公开(公告)号：US20150029517A1

公开(公告)日：2015-01-29

申请号：US14286213

申请日：2014-05-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jang-Ik PARK ,  Il-Hwan NAM ,  Kwan-Woo RYU

IPC: G01B11/06

CPC classification number: G01B11/0633

Abstract: Methods for measuring a thickness of an object including acquiring at least one of a wavelength domain spectrum for an amplitude ratio (Ψ) and a phase difference (Δ) of reflected light from a film material, converting the wavelength domain spectrum into a 1/wavelength domain spectrum, acquiring a resulting spectrum by performing fast fourier transform (FFT) on the 1/wavelength domain spectrum, and measuring a thickness of the film material from the resulting spectrum may be provided.

Abstract translation: 用于测量物体厚度的方法，包括获取来自胶片材料的反射光的振幅比（Ψ）和相位差（＆Dgr）的波长域光谱中的至少一个，将波长域光谱转换成1 / 波长域光谱，通过在1 /波长域光谱上执行快速傅里叶变换（FFT）获得所得到的光谱，并且可以提供从所得光谱测量膜材料的厚度。

公开(公告)号：US20160061583A1

公开(公告)日：2016-03-03

申请号：US14799107

申请日：2015-07-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Yoon RYU ,  Sang-Kil LEE ,  Chung-Sam JUN ,  Woo-Seok KO ,  Ho-Jeong KWAK ,  Souk KIM ,  Kwan-Woo RYU ,  Yu-Sin YANG

IPC: G01B11/06

CPC classification number: G01B11/0633

Abstract: An apparatus and a system for measuring the thickness of a thin film are provided. The apparatus includes a signal detector, a Fast Fourier Transform (FFT) generator, an Inverse Fast Fourier Transform (IFFT) generator, and a thickness analyzer. The signal detector detects an electric field signal with respect to a reflected light that is reflected from a thin film. The FFT generator performs FFT with respect to the electric field signal to separate a DC component from an AC component of the electric field signal. The IFFT generator receives the separated AC component of the electric field signal, performs IFFT with respect to the AC component, and extracts a phase value of the AC component. The thickness analyzer measures the thickness of the thin film using the extracted phase value.

Abstract translation: 提供了用于测量薄膜厚度的装置和系统。 该装置包括信号检测器，快速傅里叶变换（FFT）发生器，快速傅里叶逆变换（IFFT）发生器和厚度分析器。 信号检测器检测相对于从薄膜反射的反射光的电场信号。 FFT发生器相对于电场信号执行FFT，以将DC分量与电场信号的AC分量分离。 IFFT发生器接收电场信号的分离的AC分量，相对于AC分量执行IFFT，并提取AC分量的相位值。 厚度分析器使用提取的相位值来测量薄膜的厚度。