公开(公告)号：US10304708B2

公开(公告)日：2019-05-28

申请号：US15646215

申请日：2017-07-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Gyuyeol Kim ,  Shin-Ho Kang

IPC: H01L21/67 ,  G01R1/067 ,  G01R31/26 ,  H01L21/683 ,  G01R31/319 ,  G01R31/3193

Abstract: A test system includes a signal generator, a plurality of transmission/reception circuits and a voltage generator. The signal generator generates a test signal. The transmission/reception circuits are connected to a plurality of transmission lines. The transmission lines each include a main line and at least one branch line connected to the main line. The transmission/reception circuits provide the test signal to the transmission lines. The transmission/reception circuits detect a response signal corresponding to the test signal. The voltage generator supplies a first reference voltage and one of the second reference voltage greater than the first reference voltage and a third reference voltage between the first reference voltage and the second reference voltage to at least one of the transmission/reception circuits.

公开(公告)号：US11378586B2

公开(公告)日：2022-07-05

申请号：US16778400

申请日：2020-01-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： Joonsu Ji ,  Jinwoo Jung ,  Gyuyeol Kim ,  Jaehyoung Park

IPC: G01R31/28 ,  G01R1/04 ,  H01R12/85

Abstract: A stiffener includes a first upper cover and a second upper cover, a first lateral side cover and a second lateral side cover, and a first longitudinal side cover and a second longitudinal side cover. The first and second upper covers extend in parallel with each other. The first and second lateral side covers are connected to separate, respective covers of the first and second upper covers, and facing each other. The first and second longitudinal side covers are each connected to the both first and second upper covers, the first and second longitudinal side covers facing each other. The first and second upper covers each include a separate plurality of upper elastic portions. Each upper elastic portion of each separate plurality of upper elastic portions has a vertical elasticity.

公开(公告)号：US20210041479A1

公开(公告)日：2021-02-11

申请号：US16778400

申请日：2020-01-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： Joonsu JI ,  Jinwoo Jung ,  Gyuyeol Kim ,  Jaehyoung Park

IPC: G01R1/04 ,  H01R12/85 ,  G01R31/28

Abstract: A stiffener includes a first upper cover and a second upper cover, a first lateral side cover and a second lateral side cover, and a first longitudinal side cover and a second longitudinal side cover. The first and second upper covers extend in parallel with each other. The first and second lateral side covers are connected to separate, respective covers of the first and second upper covers, and facing each other. The first and second longitudinal side covers are each connected to the both first and second upper covers, the first and second longitudinal side covers facing each other. The first and second upper covers each include a separate plurality of upper elastic portions. Each upper elastic portion of each separate plurality of upper elastic portions has a vertical elasticity.

公开(公告)号：US11921158B2

公开(公告)日：2024-03-05

申请号：US18075542

申请日：2022-12-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Byung-Sung Kim ,  Yun-Hyok Choi ,  Gyuyeol Kim ,  Sungjung Kim ,  Cheol-Heui Park ,  Sanghoon Lee ,  Jae-Woong Choi

IPC: G01R31/3177 ,  G01R1/073 ,  G01R23/165 ,  G01R25/04 ,  G01R31/317 ,  G01R31/3183 ,  G04F10/00

CPC classification number: G01R31/3177 ,  G01R1/07314 ,  G01R23/165 ,  G01R25/04 ,  G01R31/31713 ,  G01R31/31715 ,  G01R31/31724 ,  G01R31/31725 ,  G01R31/318328 ,  G04F10/005

Abstract: Disclosed is a fan-out buffer which includes a first channel that includes a first delay circuit adjusting a first delay time of a calibration test signal depending on a first delay control signal, a second channel that includes a second delay circuit adjusting a second delay time of the calibration test signal depending on a second delay control signal, a first edge-to-pulse converter that detects a first edge included in a first time domain reflectometry (TDR) waveform of an output terminal of the first channel and generates a first start pulse signal including a first pulse, a second edge-to-pulse converter that generates a second start pulse signal including a second pulse, a stop pulse signal generator that generates a stop pulse signal including a first stop pulse, and a first delay control signal generator that calculates a phase difference generates the first delay control signal.

公开(公告)号：US11327095B2

公开(公告)日：2022-05-10

申请号：US16886430

申请日：2020-05-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sungho Joo ,  Gyeongwon Park ,  Gyuyeol Kim ,  Ikbum Lim

IPC: G01R1/073 ,  G01R1/067 ,  G01R27/20 ,  G01R31/319

Abstract: A probe card, a system for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device are provided. A probe card includes a first probe configured to contact a first ground pad of a device under test, a reference resistor including a first terminal and a second terminal and connected to the first probe, and a second probe configured to contact a second ground pad of the device under test, wherein the second probe is further configured to be connected to a ground node for applying a reference potential, and the first terminal of the reference resistor is configured to be connected to the first probe and the second terminal of the reference resistor is configured to receive an input potential.

公开(公告)号：US12038458B2

公开(公告)日：2024-07-16

申请号：US17524841

申请日：2021-11-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung Hoon Lee ,  Gyuyeol Kim ,  Yu-Kyum Kim ,  Hanjik Nam ,  Sehoon Park ,  Young Jun Park ,  Seungwon Jeong ,  Woojun Choi

IPC: G01R1/073 ,  G01R1/04 ,  G01R1/067

CPC classification number: G01R1/07342 ,  G01R1/06727

Abstract: A probe for testing a semiconductor device includes a post having a plate shape and connected to a test substrate. A beam has a first end connected to the post. A tip structure is connected to a second end of the beam. The post includes a front surface having a normal line extending in a first direction. A back surface is located opposite to the front surface. Bumps are disposed on the front surface and are spaced apart from each other. The beam extends in a second direction intersecting the first direction. Each of the bumps protrudes from the front surface in the first direction by a first length.

公开(公告)号：US11243232B2

公开(公告)日：2022-02-08

申请号：US16587557

申请日：2019-09-30

Applicant: Samsung Electronics Co., Ltd.

Inventor： Gyuyeol Kim ,  Yukyum Kim

IPC: G01R31/317 ,  G01R31/319 ,  G01R1/073

Abstract: A probe apparatus includes a tester including a voltage supply, and a probe card including a first probe and a first sensing pin. The first probe is electrically connected to both an output port of the voltage supply and an electrode pad of a first semiconductor device. The first sensing pin is electrically connected to both a controller and a sensing pad of the first semiconductor device.