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公开(公告)号:US10403499B2
公开(公告)日:2019-09-03
申请号:US15848086
申请日:2017-12-20
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Emil Aslanov , Jekil Ryu , Haesook Lee , Gyoowan Han
IPC: H01L21/02 , H01L21/268 , H01L29/66 , H01L29/786 , B23K26/06 , H01L27/12 , H01S5/00 , H01J29/46 , H01J9/24 , H01S5/40 , B23K26/067 , B23K103/00
Abstract: A laser polycrystallization apparatus including: a light source for emitting a laser beam; a diffraction grating for receiving the laser beam from the light source, changing a path and a magnitude of the received laser beam, and outputting the changed laser beam; a light split portion for splitting the laser beam received from the diffraction grating; and a light superposition portion for superposing the split laser beams received from the light split portion and irradiating the superposed split laser beams to a substrate. An angle between the laser beam irradiated to an incidence surface of the diffraction grating from the light source and a line substantially perpendicular to an emission surface of the diffraction grating is an acute angle.
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公开(公告)号:US12050305B2
公开(公告)日:2024-07-30
申请号:US17361560
申请日:2021-06-29
Applicant: Samsung Display Co., Ltd.
Inventor: Emil Aslanov , Je Kil Ryu , Hae Sook Lee , Kyung Hoon Chung , Gyoo Wan Han
IPC: B23K26/06 , B23K26/082 , G02B13/00 , G02B26/10 , G02B27/10
CPC classification number: G02B13/0005 , B23K26/0643 , B23K26/082 , G02B26/101 , G02B26/105 , G02B27/106
Abstract: A laser processing apparatus includes a laser source which generates a laser beam; a scanner unit disposed in an optical path of the laser beam from the laser source and which adjusts the optical path of the laser beam from the laser source in a first direction or in a second direction different from the first direction; and a reflector unit disposed in an optical path of the laser beam adjusted by the scanner unit and which reflects the laser beam adjusted by the scanner unit, where the reflector unit includes a first sub-reflector unit which shifts an optical path of the laser adjusted by the scanner unit in the first direction, and a second sub-reflector unit which shifts an optical path of the laser beam adjusted by the scanner unit in a third direction opposite to the first direction.
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公开(公告)号:US20180174836A1
公开(公告)日:2018-06-21
申请号:US15848086
申请日:2017-12-20
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Emil Aslanov , Jekil Ryu , Haesook Lee , Gyoowan Han
IPC: H01L21/02 , H01L29/786 , H01L21/268 , H01L29/66 , H01L27/12 , B23K26/06
CPC classification number: H01L21/02675 , B23K26/0608 , B23K26/0648 , B23K26/0676 , B23K2103/56 , H01J9/241 , H01J29/467 , H01L21/02532 , H01L21/02595 , H01L21/02678 , H01L21/268 , H01L27/1277 , H01L27/1285 , H01L29/6675 , H01L29/78672 , H01S5/005 , H01S5/4012
Abstract: A laser polycrystallization apparatus including: a light source for emitting a laser beam; a diffraction grating for receiving the laser beam from the light source, changing a path and a magnitude of the received laser beam, and outputting the changed laser beam; a light split portion for splitting the laser beam received from the diffraction grating; and a light superposition portion for superposing the split laser beams received from the light split portion and irradiating the superposed split laser beams to a substrate. An angle between the laser beam irradiated to an incidence surface of the diffraction grating from the light source and a line substantially perpendicular to an emission surface of the diffraction grating is an acute angle.
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公开(公告)号:US11079571B2
公开(公告)日:2021-08-03
申请号:US15793698
申请日:2017-10-25
Applicant: Samsung Display Co. Ltd.
Inventor: Emil Aslanov , Je Kil Ryu , Hae Sook Lee , Kyung Hoon Chung , Gyoo Wan Han
IPC: G02B13/00 , B23K26/06 , G02B26/10 , B23K26/082 , G02B27/10
Abstract: A laser processing apparatus includes a laser source which generates a laser beam; a scanner unit disposed in an optical path of the laser beam from the laser source and which adjusts the optical path of the laser beam from the laser source in a first direction or in a second direction different from the first direction; and a reflector unit disposed in an optical path of the laser beam adjusted by the scanner unit and which reflects the laser beam adjusted by the scanner unit, where the reflector unit includes a first sub-reflector unit which shifts an optical path of the laser adjusted by the scanner unit in the first direction, and a second sub-reflector unit which shifts an optical path of the laser beam adjusted by the scanner unit in a third direction opposite to the first direction.
