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    Scanning Probe Microscope and Measurement Method Using Same
    93.
    发明申请
    Scanning Probe Microscope and Measurement Method Using Same 有权
    扫描探针显微镜和测量方法使用相同

    公开(公告)号：US20140165237A1

    公开(公告)日：2014-06-12

    申请号：US14009729

    申请日：2012-04-04

    Applicant: Takehiro Tachizaki ,  Toshihiko Nakata ,  Masahiro Watanabe

    Inventor： Takehiro Tachizaki ,  Toshihiko Nakata ,  Masahiro Watanabe

    IPC: G01Q60/18

    CPC classification number: G01Q60/18 ,  B82Y15/00 ,  B82Y20/00 ,  B82Y35/00 ,  G01N21/554 ,  G01Q60/22 ,  G01Q70/12

    Abstract: Disclosed is a measurement method of a scanning probe microscope based upon a measurement method of a scanning probe microscope for observing a shape and an optical property of a sample by exciting near-field light, scanning relative positions of the near-field light and the sample and detecting scattered light by the sample of the near-field light and having a characteristic that the near-field light is modulated to periodically vary the relative positions of the near-field light and the sample and that a frequency of modulation applied to the near-field light and an interference signal generated at a frequency for varying the relative positions of the near-field light and the sample are selectively extracted.

    Abstract translation: 公开了基于扫描探针显微镜的测量方法的扫描探针显微镜的测量方法，用于通过激发近场光来观察样品的形状和光学性质，扫描近场光和样品的相对位置 并且通过近场光的样本检测散射光，并具有调制近场光的周期性地改变近场光和样本的相对位置的特性，并且将调制频率应用于近场光 选择性地提取场射光和以用于改变近场光和样本的相对位置的频率产生的干涉信号。

    METHOD AND SYSTEM FOR NEAR-FIELD OPTICAL IMAGING
    95.
    发明申请
    METHOD AND SYSTEM FOR NEAR-FIELD OPTICAL IMAGING 有权
    近场光学成像的方法与系统

    公开(公告)号：US20120096601A1

    公开(公告)日：2012-04-19

    申请号：US13270700

    申请日：2011-10-11

    Applicant: John C. Schotland ,  Alexander A. Govyadinov ,  George Y. Panasyuk

    Inventor： John C. Schotland ,  Alexander A. Govyadinov ,  George Y. Panasyuk

    IPC: G01Q60/18

    CPC classification number: G01Q60/18

    Abstract: A system and method for optically imaging a sample. The method and system uses a controlled scatterer of light positioned in the near field of a sample. The extinguished power from an incident field, which illuminates both the sample and the controlled scatterer, is then measured as a function of the controlled scatterer position and is used to mathematically reconstruct an image of the sample.

    Abstract translation: 用于对样品进行光学成像的系统和方法。 该方法和系统使用位于样品的近场中的受控的光散射体。 然后根据受控散射体位置的函数测量来自照射样品和受控散射体的入射场的熄灭功率，并用于数学重建样品的图像。

    NEAR-FIELD OPTICAL MICROSCOPE, NEAR-FIELD OPTICAL PROBE, AND SAMPLE OBSERVATION METHOD
    96.
    发明申请
    NEAR-FIELD OPTICAL MICROSCOPE, NEAR-FIELD OPTICAL PROBE, AND SAMPLE OBSERVATION METHOD 失效
    近场光学显微镜，近场光学探头和样品观测方法

    公开(公告)号：US20110321204A1

    公开(公告)日：2011-12-29

    申请号：US13167172

    申请日：2011-06-23

    Applicant: Koichi KARAKI ,  Kimihiko NISHIOKA ,  Yasuo SASAKI ,  Takuya TSUKAGOSHI ,  Yoshiharu AJIKI ,  Isao SHIMOYAMA ,  Kiyoshi MATSUMOTO ,  Tetsuro KAN ,  Yusuke TAKEI ,  Kentaro NODA

    Inventor： Koichi KARAKI ,  Kimihiko NISHIOKA ,  Yasuo SASAKI ,  Takuya TSUKAGOSHI ,  Yoshiharu AJIKI ,  Isao SHIMOYAMA ,  Kiyoshi MATSUMOTO ,  Tetsuro KAN ,  Yusuke TAKEI ,  Kentaro NODA

    IPC: G01Q60/22 ,  G02B21/06 ,  G01Q60/18 ,  H01J3/14

    CPC classification number: G01Q60/22

    Abstract: Provided is a scanning near-field optical microscope capable of obtaining in a highly sensitive manner, optical information having a spatial frequency higher than a spatial frequency corresponding to a wavelength of irradiation light. A scanning near-field optical microscope 100 according to the present invention includes: a light irradiating part 102 for emitting illumination light toward a sample 107; a light receiving part 112 for receiving light; a microstructure for generating or selectively transmitting near-field light, the microstructure being disposed on at least one of an emission side of the light irradiating part 102 and an incident side of the light receiving part 112; and an ultrahigh-wavenumber transmitting medium 108 for transmitting near-field light, the ultrahigh-wavenumber transmitting medium exhibiting anisotropy in permittivity or permeability.

