公开(公告)号：US20190131156A1

公开(公告)日：2019-05-02

申请号：US16102195

申请日：2018-08-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Won-Guk SEO ,  Kui-Hyun YOON ,  Young HEO

IPC: H01L21/677 ,  G01N21/95 ,  H01L21/66 ,  H01L21/67 ,  H01L21/683

Abstract: A substrate transfer apparatus includes at least one levitation plate extending in a first direction, a first suction mover configured to be moved in the first direction along a side of the at least one levitation plate, and including a first suction pad configured to selectively suction a first part of a lower surface of a substrate, and a first rotation driving portion configured to rotate the first suction pad about a first central axis, and a second suction mover disposed to be spaced apart from the first suction mover, and configured to be moved in the first direction along the side of the at least one levitation plate, and including a second suction pad configured to selectively suction a second part of the lower surface of the substrate, and a second rotation driving portion configured to rotate the second suction pad about a second central axis.