知搜-全球专利检索

  1. Login
  2. Sign Up

Search Results

728 records (took 0.013 seconds)

    Electron microscopes
    121.
    发明授权
    Electron microscopes 失效
    电子显微镜

    公开(公告)号：US4160905A

    公开(公告)日：1979-07-10

    申请号：US852717

    申请日：1977-11-18

    Applicant: Julian P. Davey

    Inventor： Julian P. Davey

    IPC: H01J37/26 ,  H01J37/09 ,  H01J37/147 ,  G01N23/00

    CPC classification number: H01J37/147 ,  H01J37/09

    Abstract: The electron microscope has an evacuated housing 9 comprising a portion 14 containing an electron gun 10 from which a beam 11 of electrons is accelerated by accelerator 12 and directed into a microscopic column 16 forming part of housing 9. An ion-stopping member 33 is located in the accelerator 12 on the axis of column 16, to intercept ions which could otherwise pass to the specimen S. In order to avoid interception of the electron beam, the beam is directed along a path which avoids the member 33, either by a displacement or inclination of the gun or by electron beam deflection means (e.g. coils 35c, 36c), and the beam is deflected back on to the axis of the column 16 by electron beam deflection means (e.g. coils 33c, 34c).

    Abstract translation: 电子显微镜具有抽真空的壳体9，其包括包含电子枪10的部分14，电子束11从该电子枪10被加速器12加速并引导到形成壳体9的一部分的微柱16中。离子限制构件33位于 在柱16的轴线上的加速器12中，以截取否则可以传递到样品S的离子。为了避免截取电子束，光束沿着避开构件33的路径被引导，或者通过位移 或倾斜的电子束偏转装置（例如线圈35c，36c），并且通过电子束偏转装置（例如线圈33c，34c）将光束偏转回到柱16的轴线。

    Electron microscope
    122.
    发明授权
    Electron microscope 失效
    电子显微镜

    公开(公告)号：US3959651A

    公开(公告)日：1976-05-25

    申请号：US463629

    申请日：1974-04-24

    Applicant: Leonard M. Welter

    Inventor： Leonard M. Welter

    IPC: C03C3/21 ,  C03C4/14 ,  H01J37/073 ,  H01J37/09 ,  H01J37/248 ,  H01J37/26

    CPC classification number: C03C3/21 ,  C03C4/14 ,  H01J37/073 ,  H01J37/09 ,  H01J37/248

    Abstract: In a field emission charged particle microscope having a housing defining a vacuum chamber, a field emission tip disposed in the chamber for generating charged particles, electrode means for establishing electrostatic focusing and accelerating field for forming a beam of charged particles, field electrode means in juxtaposition with the tip for developing an electrostatic field for extraction of charged particles generated by the tip and voltage means connected to the electrode means and the tip for supplying electrical potential thereto to establish the electrostatic fields, the inclusion of an apertured, conductive symmetrical glass resistor disposed intermediate the field electrode means and the electrode means for establishing the focusing and accelerating field, and in electrical contact therewith.

    Abstract translation: 在具有限定真空室的壳体的场致发射带电粒子显微镜中，设置在所述腔室中用于产生带电粒子的场致发射尖端，用于建立静电聚焦的电极装置和用于形成带电粒子束的加速场，场并联装置并置 用于产生用于提取由尖端产生的带电粒子的静电场和连接到电极装置的电压装置和用于向其施加电位的尖端以建立静电场的尖端，包括一个有孔导电对称玻璃电阻器 在场电极装置和用于建立聚焦和加速场的电极装置之间并与其电接触。

    ION GENERATION DEVICE AND ION IMPLANTER
    129.
    发明公开
    ION GENERATION DEVICE AND ION IMPLANTER 审中-公开

    公开(公告)号：US20240266140A1

    公开(公告)日：2024-08-08

    申请号：US18619397

    申请日：2024-03-28

    Applicant: Sumitomo Heavy Industries Ion Technology Co., Ltd.

    Inventor： Sho KAWATSU ,  Masateru SATO

    IPC: H01J37/08 ,  H01J37/09 ,  H01J37/317

    CPC classification number: H01J37/08 ,  H01J37/09 ,  H01J37/3171 ,  H01J2237/061

    Abstract: An ion generation device includes an arc chamber including an internal space and including a front slit for extracting an ion beam from plasma generated in the internal space, a magnetic field generator that generates a magnetic field applied in an axial direction in the internal space, and a first cathode configured to supply a thermoelectron into the internal space. The first cathode includes a first cathode cap, a first heat source, and a first thermal shield including a first extension portion. A first tip portion, and a first tip opening, and a first opening width of the first tip opening in the radial direction is smaller than a maximum width of the first cathode cap in the radial direction.

Patent Agency Ranking