公开(公告)号：US20160061583A1

公开(公告)日：2016-03-03

申请号：US14799107

申请日：2015-07-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Yoon RYU ,  Sang-Kil LEE ,  Chung-Sam JUN ,  Woo-Seok KO ,  Ho-Jeong KWAK ,  Souk KIM ,  Kwan-Woo RYU ,  Yu-Sin YANG

IPC: G01B11/06

CPC classification number: G01B11/0633

Abstract: An apparatus and a system for measuring the thickness of a thin film are provided. The apparatus includes a signal detector, a Fast Fourier Transform (FFT) generator, an Inverse Fast Fourier Transform (IFFT) generator, and a thickness analyzer. The signal detector detects an electric field signal with respect to a reflected light that is reflected from a thin film. The FFT generator performs FFT with respect to the electric field signal to separate a DC component from an AC component of the electric field signal. The IFFT generator receives the separated AC component of the electric field signal, performs IFFT with respect to the AC component, and extracts a phase value of the AC component. The thickness analyzer measures the thickness of the thin film using the extracted phase value.

Abstract translation: 提供了用于测量薄膜厚度的装置和系统。 该装置包括信号检测器，快速傅里叶变换（FFT）发生器，快速傅里叶逆变换（IFFT）发生器和厚度分析器。 信号检测器检测相对于从薄膜反射的反射光的电场信号。 FFT发生器相对于电场信号执行FFT，以将DC分量与电场信号的AC分量分离。 IFFT发生器接收电场信号的分离的AC分量，相对于AC分量执行IFFT，并提取AC分量的相位值。 厚度分析器使用提取的相位值来测量薄膜的厚度。

公开(公告)号：US20160025618A1

公开(公告)日：2016-01-28

申请号：US14806775

申请日：2015-07-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung-Yoon Ryu ,  Woo-Seok KO ,  Yu-Sin YANG ,  Sang-Kil LEE ,  Chung-Sam JUN

IPC: G01N21/21 ,  G01N21/95

CPC classification number: G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/213

Abstract: Spectral ellipsometry measurement systems are provided including a polarizer that rotates at a first angle and adjusts a polarizing direction of incident light of a measurement sample; a compensator that rotates at a second angle, different from the first angle, and adjusts a phase difference of the incident light; an analyzer that rotates at a third angle and adjusts a polarizing direction of light reflected on the measurement sample; a detector that detects a spectral image from the reflected light; a controller that controls one of the polarizer, the compensator, and the analyzer according to polarizer-compensator-analyzer (PCA) angle sets including the first to third angles; and a processor that receives, from the detector, a first spectral image corresponding to a first PCA angle set and a first wavelength and a second spectral image corresponding to a second PCA angle set and a second wavelength, different from the first wavelength, and generates a polarizer-compensator-analyzer rotating (PCAR) spectral matrix using the first and second spectral images.

Abstract translation: 提供了光谱椭圆测量系统，其包括以第一角度旋转并调节测量样品的入射光的偏振方向的偏振器; 补偿器，其以与第一角度不同的第二角度旋转，并调节入射光的相位差; 分析器，其以第三角度旋转并调节在测量样品上反射的光的偏振方向; 从反射光检测光谱图像的检测器; 根据包括第一至第三角度的偏振器 - 补偿器分析器（PCA）角度集合控制偏振器，补偿器和分析器之一的控制器; 以及处理器，其从所述检测器接收对应于与所述第一波长不同的第一PCA角度集合和对应于第二PCA角度集合和第二波长的第一波长和第二光谱图像的第一光谱图像，并且生成 使用第一和第二光谱图像的偏振器 - 补偿器分析器旋转（PCAR）光谱矩阵。

公开(公告)号：US20130208486A1

公开(公告)日：2013-08-15

申请号：US13762782

申请日：2013-02-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Won-Don JOO ,  Woo-Seok KO ,  Yu-Sin YANG ,  Sue-Jin CHO ,  Sang Don JANG ,  Byeong Hwan JEON

IPC: F21V13/04

CPC classification number: F21V13/04 ,  G01N21/8806 ,  G01N21/9501 ,  G03B2215/0582 ,  G03B2215/0592

Abstract: An illumination optic system includes a convex mirror to reflect light from a light source to towards a lens. The light source is at a first focus position and the lens is at a second focus position of the mirror. The system also includes a reflector to reflect light not incident on the lens toward the convex mirror. The reflector has a light guide hole to guide light to the incidence surface of the lens.

