公开(公告)号：US10048418B2

公开(公告)日：2018-08-14

申请号：US14846471

申请日：2015-09-04

Applicant: Samsung Display Co., Ltd.

Inventor： Sung-Won Cho ,  Jung-Ha Son ,  Su-Bin Bae ,  Yun-Jong Yeo ,  Joo-Hyung Lee

IPC: G02B5/30 ,  C09K13/00 ,  C23F4/00 ,  H01L21/311 ,  H01L21/308 ,  H01L21/3105 ,  H01L21/3065 ,  H01L21/306 ,  B81C1/00 ,  G02F1/1335 ,  G03F7/004

Abstract: A method of manufacturing a polarizer includes forming a first layer on a base substrate, forming a first partition wall layer on the first layer, forming a second partition wall layer on the first partition wall, forming a plurality of first partition wall patterns and a plurality of second partition walls disposed on the first partition wall patterns by etching the first partition wall and the second partition wall at the same time, forming a block copolymer layer on the first layer on which the plurality of first partition wall patterns are formed, forming a plurality of fine patterns from the block copolymer layer, and patterning the first layer using the fine patterns and the second partition wall patterns as a mask.