发明授权
- 专利标题： Micro-electro-mechanical device and method of manufacturing the same
- 专利标题（中）： 微机电装置及其制造方法
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申请号： US12963483申请日： 2010-12-08
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公开(公告)号： US08168461B2公开(公告)日： 2012-05-01
- 发明人: Kaoru Tsuchiya , Takafumi Mizoguchi
- 申请人： Kaoru Tsuchiya , Takafumi Mizoguchi
- 申请人地址： JP Atsugi-shi, Kanagawa-ken
- 专利权人： Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人： Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址： JP Atsugi-shi, Kanagawa-ken
- 代理机构： Fish & Richardson P.C.
- 优先权： JP2007-289224 20071107
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
The present invention improves mechanical strength of a micro-electro-mechanical device (MEMS) having a movable portion to improve reliability. In a micro-electro-mechanical device (MEMS) having a movable portion, a portion which has been a hollow portion in the case of a conventional structure is filled with a filler material. As the filler material, a block copolymer that is highly flexible is used, for example. By filling the hollow portion, mechanical strength improves. Besides, warpage of an upper portion of a structure body in the manufacture process is prevented, whereby yield improves. A micro-electro-mechanical device thus manufactured is highly reliable.
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