Spectrometer attachments and phosphorescence decay measurement
    101.
    发明申请
    Spectrometer attachments and phosphorescence decay measurement 失效
    光谱仪附件和磷光衰减测量

    公开(公告)号:US20040036871A1

    公开(公告)日:2004-02-26

    申请号:US10621648

    申请日:2003-07-17

    CPC classification number: G01J3/4406 G01J3/0275 G01J3/0291 G01J3/28

    Abstract: A spectrometry instrument with exchangeable accessories (34, 48, 50, 52) providing, for example, different sample presentation facilities. The accessories include a manually operable cam-lock facility (54, 68) for quick and easy attachment of an accessory to the instrument. The instrument also includes an electrical circuit (86-90), which is completed by a circuit portion (100) in an accessory when the accessory is attached to the instrument, for generating a unique identifying voltage (94) to thereby identify that accessory. This allows for automatic loading in a controlling computer of programs for setting up and running the instrument for measurement regimes using that accessory. The spectrometry instrument is preferably a spectrophotometer used for phosphorescence decay measurements in which sequential phosphorescence emission measurements data from each of a number of excitation cycles applied to a sample are taken and then reassembled into a correct time sequence to define a phosphorescence decay characteristic for the sample, that is, measured data points from a second (and subsequent) excitation cycle are interleaved with those from a first excitation cycle. This significantly reduces the time for establishing a phosphorescence decay characteristic.

    Abstract translation: 一种具有可交换附件(34,48,50,52)的光谱仪器,其提供例如不同的样品呈现设备。 附件包括一个可手动操作的凸轮锁定设备(54,68),用于将附件快速方便地附接到仪器上。 仪器还包括一个电路(86-90),当附件附接到仪器上时,该电路由附件中的电路部分(100)完成,用于产生唯一的识别电压(94),从而识别该附件。 这允许在控制计算机中自动加载用于使用该附件设置和运行用于测量方案的仪器的程序。 光谱仪器优选是用于磷光衰变测量的分光光度计,其中采用从施加到样品的多个激发循环中的每一个的顺序磷光发射测量数据,然后重新组装成正确的时间序列,以定义样品的磷光衰减特性 也就是说,来自第二激励周期(和随后)的测量数据点与来自第一激励周期的测量数据点交错。 这显着地减少了建立磷光衰变特性的时间。

    Spectrometric process monitoring
    102.
    发明申请
    Spectrometric process monitoring 有权
    光谱测量过程监控

    公开(公告)号:US20040021861A1

    公开(公告)日:2004-02-05

    申请号:US10328713

    申请日:2002-12-23

    Abstract: Spectrometric apparatus that include an array of detector elements and exhibits a number of capabilities is disclosed. The elements can be responsive to incident radiation to produce an output signal that includes information from the incident radiation. A spectrally selective element can be located in an optical path between the radiation source and the array, with an analysis module responsive to the output signal operative to analyze spatial distribution of spectral information received by the array. The apparatus can also correct for differences in intensity and spectral variability for spectral image signals and/or compare the spectral image signals with a pattern in spatial-spectral coordinate space. Detector elements can be responsive to scattering, and spatial information in their output can be analyzed.

    Abstract translation: 公开了包括检测器元件阵列并展现多种能力的光谱仪。 这些元件可以响应于入射辐射以产生包括来自入射辐射的信息的输出信号。 光谱选择元件可以位于辐射源和阵列之间的光路中,分析模块响应于输出信号进行操作以分析由阵列接收的光谱信息的空间分布。 该装置还可以校正光谱图像信号的强度和光谱变化的差异和/或将光谱图像信号与空间谱坐标空间中的图案进行比较。 检测器元件可以响应于散射,并且可以分析其输出中的空间信息。

    Optical measuring arrangement, in particular for quality control in continuous processes

    公开(公告)号:US20030202180A1

    公开(公告)日:2003-10-30

    申请号:US10422558

    申请日:2003-04-24

    Abstract: An optical measuring arrangement, particularly for quality control in continuous material flow processes, comprising a measuring head which is arranged immediately adjacent to a measurement object, a measurement light source which is held at the measuring head for illuminating a measurement spot on the measurement object, a measurement light reception device, at least one spectrometer which is optically coupled with the measurement light reception device via a light-conducting device, wherein the spectrometer and the light-conducting device are received in the measuring head, and a signal processing device which is likewise received in the measuring head. This results in a compact arrangement for reflection measurement which is easy to assemble and which, beyond this, supplies very accurate measurement results. Further, a measuring arrangement operating on the principle of spectroscopy is suggested for transmission measurement. The disclosure further relates to a combined reflection and transmission measurement device which carries out both measuring processes simultaneously.

