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1.发明授权Method of manufacturing organic light emitting display device using organic layer deposition apparatus 有权使用有机层沉积装置制造有机发光显示装置的方法公开(公告)号：US09040313B2
公开(公告)日：2015-05-26
申请号：US14196469
申请日：2014-03-04
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Jong-Won Hong
IPC: H01L21/66 , H01L51/00 , H01L21/68 , H01L21/67 , H01L21/677
CPC classification number: H01L22/12 , H01L21/67173 , H01L21/67748 , H01L21/6776 , H01L21/68 , H01L21/682 , H01L51/0011 , H01L51/0012 , H01L51/56
Abstract: A method of manufacturing an organic light-emitting display device is provided. An alignment master member is loaded on a moving unit. An organic layer deposition assembly is pre-aligned to the alignment master member. After the pre-aligning of the organic layer deposition assembly, a substrate is loaded on the moving unit. The organic layer deposition assembly is aligned to the substrate positioned as is after the loading of the substrate. An organic layer is formed on the substrate while the moving unit is moving along the moving direction. While the moving unit is moving along the moving direction, the organic layer deposition assembly is adjusted so that an interval between the organic layer deposition assembly and part of the substrate is maintained as substantially constant. The part of the substrate receives a deposition material emitted from the organic layer deposition assembly to form the organic layer.
Abstract translation: 提供一种制造有机发光显示装置的方法。 对准主体装载在移动单元上。 有机层沉积组件与对准主体部件预对准。 在有机层沉积组件的预对准之后，将基板装载在移动单元上。 有机层沉积组件在衬底加载之后与衬底对准。 当移动单元沿着移动方向移动时，在基板上形成有机层。 当移动单元沿着移动方向移动时，调节有机层沉积组件，使得有机层沉积组件和基板的一部分之间的间隔保持基本上恒定。 衬底的一部分接收从有机层沉积组件发射的沉积材料以形成有机层。
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2.发明授权公开(公告)号：US08962360B2
公开(公告)日：2015-02-24
申请号：US14032152
申请日：2013-09-19
Applicant: Samsung Display Co., Ltd.
Inventor： Yun-Ho Chang , Jong-Won Hong , Sang-Su Kim
CPC classification number: H01L51/56 , C23C14/042 , C23C14/12 , C23C14/50 , H01L51/0011
Abstract: An organic layer deposition apparatus includes: a conveyer unit including a transfer unit, a first conveyer unit, and a second conveyer unit; a loading unit for fixing a substrate to the transfer unit; a deposition unit including a chamber and at least one organic layer deposition assembly; and a measuring unit located between the loading unit and the deposition unit to measure position information of the substrate before an organic layer is deposited onto the substrate; and an unloading unit for separating, from the transfer unit, the substrate onto which the deposition has been completed, wherein the transfer unit is configured to cyclically move between the first conveyer unit and the second conveyer unit, and wherein the substrate fixed to the transfer unit is configured to be spaced apart from the at least one organic layer deposition assembly while being transferred by the first conveyer unit.
Abstract translation: 有机层沉积设备包括：输送单元，包括转印单元，第一输送单元和第二输送单元; 用于将基板固定到转印单元的装载单元; 沉积单元，其包括室和至少一个有机层沉积组件; 以及位于所述加载单元和所述沉积单元之间的测量单元，用于在将有机层沉积到所述基板上之前测量所述基板的位置信息; 以及用于从所述转印单元分离已经完成所述沉积的所述基板的卸载单元，其中所述转移单元构造成在所述第一输送单元和所述第二输送单元之间循环移动，并且其中固定到所述转印件的所述基板 单元构造成在被第一输送单元传送的同时与至少一个有机层沉积组件间隔开。
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3.发明申请公开(公告)号：US20140312316A1
公开(公告)日：2014-10-23
申请号：US14012924
申请日：2013-08-28
Applicant: Samsung Display Co., Ltd.
Inventor： Young-Mook Choi , Jong-Won Hong
CPC classification number: C23C14/56 , C23C14/042 , C23C14/50 , H01L21/67259 , H01L21/67309 , H01L21/67709 , H01L51/0001 , H01L51/56
Abstract: A deposition apparatus includes: a transfer unit including a first transfer unit and a second transfer unit, wherein the first transfer unit transfers, in a first direction, a moving unit to which a substrate is detachably fixed, and the second transfer unit transfers, in an opposite direction of the first direction, the moving unit from which the substrate is separated, and a deposition unit including a deposition assembly wherein the deposition assembly deposits a material on the substrate spaced apart from the deposition assembly while the first transfer unit transfers the substrate which is fixed to the moving unit, wherein the first transfer unit includes a first support unit that supports both ends of the moving unit in the first direction, and a second support unit that supports a side of the moving unit opposite to a side close to the deposition assembly.