    Abstract translation: 提供了能够以高灵敏度的方式获得空间频率高于与照射光的波长相对应的空间频率的光学信息的扫描近场光学显微镜。 根据本发明的扫描近场光学显微镜100包括：朝向样品107发射照明光的光照射部分102; 用于接收光的光接收部分112; 用于产生或选择性地透射近场光的微结构，所述微结构布置在所述光照射部分102的发射侧和所述光接收部分112的入射侧中的至少一个上; 以及用于发射近场光的超高波数传输介质108，超高波数传输介质具有介电常数或磁导率的各向异性。

    Infrared focusing device
    98.
    发明申请
    Infrared focusing device 有权
    红外聚焦装置

    公开(公告)号：US20050254121A1

    公开(公告)日：2005-11-17

    申请号：US10519078

    申请日：2003-04-22

    Applicant: Susumu Komiyama ,  Kenji Ikushima

    Inventor： Susumu Komiyama ,  Kenji Ikushima

    IPC: G01Q60/18 ,  G01Q60/22 ,  G02B13/14

    CPC classification number: G01Q60/22

    Abstract: An infrared light condensing apparatus is provided that permits an infrared light of several tens microns in wavelength to be focused efficiently at a microfine area of submicron or less and also a near-field from a microfine area of submicron or less to be taken out efficiently and at the same time permits a scanning image to be obtained. It includes a solid immersion lens (2) made of a medium of high index of refraction for coupling an incident light (8) or an outgoing light (9) to an antenna efficiently, a measured specimen (6) disposed on a base plane (3) of the solid immersion lens (2), the antenna (4), e.g., a planar dipole antenna (14) or a planar slot antenna (16), that is disposed away from the base plane (3) at a distance that is ¼ of an effective wavelength of the light for causing the light to geometrically resonate therewith, a probe (4b) in the form of a rod-like conductor having a sharply point end projecting from the antenna (4), and a position control means such as a triaxial XYZ mechanical stage (23) for controlling the position of the probe (4b) with the intermediary of a cantilever (5). Coupling the incident light (8) or the outgoing light (9) to the antenna (4) is made through the high dielectric constant medium side and an antenna capable of bringing about geometrical resonance is used to enhance the efficiency.

    Abstract translation: 提供一种红外聚光装置，其允许波长为几十微米的红外光有效地聚焦在亚微米或更小的微细区域以及亚微米或更小的微细区域的近场，以被有效地取出; 同时允许获得扫描图像。 它包括由高折射率介质构成的固体浸没透镜（2），用于将入射光（8）或出射光（9）有效地耦合到天线，设置在基础平面上的测量样品（6） 固体浸没透镜（2）的天线（4），例如平面偶极天线（14）或平面缝隙天线（16），其远离基底平面（3）远离 是用于使光与其几何谐振的光的有效波长的1/4，具有从天线（4）突出的尖锐点的棒状导体形式的探针（4b）和位置控制装置 例如用于通过悬臂（5）的中间来控制探针（4b）的位置的三轴XYZ机械台（23）。 通过高介电常数介质侧将入射光（8）或出射光（9）耦合到天线（4），并且使用能够产生几何谐振的天线来提高效率。

    Method and apparatus for depositing material with high resolution
    100.
    发明申请
    Method and apparatus for depositing material with high resolution 审中-公开
    高分辨率沉积材料的方法和装置

    公开(公告)号：US20050214452A1

    公开(公告)日：2005-09-29

    申请号：US10810853

    申请日：2004-03-29

    Applicant: Stephen Forrest ,  Max Shtein

    Inventor： Stephen Forrest ,  Max Shtein

    IPC: G01Q30/02 ,  G01Q60/18 ,  C09K7/00

    CPC classification number: G02B6/262

    Abstract: A device is provided. The device includes a base, and a reservoir disposed in the base. The reservoir is defined by a cladding and the base, and has an opening with a largest dimension of about 200 nm or less, more preferably 100 nm or less, and most preferably 60 nm or less. A material may be disposed within the reservoir. The base may be attached to a position control apparatus that may control the position of the base with an accuracy on the order of nanometers. The position control apparatus may include an atomic force microsope and/or a near field scanning optical microscope. The base may also be coupled to an energy application apparatus that may apply energy to the material. The device may be used to deposit material onto a substrate with a very high resolution, on the order of a few molecules across. The device may also be used to remove material from a substrate with a very high resolution by transmitting energy through the base. A device used for such removal may or may not include a reservoir.

    Abstract translation: 提供了一种设备。 该装置包括底座和设置在基座中的储存器。 储存器由包层和基底限定，并且具有最大尺寸为约200nm或更小，更优选为100nm或更小，最优选为60nm或更小的开口。 材料可以设置在储存器内。 基座可以附接到位置控制装置，该位置控制装置可以以大约数量级的精度控制基座的位置。 位置控制装置可以包括原子力微透镜和/或近场扫描光学显微镜。 基座还可以耦合到能够施加能量到材料的能量施加装置。 该器件可用于以非常高的分辨率将材料沉积到衬底上，几分子跨越数量级。 该装置还可以用于通过将能量透过基底以非常高的分辨率从衬底去除材料。 用于这种去除的装置可以包括或可以不包括储存器。

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