Visible sensing transistor, display panel and manufacturing method thereof
    4.
    发明授权
    Visible sensing transistor, display panel and manufacturing method thereof 有权
    可见感测晶体管,显示面板及其制造方法

    公开(公告)号:US08735893B2

    公开(公告)日:2014-05-27

    申请号:US13872605

    申请日:2013-04-29

    Abstract: A display device includes an infrared sensing transistor and a visible sensing transistor. The visible sensing transistor includes a semiconductor on a substrate; an ohmic contact on the semiconductor; an etch stopping layer on the ohmic contact; a source electrode and a drain electrode on the etch stopping layer; a passivation layer on the source electrode and the drain electrode; and a gate electrode on the passivation layer. The etch stopping layer may be composed of the same material as the source electrode and the drain electrode. The infrared sensing transistor is similar to the visible sensing transistor except the etch stopping layer is absent.

    Abstract translation: 显示装置包括红外感测晶体管和可见感测晶体管。 可见感测晶体管包括在衬底上的半导体; 半导体上的欧姆接触; 在欧姆接触上的蚀刻停止层; 蚀刻停止层上的源电极和漏电极; 源电极和漏电极上的钝化层; 和钝化层上的栅电极。 蚀刻停止层可以由与源电极和漏电极相同的材料构成。 除了不存在蚀刻停止层之外,红外感测晶体管类似于可见感测晶体管。

    Visible sensing transistor, display panel and manufacturing method thereof
    5.
    发明授权
    Visible sensing transistor, display panel and manufacturing method thereof 有权
    可见感测晶体管,显示面板及其制造方法

    公开(公告)号:US09128341B2

    公开(公告)日:2015-09-08

    申请号:US14251282

    申请日:2014-04-11

    Abstract: A display device includes an infrared sensing transistor and a visible sensing transistor. The visible sensing transistor includes a semiconductor on a substrate; an ohmic contact on the semiconductor; an etch stopping layer on the ohmic contact; a source electrode and a drain electrode on the etch stopping layer; a passivation layer on the source electrode and the drain electrode; and a gate electrode on the passivation layer. The etch stopping layer may be composed of the same material as the source electrode and the drain electrode. The infrared sensing transistor is similar to the visible sensing transistor except the etch stopping layer is absent.

    Abstract translation: 显示装置包括红外感测晶体管和可见感测晶体管。 可见感测晶体管包括在衬底上的半导体; 半导体上的欧姆接触; 在欧姆接触上的蚀刻停止层; 蚀刻停止层上的源电极和漏电极; 源电极和漏电极上的钝化层; 和钝化层上的栅电极。 蚀刻停止层可以由与源电极和漏电极相同的材料构成。 除了不存在蚀刻停止层之外,红外感测晶体管类似于可见感测晶体管。

    Thin film transistor array substrate for a display panel and a method for manufacturing a thin film transistor array substrate for a display panel
    6.
    发明授权
    Thin film transistor array substrate for a display panel and a method for manufacturing a thin film transistor array substrate for a display panel 有权
    用于显示面板的薄膜晶体管阵列基板和用于制造用于显示面板的薄膜晶体管阵列基板的方法

    公开(公告)号:US08652886B2

    公开(公告)日:2014-02-18

    申请号:US13870053

    申请日:2013-04-25

    CPC classification number: H01L27/1288 H01L27/1214 H01L27/124 H01L27/1248

    Abstract: A method of manufacturing a thin film transistor array substrate includes forming a gate pattern on a substrate, forming a gate insulating film on the substrate, forming a source/drain pattern and a semiconductor pattern on the substrate, forming first, second, and third passivation films successively on the substrate. Over the above multi-layered passivation film forming a first photoresist pattern including a first portion formed on part of the drain electrode and on the pixel region, and a second portion. The second portion is thicker than the first portion. Then, patterning the third passivation film using the first photoresist pattern, forming a second photoresist pattern by removing the first portion of the first photoresist pattern, forming a transparent electrode film on the substrate, removing the second photoresist pattern and the transparent electrode film disposed on the second photoresist pattern, and forming a transparent electrode pattern on the second passivation layer.

    Abstract translation: 制造薄膜晶体管阵列基板的方法包括在基板上形成栅极图案,在基板上形成栅极绝缘膜,在基板上形成源/漏图案和半导体图案,形成第一,第二和第三钝化层 胶片依次在基材上。 在上述多层钝化膜上形成包括形成在漏电极的一部分上和在像素区域上的第一部分的第一光致抗蚀剂图案和第二部分。 第二部分比第一部分厚。 然后,使用第一光致抗蚀剂图案图案化第三钝化膜,通过去除第一光致抗蚀剂图案的第一部分形成第二光致抗蚀剂图案,在基板上形成透明电极膜,去除设置在第一光致抗蚀剂图案上的第二光致抗蚀剂图案和透明电极膜 第二光致抗蚀剂图案,并且在第二钝化层上形成透明电极图案。

    VISIBLE SENSING TRANSISTOR, DISPLAY PANEL AND MANUFACTURING METHOD THEREOF
    8.
    发明申请
    VISIBLE SENSING TRANSISTOR, DISPLAY PANEL AND MANUFACTURING METHOD THEREOF 审中-公开
    可见感应晶体管,显示面板及其制造方法

    公开(公告)号:US20140218644A1

    公开(公告)日:2014-08-07

    申请号:US14251282

    申请日:2014-04-11

    Abstract: A display device includes an infrared sensing transistor and a visible sensing transistor. The visible sensing transistor includes a semiconductor on a substrate; an ohmic contact on the semiconductor; an etch stopping layer on the ohmic contact; a source electrode and a drain electrode on the etch stopping layer; a passivation layer on the source electrode and the drain electrode; and a gate electrode on the passivation layer. The etch stopping layer may be composed of the same material as the source electrode and the drain electrode. The infrared sensing transistor is similar to the visible sensing transistor except the etch stopping layer is absent.

    Abstract translation: 显示装置包括红外感测晶体管和可见感测晶体管。 可见感测晶体管包括在衬底上的半导体; 半导体上的欧姆接触; 在欧姆接触上的蚀刻停止层; 蚀刻停止层上的源电极和漏电极; 源电极和漏电极上的钝化层; 和钝化层上的栅电极。 蚀刻停止层可以由与源电极和漏电极相同的材料构成。 除了不存在蚀刻停止层之外,红外感测晶体管类似于可见感测晶体管。

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