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公开(公告)号：US11243232B2
公开(公告)日：2022-02-08
申请号：US16587557
申请日：2019-09-30
Applicant: Samsung Electronics Co., Ltd.
Inventor： Gyuyeol Kim , Yukyum Kim
IPC: G01R31/317 , G01R31/319 , G01R1/073
Abstract: A probe apparatus includes a tester including a voltage supply, and a probe card including a first probe and a first sensing pin. The first probe is electrically connected to both an output port of the voltage supply and an electrode pad of a first semiconductor device. The first sensing pin is electrically connected to both a controller and a sensing pad of the first semiconductor device.
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