Abstract translation: 一种沉积装置，包括：转印单元，包括第一转印单元和第二转印单元，其中第一转印单元沿第一方向转移基板可拆卸地固定到其上的移动单元，并且第二转印单元转移到 第一方向相反的方向，从基板分离的移动单元和包括沉积组件的沉积单元，其中沉积组件将材料沉积在与沉积组件间隔开的衬底上，同时第一转移单元转移衬底 其固定到所述移动单元，其中所述第一传送单元包括支撑所述移动单元的所述第一方向的两端的第一支撑单元和支撑所述移动单元的与所述移动单元的靠近的一侧相对的一侧的第二支撑单元 沉积组件。
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公开(公告)号：US20150176131A1
公开(公告)日：2015-06-25
申请号：US14642360
申请日：2015-03-09
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Jong-Won Hong , Seok-Rak Chang , Chang-Mog JO , Young-Mook Choi , Jae-Kwang Ryu
CPC classification number: C23C16/52 , C23C14/042 , C23C14/243 , C23C14/54 , C23C14/568 , C23C16/042 , H01L51/5253 , H01L51/56
Abstract: A thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; a position detection member that detects a relative position of the substrate to the patterning slit sheet; and an alignment control member that controls a relative position of the patterning slit sheet to the substrate by using the relative position of the substrate detected by the position detection member, wherein the thin film deposition apparatus and the substrate are separated from each other, and the thin film deposition apparatus and the substrate are moved relative to each other.
Abstract translation: 薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 位置检测构件，其检测所述基板与所述图案化缝隙片的相对位置; 以及对准控制部件，其通过使用由所述位置检测部件检测出的所述基板的相对位置来控制所述图案化狭缝片材与所述基板的相对位置，其中所述薄膜沉积设备和所述基板彼此分离， 薄膜沉积设备和基板相对于彼此移动。
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5.发明申请公开(公告)号：US20160293472A1
公开(公告)日：2016-10-06
申请号：US15179677
申请日：2016-06-10
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Seok-Rak Chang , Myeng-Woo Nam , Hee-Cheol Kang , Jong-Heon Kim , Jong-Won Hong , Uno Chang
IPC: H01L21/683 , H01L51/56 , H01L21/677 , H01L27/32 , B05B15/04 , C23C14/24 , C23C14/50 , C23C14/04 , B05B13/02 , H01L21/67 , B05D1/00
CPC classification number: C23C14/12 , B05B12/20 , B05B12/22 , B05B13/0221 , B05D1/60 , C23C14/042 , C23C14/24 , C23C14/50 , H01L21/67173 , H01L21/67709 , H01L21/6776 , H01L21/67784 , H01L21/6831 , H01L27/3244 , H01L27/3246 , H01L51/56
Abstract: An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyor unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyor unit passes through inside the chamber, and the first conveyor unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.
Abstract translation: 有机层沉积装置以及使用有机层沉积装置的有机发光显示装置的制造方法。 有机层沉积装置包括：静电卡盘，其固定地支撑作为沉积靶的基板; 包括保持真空的室的沉积单元和用于在由静电卡盘固定地支撑的基板上沉积有机层的有机层沉积组件; 以及第一传送单元，用于将固定地支撑所述基板的所述静电卡盘移动到所述沉积单元中，其中所述第一输送单元穿过所述室内部，并且所述第一输送单元包括导向单元，所述引导单元具有用于支撑所述静电卡盘的接收构件 可沿方向移动
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Patent Agency Ranking
公开(公告)号：US09453282B2
公开(公告)日：2016-09-27
申请号：US14642360
申请日：2015-03-09
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Jong-Won Hong , Seok-Rak Chang , Chang-Mog Jo , Young-Mook Choi , Jae-Kwang Ryu
CPC classification number: C23C16/52 , C23C14/042 , C23C14/243 , C23C14/54 , C23C14/568 , C23C16/042 , H01L51/5253 , H01L51/56
Abstract: A thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; a position detection member that detects a relative position of the substrate to the patterning slit sheet; and an alignment control member that controls a relative position of the patterning slit sheet to the substrate by using the relative position of the substrate detected by the position detection member, wherein the thin film deposition apparatus and the substrate are separated from each other, and the thin film deposition apparatus and the substrate are moved relative to each other.
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7.发明申请METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY DEVICE USING ORGANIC LAYER DEPOSITION APPARATUS 有权使用有机层沉积装置制造有机发光显示装置的方法公开(公告)号：US20140370626A1
公开(公告)日：2014-12-18
申请号：US14196469
申请日：2014-03-04
Applicant: SAMSUNG DISPLAY CO" LTD.
Inventor： Jong-Won Hong
CPC classification number: H01L22/12 , H01L21/67173 , H01L21/67748 , H01L21/6776 , H01L21/68 , H01L21/682 , H01L51/0011 , H01L51/0012 , H01L51/56
Abstract: A method of manufacturing an organic light-emitting display device is provided. An alignment master member is loaded on a moving unit. An organic layer deposition assembly is pre-aligned to the alignment master member. After the pre-aligning of the organic layer deposition assembly, a substrate is loaded on the moving unit. The organic layer deposition assembly is aligned to the substrate positioned as is after the loading of the substrate. An organic layer is formed on the substrate while the moving unit is moving along the moving direction. While the moving unit is moving along the moving direction, the organic layer deposition assembly is adjusted so that an interval between the organic layer deposition assembly and part of the substrate is maintained as substantially constant. The part of the substrate receives a deposition material emitted from the organic layer deposition assembly to form the organic layer.
