Tunable and switchable SAW-BAW RF resonators

    公开(公告)号:US12028047B2

    公开(公告)日:2024-07-02

    申请号:US17314394

    申请日:2021-05-07

    发明人: Roozbeh Tabrizian

    IPC分类号: H03H9/02 H03H9/145 H03H9/25

    摘要: An adaptive RF acoustic resonator contains tunable and switchable hybrid surface-bulk acoustic waves (SAW-BAW). The surface and bulk acoustic waves couple for the spectral sensing and configurable filtering. The acoustic resonator includes a piezoelectric or ferroelectric layer, such as a SLAIN layer, which is patterned into interdigital transducers, and an intermediate layer of AlGaN—GaN, which is built on a SiC substrate. The device is protected under a plastic packaging cap. An external tuning voltage applies on the acoustic resonator to generate the tunable frequency and bandwidth of the bulk and surface acoustic waves. An RF switch generates an electric field to suppress a residual polarization during acoustic resonator switching. The bulk acoustic wave excited in the piezoelectric or ferroelectric layer couples with the surface acoustic wave propagating in the intermediate layer. The Sc concentration in the ferroelectric layer exceeds 28%. The transducers are capped with Bragg reflectors made of multiple Al and W layers.

    Filter device
    114.
    发明授权

    公开(公告)号:US11881608B2

    公开(公告)日:2024-01-23

    申请号:US17088637

    申请日:2020-11-04

    发明人: Tomoya Sato

    摘要: A filter device includes a first filter connected between a common terminal and a first individual terminal, and a second filter connected between the common terminal and a second individual terminal. A pass band of the second filter is in a frequency range lower than a pass band of the first filter. The first filter includes SAW resonators, at least one of which includes divided resonators connected in parallel with each other. Each of the divided resonators includes an IDT. A pitch of the IDT of one of the divided resonators is different from that of another of the divided resonators.

    Acoustic wave filter
    115.
    发明授权

    公开(公告)号:US11863161B2

    公开(公告)日:2024-01-02

    申请号:US17108039

    申请日:2020-12-01

    摘要: An acoustic wave filter includes a first resonance circuit including a first series arm resonator and a first capacitive element. The first series arm resonator is provided on a path connecting a first terminal and a second terminal. The first capacitive element is coupled in parallel with the first series arm resonator. The first series arm resonator includes a first divided resonator and a second divided resonator coupled in series with each other. The first resonance circuit includes a second resonance circuit including the first divided resonator and a second capacitive element coupled in parallel with the first divided resonator.