移的大小和方向到所述多轴平台的多轴致动控制系统。

    Apparatus and method for operating a real time large diopter range sequential wavefront sensor
    143.
    发明授权
    Apparatus and method for operating a real time large diopter range sequential wavefront sensor 有权
    用于操作实时大屈光度范围顺序波前传感器的装置和方法

    公开(公告)号:US09113819B2

    公开(公告)日:2015-08-25

    申请号:US14074043

    申请日:2013-11-07

    Abstract: A wavefront sensor includes a light source configured to illuminate a subject eye, a detector, a first beam deflecting element configured to intercept a wavefront beam returned from a subject eye when the subject eye is illuminated by the light source and configured to direct a portion of the wavefront from the subject eye through an aperture toward the detector and a controller, coupled to the light source and the beam deflecting element, configured to control the beam deflecting element to deflect and project different portions of an annular ring portion of the wavefront from the subject eye through the aperture and further configured to pulse the light source at a firing rate to sample selected portions of the annular ring at the detector.

    Abstract translation: 波前传感器包括被配置为照亮被摄体眼睛的光源,检测器,第一光束偏转元件,其被配置为当受检者眼睛被光源照射时,拦截从被检眼睛返回的波前光束,并且被配置成引导一部分 来自被摄体眼睛的波前通过光圈朝向检测器,以及耦合到光源和光束偏转元件的控制器,被配置为控制光束偏转元件偏转和突出波前的环形环部分的不同部分 通过孔径对准眼睛,并进一步配置成以点火速率对光源进行脉冲以在检测器处对环形环的选定部分进行采样。

    Apparatus and method for operating a real time large dipoter range sequential wavefront sensor
    144.
    发明授权
    Apparatus and method for operating a real time large dipoter range sequential wavefront sensor 有权
    用于操作实时大型双极距离序列波前传感器的装置和方法

    公开(公告)号:US09101292B2

    公开(公告)日:2015-08-11

    申请号:US14073775

    申请日:2013-11-06

    CPC classification number: A61B3/1015 A61B3/102 A61B3/112 G01J9/00 G01J2003/064

    Abstract: A wavefront sensor includes a wavefront scanning module configured to output wavefront tilt measurements of a wavefront beam returned from a subject eye, a biometric/anatomic measurement device configured to output biometric/anatomic measurements of the subject eye and a processing system, coupled to the scanning module and the biometric/anatomic measurement device, configured to process biometric/anatomic measurements output during a surgical procedure to determine eye status information and to concurrently output eye status information and wavefront tilt information during the surgical procedure.

    Abstract translation: 波前传感器包括波前扫描模块,波长扫描模块被配置为输出从主题眼返回的波前光束的波前倾斜测量结果,生物测定/解剖测量装置,被配置为输出与扫描相关联的对象眼的生物测定/解剖测量和处理系统 模块和生物测定/解剖测量装置,被配置为在手术过程期间处理生物测定/解剖测量输出以确定眼睛状态信息,并且在手术过程期间同时输出眼睛状态信息和波前倾斜信息。

    Apparatus and method for operating a real time large diopter range sequential wavefront sensor
    145.
    发明授权
    Apparatus and method for operating a real time large diopter range sequential wavefront sensor 有权
    用于操作实时大屈光度范围顺序波前传感器的装置和方法

    公开(公告)号:US09050026B2

    公开(公告)日:2015-06-09

    申请号:US14074111

    申请日:2013-11-07

    Abstract: An apparatus including a wavefront sensor including a light source configured to illuminate a subject eye, a detector, an image sensor configured to output an image of the subject eye, a first beam deflecting element configured to intercept a wavefront beam returned from a subject eye when the subject eye is illuminated by the light source and configured to direct a portion of the wavefront from the subject eye through an aperture toward the detector and a controller, coupled to the light source, the image sensor and the beam deflecting element, configured to process the image to determine transverse movement of the subject eye and to control the beam deflecting element to deflect and project through the aperture portions of an annular ring portion of the wavefront and further configured to pulse the light source at a firing rate to sample selected portions of the annular ring at the detector, to process the image of the subject eye to calculate transverse movement of the subject eye and to orient the beam deflecting element at a DC offset angle to compensate transverse movement of the subject eye.