    Spectrum measuring instrument
    104.
    发明申请
    Spectrum measuring instrument 有权
    光谱测量仪

    公开(公告)号:US20030107733A1

    公开(公告)日:2003-06-12

    申请号:US10311994

    申请日:2002-12-23

    CPC classification number: G01J3/2803 G01J3/28

    Abstract: In a spectrum measuring instrument of the present invention, a detecting surface (13a) of a detector (13) is a two-dimensional detecting surface and spectrum light coming out from a spectroscope is irradiated to a region A on the detecting surface (13a). Signal intensity at the regions on the detecting surface (13a) other than the region A where the spectrum light is irradiated is subtracted from signal intensity on the region A. Consequently, it is possible to obtain an accurate spectrum intensity signal by processing a detection signal in such a manner that adverse effects of stray light generated inside the spectrum measuring instrument and unwanted light generated by reflection and diffraction occurring on the surface of a detecting element are removed (FIG. 4).

    Abstract translation: 在本发明的光谱测量仪中,检测器(13)的检测表面(13a)是二维检测表面,并且从检测表面(13a)上的区域A照射从分光器出射的光谱光, 。 从区域A的信号强度中减去除了照射光谱的区域A以外的检测面(13a)上的区域的信号强度。因此,可以通过处理检测信号来获得准确的光谱强度信号 以这样的方式,消除了在光谱测量仪器内部产生的杂散光的不利影响和在检测元件的表面上发生的由反射和衍射产生的不需要的光(图4)。

    Optical spectrum analyzer and optical spectrum measuring method
    105.
    发明申请
    Optical spectrum analyzer and optical spectrum measuring method 审中-公开
    光谱分析仪和光谱测量方法

    公开(公告)号:US20030098975A1

    公开(公告)日:2003-05-29

    申请号:US10302379

    申请日:2002-11-22

    CPC classification number: G01J3/02 G01J3/0264 G01J3/0286

    Abstract: An optical spectrum analyzer comprises a refractive grating which extracts a specific wavelength of light which is incident to be measured and outputs as a component light, an optical detector which measures optical intensity of the component light, a container in which the refractive grating and the optical detector are provided, a gas filling port and a gas exhaust port, for performing a replacement of air with a gas, which are provided in the container, are provided. By doing this, the optical spectrum analyzer which can measure level of the light to be measured having a specific wavelength accurately without causing the absorption of the specific wavelength by an OH group.

    Abstract translation: 光谱分析仪包括:折射光栅,其提取入射到被测量的特定波长的光并作为分量光输出;测量分量光的光强度的光学检测器;折射光栅和光学器件的容器 提供检测器,设置在容器中的用于执行用气体替换空气的气体填充口和排气口。 通过这样做,可以精确地测量具有特定波长的待测光的水平而不会由OH基吸收特定波长的光谱分析仪。

    Tilt-compensated interferometers
    106.
    发明申请
    Tilt-compensated interferometers 失效
    倾斜补偿干涉仪

    公开(公告)号:US20030048441A1

    公开(公告)日:2003-03-13

    申请号:US10277439

    申请日:2002-10-21

    Abstract: The tilt-compensated interferometers of the present invention are novel variations of Michelson's interferometer that use tilt- and shear-compensation to provide excellent photometric accuracy even when there are imperfections in the scanning motion used to produce variation of path difference. The tilt-compensation mechanism of the present invention consists of antiparallel reflections from a beamsplitter element and a roof reflector element, which elements are held rigidly in alignment. Several particularly useful embodiments of the invention are described. Other advantages of the present invention include photometric stability and reduced cost because manual alignment is not required. This interferometer has applications in spectrometry, spectral imaging and metrology.

