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1.发明申请公开(公告)号：US20160018328A1
公开(公告)日：2016-01-21
申请号：US14805439
申请日：2015-07-21
Applicant: Samsung Electronics Co., Ltd.
Inventor： Tae-Joong Kim , Yong-Deok JEONG , Kwang-Soo KIM , Byeong-Hwan JEON , Yu-Sin YANG , Sang-Kil LEE , Chung-Sam JUN
CPC classification number: G01N21/9501 , G02B3/0006 , G02B21/0016 , G02B26/0808
Abstract: An optical transformation module includes a light generator generating a parallel light beam to be incident onto a surface of an inspection object and changing a wavelength of the parallel light beam, and a rotating grating positioned on a path of the parallel light beam and rotatable by a predetermined rotation angle such that the parallel light beam is transformed according to the wavelength of the parallel light beam and the rotation angle of the rotating grating to have a desired incidence angle and a desired incidence position onto the surface of the inspection object.
Abstract translation: 光学变换模块包括产生入射到检查对象的表面上的平行光束并改变平行光束的波长的光发生器，以及位于平行光束的路径上的旋转光栅， 预定的旋转角度，使得平行光束根据平行光束的波长和旋转光栅的旋转角度被变换以具有期望的入射角和期望的入射位置到检查对象的表面上。
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Patent Agency Ranking
公开(公告)号：US20170124695A1
公开(公告)日：2017-05-04
申请号：US15211331
申请日：2016-07-15
Applicant: Samsung Electronics Co., Ltd.
Inventor： Sangok SEOK , Il-Hyoung LEE , Byeong-Hwan JEON
CPC classification number: G06T7/0004 , G06T1/20 , G06T2207/10141 , G06T2207/30148 , H04N5/2258
Abstract: Provided are a data processing apparatus and a substrate inspection method. The data processing apparatus includes a first sensing unit which generates first data about a target, a second sensing unit which generates second data about the target, a splitter unit which receives and synchronizes the first data and the second data and outputs m pieces of copied data by copying the synchronized data, and a processing unit which receives and processes any one of the m pieces of copied data, wherein the second data has a time difference with the first data, and m is a natural number of two or more.
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公开(公告)号：US20140246584A1
公开(公告)日：2014-09-04
申请号：US14060783
申请日：2013-10-23
Applicant: Samsung Electronics Co., Ltd.
Inventor： Jeong-Woo HYUN , Won-Guk SEO , Chang-Hoon CHOI , Byeong-Hwan JEON
CPC classification number: H01J37/28 , H01J37/026
Abstract: Provided is a scanning electron microscope capable of collecting electric charges accumulated on a sample. The scanning electron microscope includes a column unit configured to generate an electron beam and scan a sample with the electron beam, a chamber unit combined with the column unit, and including a sample stage spaced apart from an end of the column unit to accommodate the sample therein, a detection unit configured to detect signals emitted from the sample, a charge collecting unit disposed between the end of the column unit and the sample stage to collect electric charges, and a voltage supply unit configured to apply an optimum or, alternatively, desirable voltage to the charge collecting unit.
Abstract translation: 提供能够收集在样品上积累的电荷的扫描型电子显微镜。 扫描电子显微镜包括：柱单元，被配置为产生电子束并用电子束扫描样品，室单元与柱单元组合，并且包括与柱单元的端部间隔开的样品台，以容纳样品 其中，检测单元被配置为检测从样品发射的信号，设置在列单元的端部和样品台之间以收集电荷的电荷收集单元，以及电压供应单元，其被配置为施加最佳或可选的 电压到电荷收集单元。
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公开(公告)号：US20130169140A1
公开(公告)日：2013-07-04
申请号：US13667203
申请日：2012-11-02
Applicant: Samsung Electronics Co., Ltd.
Inventor： Woo-Seok KO , Yu-Sin YANG , Sue-Jin CHO , Won-Don JOO , Min-Kook KIM , Sang-Kil LEE , Byeong-Hwan JEON
CPC classification number: H01J65/04
Abstract: A broadband light illuminator of an optical inspector for optically detecting defects of an inspection object may include an electrode-less chamber including a plasma area from which broadband light is generated; a first energy provider, exterior to the chamber, configured to provide first energy for ionizing high pressure gases to form ionized gases in the chamber; a second energy provider, exterior to the chamber, configured to provide second energy for transforming the ionized gases into a plasma state to form the plasma area at a central portion of the chamber; an elliptical reflector having a first focus at which the chamber is positioned and a second focus such that the broadband light is reflected from the elliptical reflector toward the second focus; and a lens unit focusing the reflected broadband light onto the inspection object to form an inspection light for detecting the defects of the inspection object.
Abstract translation: 用于光学检测检查对象的缺陷的光学检查器的宽带照明器可以包括：无电极室，包括产生宽带光的等离子体区域; 第一能量提供者，在室外，被配置为提供第一能量，用于离子化高压气体以在室中形成离子化气体; 第二能量供应器，室外，被配置为提供第二能量，用于将电离气体转换成等离子体状态，以在室的中心部分形成等离子体区域; 具有第一焦点的椭圆形反射器，室被定位，第二焦点使得宽带光从椭圆形反射器反射到第二焦点; 以及透镜单元，将反射的宽带光聚焦到检查对象上，以形成用于检测检查对象的缺陷的检查光。
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公开(公告)号：US20170336616A1
公开(公告)日：2017-11-23
申请号：US15377070
申请日：2016-12-13
Applicant: Samsung Electronics Co., Ltd.
Inventor： Jun-Bum PARK , Kyung-Sik KANG , Tae-Joong KIM , Sang-Ok SEOK , Byeong-Hwan JEON
CPC classification number: G02B21/365 , G01N21/8806 , G01N21/8851 , G01N21/9501 , G02B21/0096 , G02B26/105
Abstract: A clock signal generator includes an optic mirror rotatable to scan an incident light beam in a first direction, a grid plate including a plurality of grid arrays arranged in a second direction different from the first direction, wherein light reflected from the optic mirror is selectively passed through when the light beam is scanned on the grid plate in the first direction, the grid array being offset in the first direction by a particular distance with respect to an adjacent grid array, a light detector configured to detect a light passing through the grid arrays, and a pixel clock generator configured to generate a clock signal based on detection signals received from the light detector.
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公开(公告)号：US20150355441A1
公开(公告)日：2015-12-10
申请号：US14630126
申请日：2015-02-24
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Tae-Joong KIM , Kwang-Soo KIM , Wook-Rae KIM , Young-Kyu PARK , Byeong-Hwan JEON , Kohei HASHIMOTO
CPC classification number: G02B17/0856 , G02B17/0808 , G02B21/04 , G02B27/0025
Abstract: An objective lens assembly includes a catadioptric group, a first refractive lens axially aligned with the catadioptric group, and a focusing lens axially aligned with and between the catadioptric group and the first refractive lens. The focusing lens is an aspheric lens.
Abstract translation: 物镜组件包括反射折射组，与折反射组轴向对准的第一折射透镜，以及与折反射组与第一折射透镜轴向对准的聚焦透镜。 聚焦透镜是非球面透镜。
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