公开(公告)号：US20170178945A1

公开(公告)日：2017-06-22

申请号：US15348208

申请日：2016-11-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Won-Guk SEO ,  Yong-Won CHOI ,  Sang-Jin LEE ,  Yong-Bum JUNG ,  Seok HEO

IPC: H01L21/687 ,  C23C16/50 ,  C23C16/455 ,  B05D1/00 ,  H01L21/67 ,  C23C16/46

CPC classification number: H01L21/68707 ,  B05D1/005 ,  C23C16/45544 ,  C23C16/46 ,  C23C16/463 ,  C23C16/50 ,  C23C16/54 ,  C23C16/56 ,  H01L21/67103 ,  H01L21/67161 ,  H01L21/67178 ,  H01L21/67196 ,  H01L21/67742

Abstract: A substrate processing system includes an index module including wafer carriers. First and second heat processing units are disposed adjacent to the index module. Each of the first and second heat processing units includes a plurality of first heat processing plates sequentially stacked. First and second transfer robots are disposed adjacent to the first and second heat processing units, respectively. Each of the first and second transfer robots is movable along a vertical transfer path and to rotate. First and second coating units are disposed adjacent to first sides of the first and second transfer robots, respectively. Each of the first and second coating units includes a plurality of coating devices sequentially stacked. First and second bake units are disposed adjacent to second sides of the first and second transfer robots, respectively. Each of the first and second bake units includes a plurality of second heat processing plates sequentially stacked.

公开(公告)号：US20140246584A1

公开(公告)日：2014-09-04

申请号：US14060783

申请日：2013-10-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jeong-Woo HYUN ,  Won-Guk SEO ,  Chang-Hoon CHOI ,  Byeong-Hwan JEON

IPC: H01J37/26 ,  H01J37/20

CPC classification number: H01J37/28 ,  H01J37/026

Abstract: Provided is a scanning electron microscope capable of collecting electric charges accumulated on a sample. The scanning electron microscope includes a column unit configured to generate an electron beam and scan a sample with the electron beam, a chamber unit combined with the column unit, and including a sample stage spaced apart from an end of the column unit to accommodate the sample therein, a detection unit configured to detect signals emitted from the sample, a charge collecting unit disposed between the end of the column unit and the sample stage to collect electric charges, and a voltage supply unit configured to apply an optimum or, alternatively, desirable voltage to the charge collecting unit.

Abstract translation: 提供能够收集在样品上积累的电荷的扫描型电子显微镜。 扫描电子显微镜包括：柱单元，被配置为产生电子束并用电子束扫描样品，室单元与柱单元组合，并且包括与柱单元的端部间隔开的样品台，以容纳样品 其中，检测单元被配置为检测从样品发射的信号，设置在列单元的端部和样品台之间以收集电荷的电荷收集单元，以及电压供应单元，其被配置为施加最佳或可选的 电压到电荷收集单元。

公开(公告)号：US20190131156A1

公开(公告)日：2019-05-02

申请号：US16102195

申请日：2018-08-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Won-Guk SEO ,  Kui-Hyun YOON ,  Young HEO

IPC: H01L21/677 ,  G01N21/95 ,  H01L21/66 ,  H01L21/67 ,  H01L21/683

Abstract: A substrate transfer apparatus includes at least one levitation plate extending in a first direction, a first suction mover configured to be moved in the first direction along a side of the at least one levitation plate, and including a first suction pad configured to selectively suction a first part of a lower surface of a substrate, and a first rotation driving portion configured to rotate the first suction pad about a first central axis, and a second suction mover disposed to be spaced apart from the first suction mover, and configured to be moved in the first direction along the side of the at least one levitation plate, and including a second suction pad configured to selectively suction a second part of the lower surface of the substrate, and a second rotation driving portion configured to rotate the second suction pad about a second central axis.

公开(公告)号：US20180286739A1

公开(公告)日：2018-10-04

申请号：US15798686

申请日：2017-10-31

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hyun-Jin MIN ,  Jung-Hoon BAEK ,  Won-Guk SEO ,  Sung-Bong KIM ,  Suk-Won LEE

IPC: H01L21/683

CPC classification number: H01L21/6838 ,  B25J15/0061 ,  B25J15/0226 ,  B25J15/0616

Abstract: A pickup apparatus includes a plurality of pickers sliding along a first direction and a space adjuster including a plurality of space adjusting plates. Each picker includes a protruding portion combined with a picker body, and each of the space adjusting plates is between a respective pair of adjacent pickers. The protruding portion of each picker contacts sidewalls of adjacent space adjusting plates. At least one of the space adjusting plates moves along a second direction crossing the first direction. A width in the first direction of each space adjusting plate varies along the second direction.