Micro-electro-mechanical device and method of manufacturing the same
    6.
    发明授权
    Micro-electro-mechanical device and method of manufacturing the same 有权
    微机电装置及其制造方法

    公开(公告)号:US08168461B2

    公开(公告)日:2012-05-01

    申请号:US12963483

    申请日:2010-12-08

    IPC分类号: H01L21/00

    摘要: The present invention improves mechanical strength of a micro-electro-mechanical device (MEMS) having a movable portion to improve reliability. In a micro-electro-mechanical device (MEMS) having a movable portion, a portion which has been a hollow portion in the case of a conventional structure is filled with a filler material. As the filler material, a block copolymer that is highly flexible is used, for example. By filling the hollow portion, mechanical strength improves. Besides, warpage of an upper portion of a structure body in the manufacture process is prevented, whereby yield improves. A micro-electro-mechanical device thus manufactured is highly reliable.

    摘要翻译: 本发明提高了具有可移动部分的微机电装置(MEMS)的机械强度,以提高可靠性。 在具有可移动部分的微机电装置(MEMS)中,在常规结构的情况下已经是中空部分的部分填充有填充材料。 作为填充材料,例如使用高度柔性的嵌段共聚物。 通过填充中空部分,机械强度提高。 此外,防止了制造过程中的结构体的上部的翘曲,从而产率提高。 这样制造的微机电装置是高度可靠的。