    Abstract translation: 本发明的倾斜补偿干涉仪是迈克尔逊干涉仪的新颖变型,其使用倾斜和剪切补偿来提供优异的测光精度,即使在用于产生路径差异的扫描运动中存在缺陷的情况下也是如此。 本发明的倾斜补偿机构包括来自分束器元件和屋顶反射器元件的反平行反射,这些元件被刚性地保持一致。 描述本发明的几个特别有用的实施例。 本发明的其它优点包括光度稳定性和降低的成本,因为不需要手动对准。 该干涉仪具有光谱,光谱成像和计量学应用。

    Apparatus for determining an overlay error and critical dimensions in a semiconductor structure by means of scatterometry
    107.
    发明申请
    Apparatus for determining an overlay error and critical dimensions in a semiconductor structure by means of scatterometry 失效
    用于通过散射法确定半导体结构中的重叠误差和临界尺寸的装置

    公开(公告)号:US20030043372A1

    公开(公告)日:2003-03-06

    申请号:US10134243

    申请日:2002-04-29

    Inventor: Bernd Schulz

    Abstract: An apparatus for obtaining information on critical dimensions and overlay accuracy of features in a semiconductor structure comprises a light source, a detector and an optical means defining a first optical path and a second optical path. The first optical path and the second optical path are oriented in correspondence with the respective orientations of diffracting patterns provided on the semiconductor structure to obtain the required information without the necessity of rotating the semiconductor structure. This insures a significantly higher throughput.

    Abstract translation: 用于获得关于半导体结构中的特征的关键尺寸和覆盖精度的信息的装置包括光源,检测器和限定第一光路和第二光路的光学装置。 第一光路和第二光路对应于设置在半导体结构上的衍射图案的各个取向,以获得所需信息,而不需要旋转半导体结构。 这确保了显着更高的吞吐量。

    Spectrometric apparatus and method for measuring optical characteristics of an object
    108.
    发明申请
    Spectrometric apparatus and method for measuring optical characteristics of an object 失效
    用于测量物体的光学特性的光谱仪和方法

    公开(公告)号:US20020180968A1

    公开(公告)日:2002-12-05

    申请号:US10160843

    申请日:2002-05-30

    Abstract: Optical characteristic measuring systems and methods such as for determining the color or other optical characteristics of teeth are disclosed. Perimeter receiver fiber optics preferably are spaced apart from a source fiber optic and receive light from the surface of the object/tooth being measured. Light from the perimeter fiber optics pass to a variety of filters. The system utilizes the perimeter receiver fiber optics to determine information regarding the height and angle of the probe with respect to the object/tooth being measured. Under processor control, the optical characteristics measurement may be made at a predetermined height and angle. Various color spectral photometer arrangements are disclosed. Translucency, fluorescence, gloss and/or surface texture data also may be obtained. Audio feedback may be provided to guide operator use of the system. The probe may have a removable or shielded tip for contamination prevention. A method of producing dental prostheses based on measured data also is disclosed. Measured data also may be stored and/or organized as part of a patient database. Such methods and implements may be desirably utilized for purposes of detecting and preventing counterfeiting or the like. Preferably, a two stage spectral separation is utilized, preferably utilizing a diffraction grating and interference filters.

    Abstract translation: 公开了用于确定牙齿的颜色或其他光学特性的光学特性测量系统和方法。 周边接收机光纤优选地与源光纤间隔开,并且从被测量的物体/齿的表面接收光。 来自周边光纤的光通过各种滤光片。 该系统利用周边接收器光纤来确定关于探头相对于被测量物体/齿的高度和角度的信息。 在处理器控制下,可以以预定的高度和角度进行光学特性测量。 公开了各种颜色光谱光度计布置。 也可以获得半透明度,荧光,光泽度和/或表面纹理数据。 可以提供音频反馈以指导操作者使用该系统。 探头可能具有可移除或屏蔽的尖端,以防止污染。 还公开了一种基于测量数据生产牙科假体的方法。 测量的数据也可以作为患者数据库的一部分存储和/或组织。 为了检测和防止伪造等目的,可以期望地使用这些方法和装置。 优选地,利用两级光谱分离,优选利用衍射光栅和干涉滤光器。

    Single-and multi-mode configurations for fiber-optic-coupler biosensors
    109.
    发明申请
    Single-and multi-mode configurations for fiber-optic-coupler biosensors 失效
    光纤耦合器生物传感器的单模和多模配置

