公开(公告)号：US11327095B2

公开(公告)日：2022-05-10

申请号：US16886430

申请日：2020-05-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sungho Joo ,  Gyeongwon Park ,  Gyuyeol Kim ,  Ikbum Lim

IPC: G01R1/073 ,  G01R1/067 ,  G01R27/20 ,  G01R31/319

Abstract: A probe card, a system for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device are provided. A probe card includes a first probe configured to contact a first ground pad of a device under test, a reference resistor including a first terminal and a second terminal and connected to the first probe, and a second probe configured to contact a second ground pad of the device under test, wherein the second probe is further configured to be connected to a ground node for applying a reference potential, and the first terminal of the reference resistor is configured to be connected to the first probe and the second terminal of the reference resistor is configured to receive an input potential.