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    METHOD OF FORMING A FINE PATTERN
    1.
    发明申请
    METHOD OF FORMING A FINE PATTERN 有权
    形成精细图案的方法

    公开(公告)号：US20160138169A1

    公开(公告)日：2016-05-19

    申请号：US14718127

    申请日：2015-05-21

    Applicant: Samsung Display Co., Ltd.

    Inventor： Jung-Ha SON ,  Su-Bin Bae ,  Yu-Gwang Jeong ,  Lei Xie ,  Yun-Jong Yeo ,  Joo-Hyung Lee

    IPC: C23F1/02

    CPC classification number: G03F7/0002 ,  C23F1/02 ,  G02F1/133536 ,  G02F2001/133548 ,  G02F2202/36 ,  H01L21/0337 ,  H01L21/32139

    Abstract: A method of forming a fine pattern includes providing a first metal layer on a base substrate, providing a first passivation layer on the first metal layer, providing a mask pattern on the first passivation layer, providing a partitioning wall pattern having a reverse taper shape by etching the first passivation layer, coating a composition having a block copolymer between the partitioning wall patterns adjacent each other, providing a self-aligned pattern by heating the composition, and providing a metal pattern by etching the first metal layer using the self-aligned pattern as a mask.

    Abstract translation: 形成精细图案的方法包括在基底基板上提供第一金属层，在第一金属层上提供第一钝化层，在第一钝化层上提供掩模图案，通过以下步骤提供具有倒锥形的分隔壁图案： 蚀刻第一钝化层，在彼此相邻的分隔壁图案之间涂覆具有嵌段共聚物的组合物，通过加热组合物提供自对准图案，以及通过使用自对准图案蚀刻第一金属层来提供金属图案 作为面具。

    Method of forming a fine pattern
    2.
    发明授权
    Method of forming a fine pattern 有权
    形成精细图案的方法

    公开(公告)号：US09365933B2

    公开(公告)日：2016-06-14

    申请号：US14718127

    申请日：2015-05-21

    Applicant: Samsung Display Co., Ltd.

    Inventor： Jung-Ha Son ,  Su-Bin Bae ,  Yu-Gwang Jeong ,  Lei Xie ,  Yun-Jong Yeo ,  Joo-Hyung Lee

    IPC: C23F1/02 ,  H01L21/033 ,  G03F7/00

    CPC classification number: G03F7/0002 ,  C23F1/02 ,  G02F1/133536 ,  G02F2001/133548 ,  G02F2202/36 ,  H01L21/0337 ,  H01L21/32139

    Abstract: A method of forming a fine pattern includes providing a first metal layer on a base substrate, providing a first passivation layer on the first metal layer, providing a mask pattern on the first passivation layer, providing a partitioning wall pattern having a reverse taper shape by etching the first passivation layer, coating a composition having a block copolymer between the partitioning wall patterns adjacent each other, providing a self-aligned pattern by heating the composition, and providing a metal pattern by etching the first metal layer using the self-aligned pattern as a mask.

    Abstract translation: 形成精细图案的方法包括在基底基板上提供第一金属层，在第一金属层上提供第一钝化层，在第一钝化层上提供掩模图案，通过以下步骤提供具有倒锥形的分隔壁图案： 蚀刻第一钝化层，在彼此相邻的分隔壁图案之间涂覆具有嵌段共聚物的组合物，通过加热组合物提供自对准图案，以及通过使用自对准图案蚀刻第一金属层来提供金属图案 作为面具。

    DISPLAY APPARATUS AND METHOD OF MANUFACTURING THE SAME
    3.
    发明申请
    DISPLAY APPARATUS AND METHOD OF MANUFACTURING THE SAME 有权
    显示装置及其制造方法

    公开(公告)号：US20150070643A1

    公开(公告)日：2015-03-12

    申请号：US14195051

    申请日：2014-03-03

    Applicant: Samsung Display Co., Ltd.

    Inventor： Jae-Neung Kim ,  Yu-Gwang Jeong ,  Sang-Gab Kim ,  Su-Bin Bae ,  Shin-Il Choi

    IPC: H01L27/12 ,  G02F1/1343

    CPC classification number: H01L27/1225 ,  G02F1/134309 ,  G02F1/136213 ,  G02F2201/50 ,  H01L27/1248 ,  H01L27/1255 ,  H01L27/1259

    Abstract: A display apparatus includes: a substrate defining transistor and wiring areas; a thin film transistor in the transistor area and including a gate electrode, an active layer, and source and drain electrodes; an etch prevention layer in the transistor area, absent in the wiring area and covering the active layer, and first and second contact holes defined in the etch prevention layer and through which the active layer is electrically coupled to the source and drain electrodes; a first wiring layer in the wiring area; a first insulating layer which covers the gate electrode and the first wiring layer, and a third contact hole defined in the first insulating layer in the wiring area and exposing the first wiring layer; and a second wiring layer on the first insulating layer and in the wiring area, and electrically coupled to the first wiring layer via the third contact hole.