Abstract translation: 照明光学系统包括用于将来自光源的光反射到透镜的凸面镜。 光源处于第一焦点位置，并且透镜处于反射镜的第二焦点位置。 该系统还包括反射器，以将未入射到透镜的光反射到凸面镜。 反射器具有导光孔以将光引导到透镜的入射表面。

公开(公告)号：US20130169140A1

公开(公告)日：2013-07-04

申请号：US13667203

申请日：2012-11-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Woo-Seok KO ,  Yu-Sin YANG ,  Sue-Jin CHO ,  Won-Don JOO ,  Min-Kook KIM ,  Sang-Kil LEE ,  Byeong-Hwan JEON

IPC: H05H1/46 ,  H01J65/04

CPC classification number: H01J65/04

Abstract: A broadband light illuminator of an optical inspector for optically detecting defects of an inspection object may include an electrode-less chamber including a plasma area from which broadband light is generated; a first energy provider, exterior to the chamber, configured to provide first energy for ionizing high pressure gases to form ionized gases in the chamber; a second energy provider, exterior to the chamber, configured to provide second energy for transforming the ionized gases into a plasma state to form the plasma area at a central portion of the chamber; an elliptical reflector having a first focus at which the chamber is positioned and a second focus such that the broadband light is reflected from the elliptical reflector toward the second focus; and a lens unit focusing the reflected broadband light onto the inspection object to form an inspection light for detecting the defects of the inspection object.

Abstract translation: 用于光学检测检查对象的缺陷的光学检查器的宽带照明器可以包括：无电极室，包括产生宽带光的等离子体区域; 第一能量提供者，在室外，被配置为提供第一能量，用于离子化高压气体以在室中形成离子化气体; 第二能量供应器，室外，被配置为提供第二能量，用于将电离气体转换成等离子体状态，以在室的中心部分形成等离子体区域; 具有第一焦点的椭圆形反射器，室被定位，第二焦点使得宽带光从椭圆形反射器反射到第二焦点; 以及透镜单元，将反射的宽带光聚焦到检查对象上，以形成用于检测检查对象的缺陷的检查光。

公开(公告)号：US20160189369A1

公开(公告)日：2016-06-30

申请号：US14967943

申请日：2015-12-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jae-Ouk JUNG ,  Woo-Seok KO ,  Yu-Sin YANG ,  Sang-Kil LEE ,  Chung-Sam JUN

IPC: G06T7/00 ,  G02B21/00

CPC classification number: G06T7/0006 ,  G02B21/0028 ,  G02B21/0056 ,  G02B21/008 ,  G06T7/001 ,  G06T2207/30148

Abstract: A defect detecting method includes generating an actual image of a pattern on a sample based on irradiation of an electron beam onto the sample, performing a contrast conversion of the actual image to generate a conversion image representing a normal pattern, matching the conversion image and a design image for the pattern, and detecting a defective pattern in the actual image based on matching of the conversion image and the design image. The contrast conversion may be performed for gray levels of pixels in the actual image.

Abstract translation: 缺陷检测方法包括：基于对样品的电子束的照射，生成样品上的图案的实际图像，对实际图像执行对比度转换，生成表示正常图案的转换图像，匹配转换图像和 基于图像的设计图像，并且基于转换图像和设计图像的匹配来检测实际图像中的缺陷图案。 可以对实际图像中的灰度级像素执行对比度转换。