公开(公告)号：US10304708B2

公开(公告)日：2019-05-28

申请号：US15646215

申请日：2017-07-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Gyuyeol Kim ,  Shin-Ho Kang

IPC: H01L21/67 ,  G01R1/067 ,  G01R31/26 ,  H01L21/683 ,  G01R31/319 ,  G01R31/3193

Abstract: A test system includes a signal generator, a plurality of transmission/reception circuits and a voltage generator. The signal generator generates a test signal. The transmission/reception circuits are connected to a plurality of transmission lines. The transmission lines each include a main line and at least one branch line connected to the main line. The transmission/reception circuits provide the test signal to the transmission lines. The transmission/reception circuits detect a response signal corresponding to the test signal. The voltage generator supplies a first reference voltage and one of the second reference voltage greater than the first reference voltage and a third reference voltage between the first reference voltage and the second reference voltage to at least one of the transmission/reception circuits.

公开(公告)号：US10996242B2

公开(公告)日：2021-05-04

申请号：US15615084

申请日：2017-06-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Gyu-Yeol Kim ,  Shin-Ho Kang

IPC: G01R1/073 ,  G01R35/00

Abstract: A probe card, for testing an electrical characteristic of a device under test (DUT) including a plurality of semiconductor devices, includes a substrate, a first probe pin disposed on a surface of the substrate and including a tip portion capable of contacting a pad of the DUT, and a second probe pin disposed on the surface of the substrate and including a tip portion capable of contacting the pad of the DUT. The first probe pin protrudes further than the second probe pin protrudes from the surface of the substrate in a first direction that is substantially perpendicular to the surface of the substrate.