    Abstract translation: 显示装置包括：限定晶体管和布线区域的基板; 晶体管区域中的薄膜晶体管，并且包括栅电极，有源层以及源极和漏极; 晶体管区域中的防蚀层，在布线区域中不存在并覆盖有源层，以及限定在防蚀层中的第一和第二接触孔，有源层电耦合到源电极和漏电极; 布线区域中的第一布线层; 覆盖所述栅电极和所述第一布线层的第一绝缘层和限定在所述布线区域中的所述第一绝缘层中的第三接触孔，并暴露所述第一布线层; 以及在所述第一绝缘层和所述布线区域中的第二布线层，并且经由所述第三接触孔电耦合到所述第一布线层。

    Display apparatus and method of manufacturing the same
    5.
    发明授权
    Display apparatus and method of manufacturing the same 有权
    显示装置及其制造方法

    公开(公告)号：US09236401B2

    公开(公告)日：2016-01-12

    申请号：US14195051

    申请日：2014-03-03

    Applicant: Samsung Display Co., Ltd.

    Inventor： Jae-Neung Kim ,  Yu-Gwang Jeong ,  Sang-Gab Kim ,  Su-Bin Bae ,  Shin-Il Choi

    IPC: G02F1/1343 ,  G02F1/1362 ,  H01L27/12

    CPC classification number: H01L27/1225 ,  G02F1/134309 ,  G02F1/136213 ,  G02F2201/50 ,  H01L27/1248 ,  H01L27/1255 ,  H01L27/1259

    Abstract: A display apparatus includes: a substrate defining transistor and wiring areas; a thin film transistor in the transistor area and including a gate electrode, an active layer, and source and drain electrodes; an etch prevention layer in the transistor area, absent in the wiring area and covering the active layer, and first and second contact holes defined in the etch prevention layer and through which the active layer is electrically coupled to the source and drain electrodes; a first wiring layer in the wiring area; a first insulating layer which covers the gate electrode and the first wiring layer, and a third contact hole defined in the first insulating layer in the wiring area and exposing the first wiring layer; and a second wiring layer on the first insulating layer and in the wiring area, and electrically coupled to the first wiring layer via the third contact hole.

    Abstract translation: 显示装置包括：限定晶体管和布线区域的基板; 晶体管区域中的薄膜晶体管，并且包括栅电极，有源层以及源极和漏极; 晶体管区域中的防蚀层，在布线区域中不存在并覆盖有源层，以及限定在防蚀层中的第一和第二接触孔，有源层电耦合到源电极和漏电极; 布线区域中的第一布线层; 覆盖所述栅电极和所述第一布线层的第一绝缘层和限定在所述布线区域中的所述第一绝缘层中的第三接触孔，并暴露所述第一布线层; 以及在所述第一绝缘层和所述布线区域中的第二布线层，并且经由所述第三接触孔电耦合到所述第一布线层。

    Display substrate and method of manufacturing the same
    6.
    发明授权
    Display substrate and method of manufacturing the same 有权

    公开(公告)号：US10438974B2

    公开(公告)日：2019-10-08

    申请号：US14606986

    申请日：2015-01-27

    Applicant: Samsung Display Co., LTD.

    Inventor： Yu-Gwang Jeong ,  Shin-Il Choi ,  Su-Bin Bae ,  Sung-Hoon Yang

    IPC: H01L27/12 ,  H01L29/417 ,  H01L29/45 ,  H01L29/66 ,  H01L23/532

    Abstract: According to an exemplary embodiment, a display substrate includes a gate metal pattern comprising a gate electrode, an active pattern disposed on the gate pattern and a source metal pattern disposed on the active pattern. The source metal pattern includes a first lower pattern disposed on the active pattern, a second lower pattern disposed on the first lower pattern, a low-resistance metal pattern disposed on the second lower pattern, and an upper pattern disposed on the low-resistance metal pattern. The first lower pattern, the second lower pattern, and the upper pattern each include a material that is the same.

    Display substrate and method of manufacturing the display substrate
    8.
    发明授权
    Display substrate and method of manufacturing the display substrate 有权
    显示基板和制造显示基板的方法

    公开(公告)号：US09443879B2

    公开(公告)日：2016-09-13

    申请号：US14455113

    申请日：2014-08-08

    Applicant: SAMSUNG DISPLAY CO., LTD.

    Inventor： Yu-Gwang Jeong ,  Shin-Il Choi ,  Su-Bin Bae ,  Dae-Ho Kim ,  Sang-Gab Kim ,  Jae-Neung Kim

    IPC: H01L27/12 ,  H01L21/311 ,  H01L21/768

    CPC classification number: H01L27/124 ,  H01L21/31116 ,  H01L21/76804 ,  H01L21/76832 ,  H01L27/1259

    Abstract: A display substrate includes a base substrate, a common line on the base substrate, a first insulation layer covering the common line and having a first insulating material, a conductive pattern on the first insulation layer and including a source electrode and a drain electrode, a second insulation layer covering the drain electrode and the common line, and including a lower second insulation layer having a second insulating material and an upper second insulation layer having the first insulating material, a first electrode electrically connected to the drain electrode through a first contact hole in the second insulation layer, and a second electrode electrically connected to the common line through a second contact hole in the first and second insulation layers. The upper and lower second insulation layers on the drain electrode have a first hole and a second hole respectively that form the first contact hole.

    Abstract translation: 显示基板包括基底基板，基底基板上的公共线，覆盖公共线的第一绝缘层，并具有第一绝缘材料，第一绝缘层上的导电图案，包括源电极和漏电极， 覆盖漏电极和公共线的第二绝缘层，并且包括具有第二绝缘材料的下第二绝缘层和具有第一绝缘材料的上第二绝缘层，第一电极，通过第一接触孔电连接到漏电极 以及通过第一绝缘层和第二绝缘层中的第二接触孔与公共线电连接的第二电极。 漏电极上的上，下第二绝缘层分别具有形成第一接触孔的第一孔和第二孔。

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