    Abstract translation: 一种装置,包括:波前传感器,包括被配置为照射被检眼的光源,检测器,被配置为输出被检眼的图像的图像传感器;第一光束偏转元件,被配置为截取从被检眼返回的波前光束, 被摄体的眼睛由光源照亮并且被配置成将来自被摄体眼睛的波前的一部分引导通过孔朝向检测器,并且耦合到光源的控制器,图像传感器和光束偏转元件,被配置为处理 所述图像确定所述被检眼的横向移动并且控制所述光束偏转元件偏转并突出通过所述波前的环形环部分的所述开口部分,并进一步被配置为以所述点火速率对所述光源进行脉冲以对所述光源的选定部分进行采样 检测器处的​​环形环,用于处理被检眼的图像以计算被检眼的横向移动 nd将光束偏转元件定向在DC偏移角以补偿被摄体的横向移动。

    Optimized orthonormal system and method for reducing dimensionality of hyperspectral images
    146.
    发明授权
    Optimized orthonormal system and method for reducing dimensionality of hyperspectral images 有权
    优化的正交系统和降低高光谱图像尺度的方法

    公开(公告)号:US08948540B2

    公开(公告)日:2015-02-03

    申请号:US14090753

    申请日:2013-11-26

    Abstract: A method for reducing dimensionality of hyperspectral images includes receiving a hyperspectral image having a plurality of pixels. The method may further include establishing an orthonormal basis vector set comprising a plurality of mutually orthogonal normalized members. Each of the mutually orthogonal normalized members may be associated with one of the plurality of pixels of the hyperspectral image. The method may further include decomposing the hyperspectral image into a reduced dimensionality image, utilizing calculations performed while establishing said orthonormal basis vector set. A system configured to perform the method may also be provided.

    Abstract translation: 一种用于降低高光谱图像的维数的方法包括接收具有多个像素的高光谱图像。 该方法还可以包括建立包括多个相互正交的归一化成员的正交基矢量集合。 每个相互正交的标准化构件可以与高光谱图像的多个像素中的一个相关联。 该方法可以进一步包括利用在建立所述正交基本向量集合时执行的计算来将高光谱图像分解为降维的图像。 还可以提供被配置为执行该方法的系统。

    Detection optical system and scanning microscope
    147.
    发明授权
    Detection optical system and scanning microscope 有权
    检测光学系统和扫描显微镜

    公开(公告)号:US08885162B2

    公开(公告)日:2014-11-11

    申请号:US13669634

    申请日:2012-11-06

    Inventor: Masaharu Tomioka

    Abstract: Provided is a detection optical system that is provided with a dispersed-light detection function and that can increase the amount of detected light by enhancing the diffraction efficiency. A detection optical system is employed which includes a transmissive VPH diffraction grating that disperses fluorescence from a specimen into a plurality of wavelength bands; a rotating mechanism that rotates the VPH diffraction grating about an axial line that is perpendicular to an incident optical axis of the fluorescence from the specimen and an emission optical axis from the VPH diffraction grating; a light detection portion that detects the fluorescence from the specimen that has been dispersed by the VPH diffraction grating; and a correcting portion that corrects an incident position on the light detection portion in accordance with a displacement of the optical axis caused by the rotation of the VPH diffraction grating in synchronization with the rotating mechanism.

    Abstract translation: 提供了一种具有分散光检测功能并且可以通过提高衍射效率来增加检测光量的检测光学系统。 使用检测光学系统,其包括将来自样本的荧光分散到多个波长带中的透射VPH衍射光栅; 围绕垂直于来自样本的荧光的入射光轴的轴线和来自VPH衍射光栅的发射光轴旋转VPH衍射光栅的旋转机构; 光检测部,其检测由所述VPH衍射光栅分散的所述样本的荧光; 以及校正部,其根据与旋转机构同步的VPH衍射光栅的旋转引起的光轴的位移校正光检测部上的入射位置。

    Angularly resolved scatterometer
    148.
    发明授权
    Angularly resolved scatterometer 有权
    角度分辨散射仪

    公开(公告)号:US08031337B2

    公开(公告)日:2011-10-04

    申请号:US12493606

    申请日:2009-06-29

    Abstract: An angularly resolved scatterometer uses a broadband radiation source and an acousto-optical tunable filter to select one or more narrowband components from the broadband beam emitted by the source for use in measurements. A feedback loop can be used to control the intensity of the selected narrowband components to reduce noise.

