公开(公告)号：US20180174836A1

公开(公告)日：2018-06-21

申请号：US15848086

申请日：2017-12-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Emil Aslanov ,  Jekil Ryu ,  Haesook Lee ,  Gyoowan Han

IPC: H01L21/02 ,  H01L29/786 ,  H01L21/268 ,  H01L29/66 ,  H01L27/12 ,  B23K26/06

CPC classification number: H01L21/02675 ,  B23K26/0608 ,  B23K26/0648 ,  B23K26/0676 ,  B23K2103/56 ,  H01J9/241 ,  H01J29/467 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/02678 ,  H01L21/268 ,  H01L27/1277 ,  H01L27/1285 ,  H01L29/6675 ,  H01L29/78672 ,  H01S5/005 ,  H01S5/4012

Abstract: A laser polycrystallization apparatus including: a light source for emitting a laser beam; a diffraction grating for receiving the laser beam from the light source, changing a path and a magnitude of the received laser beam, and outputting the changed laser beam; a light split portion for splitting the laser beam received from the diffraction grating; and a light superposition portion for superposing the split laser beams received from the light split portion and irradiating the superposed split laser beams to a substrate. An angle between the laser beam irradiated to an incidence surface of the diffraction grating from the light source and a line substantially perpendicular to an emission surface of the diffraction grating is an acute angle.

公开(公告)号：US10403499B2

公开(公告)日：2019-09-03

申请号：US15848086

申请日：2017-12-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Emil Aslanov ,  Jekil Ryu ,  Haesook Lee ,  Gyoowan Han

IPC: H01L21/02 ,  H01L21/268 ,  H01L29/66 ,  H01L29/786 ,  B23K26/06 ,  H01L27/12 ,  H01S5/00 ,  H01J29/46 ,  H01J9/24 ,  H01S5/40 ,  B23K26/067 ,  B23K103/00

Abstract: A laser polycrystallization apparatus including: a light source for emitting a laser beam; a diffraction grating for receiving the laser beam from the light source, changing a path and a magnitude of the received laser beam, and outputting the changed laser beam; a light split portion for splitting the laser beam received from the diffraction grating; and a light superposition portion for superposing the split laser beams received from the light split portion and irradiating the superposed split laser beams to a substrate. An angle between the laser beam irradiated to an incidence surface of the diffraction grating from the light source and a line substantially perpendicular to an emission surface of the diffraction grating is an acute angle.