公开(公告)号：US20150029517A1

公开(公告)日：2015-01-29

申请号：US14286213

申请日：2014-05-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jang-Ik PARK ,  Il-Hwan NAM ,  Kwan-Woo RYU

IPC: G01B11/06

CPC classification number: G01B11/0633

Abstract: Methods for measuring a thickness of an object including acquiring at least one of a wavelength domain spectrum for an amplitude ratio (Ψ) and a phase difference (Δ) of reflected light from a film material, converting the wavelength domain spectrum into a 1/wavelength domain spectrum, acquiring a resulting spectrum by performing fast fourier transform (FFT) on the 1/wavelength domain spectrum, and measuring a thickness of the film material from the resulting spectrum may be provided.

Abstract translation: 用于测量物体厚度的方法，包括获取来自胶片材料的反射光的振幅比（Ψ）和相位差（＆Dgr）的波长域光谱中的至少一个，将波长域光谱转换成1 / 波长域光谱，通过在1 /波长域光谱上执行快速傅里叶变换（FFT）获得所得到的光谱，并且可以提供从所得光谱测量膜材料的厚度。