    Abstract translation: 角度分辨的散射仪使用宽带辐射源和声光可调谐滤波器从源发射的宽带光束中选择一个或多个窄带分量用于测量。 可以使用反馈回路来控制所选窄带分量的强度以降低噪声。

    Optical spectrum analyzer with continuously rotating tuynable filter
    149.
    发明申请
    Optical spectrum analyzer with continuously rotating tuynable filter 有权
    具有连续旋转可旋转滤光片的光谱分析仪

    公开(公告)号:US20070285659A1

    公开(公告)日:2007-12-13

    申请号:US11810873

    申请日:2007-06-07

    Abstract: An optical spectrum analyzer is implemented with a detector combined with a tunable filter mounted on a stage capable of 360-degree rotation at a constant velocity. Because of the constant rate of angular change, different portions of the input spectrum are detected at each increment of time as a function of filter position, which can be easily measured with an encoder for synchronization purposes. The unidirectional motion of the mirror permits operation at very high speeds with great mechanical reliability. The same improvements may be obtained using a diffraction grating or a prism, in which case the detector or an intervening mirror may be rotated instead of the grating or prism.

    Abstract translation: 光谱分析仪采用与安装在能够以恒定速度360度旋转的平台上的可调滤波器组合的检测器。 由于角度变化的恒定速率,输入频谱的不同部分在每个增量时间上被检测为滤波器位置的函数,这可以通过编码器容易地用于同步目的来测量。 镜子的单向运动允许以非常高的速度运行,具有很大的机械可靠性。 可以使用衍射光栅或棱镜获得相同的改进,在这种情况下,可以旋转检测器或中间镜来代替光栅或棱镜。

    Optical spectrum analyzer
    150.
    发明授权
    Optical spectrum analyzer 有权
    光谱分析仪

    公开(公告)号:US07253897B2

    公开(公告)日:2007-08-07

    申请号:US10800320

    申请日:2004-03-11

    Abstract: An optical spectrum analyzer (OSA) 10 sequentially or selectively samples (or filters) a spectral band(s) 11 of light from a broadband optical input signal 12 and measures predetermined optical parameters of the optical signal (e.g., spectral profile) of the input light 12. The OSA 10 is a free-space optical device that includes a collimator assembly 15, a diffraction grating 20 and a mirror 22. A launch pigtail emits into free space the input signal through the collimator assembly 15 and onto the diffraction grating 20, which separates or spreads spatially the collimated input light, and reflects the dispersed light onto the mirror 22. A λ/4 plate 26 is disposed between the mirror 22 and the diffraction grating 20. The mirror reflects the separated light back through the λ/4 plate 26 to the diffraction grating 20, which reflects the light back through the collimating lens 18. The lens 18 focuses spectral bands of light (λ1–λN) at different focal points in space. One of the spectral bands 11 is focused onto a receive pigtail 28, which then propagates to a photodetector 30. A pivoting mechanism 34 pivots the diffraction grating 20 or mirror 22 about a pivot point 36 to sequentially or selectively focus each spectral band 11 to the receive pigtail 28. A position sensor 42 detects the displacement of the diffraction grating 24 or mirror.

    Abstract translation: 光谱分析仪(OSA)10顺序地或选择性地从宽带光输入信号12采样(或滤波)光谱带11,并且测量输入的光信号的光学参数(例如,光谱分布) 光12。 OSA 10是包括准直器组件15,衍射光栅20和反射镜22的自由空间光学装置。 发射尾纤通过准直器组件15将输入信号发射到自由空间中,并在衍射光栅20上分散或扩展空间上准直的输入光,并将分散的光反射到反射镜22上。 λ/ 4板26设置在反射镜22和衍射光栅20之间。 反射镜通过λ/ 4板26将分离的光反射回到衍射光栅20,衍射光栅20将光反射通过准直透镜18。 透镜18在空间中的不同焦点处聚焦光的光谱带(λ1 SUB-N N N)。 光谱带11中的一个聚焦在接收尾纤28上,接收引线28然后传播到光电检测器30。 枢转机构34围绕枢转点36枢转衍射光栅20或反射镜22,以顺序地或选择性地将每个光谱带11聚焦到接收尾纤28。 位置传感器42检测衍射光栅24或反射镜的位移。

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