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公开(公告)号:US10557756B2
公开(公告)日:2020-02-11
申请号:US16154807
申请日:2018-10-09
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Emil Aslanov , Alexander Voronov , Gyoo Wan Han
IPC: G01J9/02
Abstract: A shearing interferometer includes first and second shearing plates disposed opposite to each other. The first shearing plate includes a first front surface and a first back surface, and splits an input beam input to the first front surface into first and second beams reflected at the first front and back surfaces, respectively. The second shearing plate includes a second front surface and a second back surface. The second shearing plate splits the first beam into third and fourth beams reflected at the second front and back surfaces, respectively, and splits the second beam into fifth and sixth beams reflected at the second front and back surfaces, respectively. Each of the first and second shearing plates has a thickness which limits a phase delay between the fourth beam and the fifth beam to a degree determined to allow interference to occur between the fourth beam and the fifth beam.
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公开(公告)号:US12162793B2
公开(公告)日:2024-12-10
申请号:US17577846
申请日:2022-01-18
Applicant: Samsung Display Co., Ltd.
Inventor: Cheollae Roh , Voronov Alexander , Hyungsik Kim , Emil Aslanov , Sunggyu Park , Joongsung Lee , Woohyun Jung
Abstract: A window manufacturing method includes providing a mother substrate on a moving stage, the mother substrate including a cutting line; irradiating substantially simultaneously a first beam and a second beam to the mother substrate to cut the mother substrate and to form a target substrate; separating the target substrate from the mother substrate; and providing an etchant to the target substrate to chamfer the target substrate. The first beam is irradiated to the cutting line of the mother substrate, the second beam is irradiated to a point spaced apart from the cutting line of the mother substrate by a distance, and a pulse energy of the first beam is different from a pulse energy of the second beam.
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公开(公告)号:US12147020B2
公开(公告)日:2024-11-19
申请号:US17239732
申请日:2021-04-26
Applicant: Samsung Display Co., Ltd.
Inventor: Emil Aslanov , Jongki Kim , Yoongyeong Bae , Gyoowan Han
Abstract: Provided is a laser device including a light source generating a laser beam, a stage, and a lens assembly disposed between the light source and the stage and irradiating the laser beam to a substrate disposed on the stage. The laser device is capable of irradiating a uniform laser beam over an entire processing area to which the laser beam is irradiated. Thus, the laser device may irradiate a uniform laser beam to not only a center area, but also the edge area of the processing area.
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公开(公告)号:US11253952B2
公开(公告)日:2022-02-22
申请号:US16408276
申请日:2019-05-09
Applicant: Samsung Display Co., Ltd.
Inventor: Akifumi Sangu , Alexander Voronov , Hyoung-Joo Kim , Eun Sun Choi , Emil Aslanov , Gyoo Wan Han
IPC: B23K26/064 , G02B27/00 , B23K26/06 , G02B26/10 , B23K26/0622 , B23K26/08 , B23K26/073 , B23K26/082
Abstract: A laser processing apparatus includes a light source configured to generate a laser beam, and a light converging optical system configured to converge laser beam to a focal point at an object to be processed, the light converging optical system including a through-hole optical element and a composite optical element under the through-hole optical element, wherein the through-hole optical element includes a first recess portion configured as a concave mirror at a lower surface of the through-hole optical element, and wherein an upper surface of the composite optical element is convex and includes a first region configured to reflect the laser beam and a second region configured to transmit the laser beam.
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公开(公告)号:US10515832B2
公开(公告)日:2019-12-24
申请号:US15809537
申请日:2017-11-10
Applicant: Samsung Display Co. Ltd.
Inventor: Emil Aslanov , Je Kil Ryu , Hae Sook Lee , Young Geun Cho , Gyoo Wan Han
IPC: H01L21/67 , G02B19/00 , G02B27/12 , B23K26/06 , G02B26/08 , G02B27/09 , H01L27/12 , H01L21/02 , G02B27/00 , G02B3/00 , B23K26/067 , B23K103/00
Abstract: A laser processing apparatus includes a laser beam generating unit which emits a laser beam, a lens unit which divides the laser beam into a plurality of laser beams, and a light condensing unit which condenses the plurality of laser beams. The lens unit includes a first lens array having a first central axis and a second lens array having a second central axis, and wherein at least one of the first lens array and the second lens array reciprocates such that the first central axis and the second central axis are deviated from each other.
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