    公开(公告)号:US20020127707A1

    公开(公告)日:2002-09-12

    申请号:US10095733

    申请日:2002-03-12

    Abstract: Single-mode and multi-mode fibers to achieve modal splitting and greater sensitivity in an optical fiber coupler for evanescent-wave biosensor applications. A source of light having multiple modes is coupled to the input to one of the multi-mode fibers, with the geometry of necked-down section being such that a limited number of modes may be carried by the multi-mode fiber as the light emerges from the coupler. At least one of the single-mode fibers is supported adjacent the multi-mode fiber to receive and carry one of the limited modes. A biomolecule enveloped by the evanescent field, exhibits a direct or indirect affinity to a binding partner, such that attachment of the binding partner is at least partially responsible for the limited number of modes carried by the multi-mode fiber as the light emerges from the coupler. A system-level implementation of the invention further includes instrumentation for receiving the light from the single-mode fiber carrying one of the limited modes, and determining a characteristic of the binding partner in accordance with the detected mode. The attachment of the binding partner may also causes a change in other detectable optical attributes, such as the magnitude or polarization of the light at one or both of the fiber outputs. The instrumentation may therefore further include a polarization-sensitive optical element supported at one or both of the outputs of the optical fibers, for example, in the form of a polarizing beamsplitter. One or more of the fibers may be pulled substantially without twisting so as to maintain polarization orientation, and the source of light may randomly, circularly, or linearly polarized.

    Abstract translation: 单模和多模光纤实现模式分裂,并且在光纤耦合器中具有更高的灵敏度,用于ev逝波生物传感器应用。 具有多种模式的光源耦合到多模光纤之一的输入端,缩小部分的几何形状使得当光出现时,多模光纤可以承载有限数量的模式 从耦合器。 至少一个单模光纤被支持在多模光纤附近以接收和携带有限模式之一。 由消逝场包围的生物分子对结合配偶体表现出直接或间接的亲和力,使得结合对象的附着至少部分地由多模光纤携带的有限数量的模式负责,因为光从 耦合器 本发明的系统级实现还包括用于从承载有限模式之一的单模光纤接收光的仪器,以及根据检测模式确定绑定伙伴的特性。 绑定伙伴的附着也可能导致其他可检测的光学属性的变化,例如在一个或两个光纤输出端的光的幅度或极化。 因此,仪器可以进一步包括支撑在光纤的一个或两个输出处的偏振敏感光学元件,例如以偏振分束器的形式。 纤维中的一种或多种可以被基本上拉伸而不会扭曲,从而保持偏振取向,并且光源可以随机,圆形或线性偏振。

    Holographic grating spectrum analyzer
    110.
    发明申请
    Holographic grating spectrum analyzer 失效
    全息光栅光谱分析仪

    公开(公告)号:US20020126280A1

    公开(公告)日:2002-09-12

    申请号:US10011236

    申请日:2001-10-19

    Inventor: Thomas L. Mikes

    Abstract: A spectrum analyzer providing an integrated calibration function and for providing that calibration function automatically. The injection of light to be analyzed through a central aperture of a scanning grating onto a focusing reflector provides in combination four traversals of the space therebetween. The spectrometer thus is used to separate wavelength information spacially and receive it back at the same or adjacent aperture(s) to be analyzed by a processing system to establish the spectra for the incident light. The light is typically injected from and received back into optical fibers or other light carrying elements. Calibration light is also applied through the same or adjacent apertures in the grating from a known source and spectra such as Argon to use as a calibration reference by detecting the known spectra peaks and correlating it to grating scan angle. The same structure is also used as a telecommunications channel router by injecting light of multi-channel and thus broadband spectral content into the spectrometer through the central aperture(s) and angling the grating so that a selected channel or channels are reflected back after four passages of the spectral separator to output one or more optical fibers or other guides.

    Abstract translation: 频谱分析仪提供集成校准功能,并自动提供校准功能。 通过扫描光栅的中心孔将待分析的光注入到聚焦反射器上,四者之间的空间组合四次。 因此,光谱仪用于空间分离波长信息并在相同或相邻孔径处接收,以便由处理系统分析以建立入射光的光谱。 光通常从光纤或其他轻载元件注入并接收回。 校准光也通过来自已知源和光谱(例如氩)的光栅中的相同或相邻孔径施加,以通过检测已知光谱峰值并将其与光栅扫描角度相关联来用作校准参考。 同样的结构也被用作通信信道路由器,它通过中心孔和多个通道将光通道注入光谱仪,从而使光纤通过四通道反射回所选择的通道 的光谱分离器以输出一个或多个光纤或其它引导件。

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