Abstract translation: 提供一种制造有机发光显示装置的方法。 对准主体装载在移动单元上。 有机层沉积组件与对准主体部件预对准。 在有机层沉积组件的预对准之后，将基板装载在移动单元上。 有机层沉积组件在衬底加载之后与衬底对准。 当移动单元沿着移动方向移动时，在基板上形成有机层。 当移动单元沿着移动方向移动时，调节有机层沉积组件，使得有机层沉积组件和衬底的一部分之间的间隔保持基本上恒定。 衬底的一部分接收从有机层沉积组件发射的沉积材料以形成有机层。
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公开(公告)号：US09777364B2
公开(公告)日：2017-10-03
申请号：US15179677
申请日：2016-06-10
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Seok-Rak Chang , Myeng-Woo Nam , Hee-Cheol Kang , Jong-Heon Kim , Jong-Won Hong , Uno Chang
IPC: B65G35/00 , C23C14/12 , C23C14/50 , H01L21/67 , H01L21/677 , H01L21/683 , B05B13/02 , B05B15/04 , B05D1/00 , C23C14/04 , C23C14/24 , H01L27/32 , H01L51/56
CPC classification number: C23C14/12 , B05B12/20 , B05B12/22 , B05B13/0221 , B05D1/60 , C23C14/042 , C23C14/24 , C23C14/50 , H01L21/67173 , H01L21/67709 , H01L21/6776 , H01L21/67784 , H01L21/6831 , H01L27/3244 , H01L27/3246 , H01L51/56
Abstract: An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyor unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyor unit passes through inside the chamber, and the first conveyor unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.
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9.发明授权公开(公告)号：US09534288B2
公开(公告)日：2017-01-03
申请号：US14012924
申请日：2013-08-28
Applicant: Samsung Display Co., Ltd.
Inventor： Young-Mook Choi , Jong-Won Hong
IPC: C23C14/56 , H01L21/677 , C23C14/04 , C23C14/50 , H01L51/56 , H01L51/00 , H01L21/673 , H01L21/67
CPC classification number: C23C14/56 , C23C14/042 , C23C14/50 , H01L21/67259 , H01L21/67309 , H01L21/67709 , H01L51/0001 , H01L51/56
Abstract: A deposition apparatus includes: a transfer unit including a first transfer unit and a second transfer unit, wherein the first transfer unit transfers, in a first direction, a moving unit to which a substrate is detachably fixed, and the second transfer unit transfers, in an opposite direction of the first direction, the moving unit from which the substrate is separated, and a deposition unit including a deposition assembly wherein the deposition assembly deposits a material on the substrate spaced apart from the deposition assembly while the first transfer unit transfers the substrate which is fixed to the moving unit, wherein the first transfer unit includes a first support unit that supports both ends of the moving unit in the first direction, and a second support unit that supports a side of the moving unit opposite to a side close to the deposition assembly.
Abstract translation: 一种沉积装置，包括：转印单元，包括第一转印单元和第二转印单元，其中第一转印单元沿第一方向转移基板可拆卸地固定到其上的移动单元，并且第二转印单元转移到 第一方向相反的方向，从基板分离的移动单元和包括沉积组件的沉积单元，其中沉积组件将材料沉积在与沉积组件间隔开的衬底上，同时第一转移单元转移衬底 其固定到所述移动单元，其中所述第一传送单元包括支撑所述移动单元的所述第一方向的两端的第一支撑单元和支撑所述移动单元的与所述移动单元的靠近的一侧相对的一侧的第二支撑单元 沉积组件。
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10.发明申请公开(公告)号：US20140370633A1
公开(公告)日：2014-12-18
申请号：US14032152
申请日：2013-09-19
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Yun-Ho Chang , Jong-Won Hong , Sang-Su Kim
IPC: H01L51/56
CPC classification number: H01L51/56 , C23C14/042 , C23C14/12 , C23C14/50 , H01L51/0011
Abstract: An organic layer deposition apparatus includes: a conveyer unit including a transfer unit, a first conveyer unit, and a second conveyer unit; a loading unit for fixing a substrate to the transfer unit; a deposition unit including a chamber and at least one organic layer deposition assembly; and a measuring unit located between the loading unit and the deposition unit to measure position information of the substrate before an organic layer is deposited onto the substrate; and an unloading unit for separating, from the transfer unit, the substrate onto which the deposition has been completed, wherein the transfer unit is configured to cyclically move between the first conveyer unit and the second conveyer unit, and wherein the substrate fixed to the transfer unit is configured to be spaced apart from the at least one organic layer deposition assembly while being transferred by the first conveyer unit.
Abstract translation: 有机层沉积设备包括：输送单元，包括转印单元，第一输送单元和第二输送单元; 用于将基板固定到转印单元的装载单元; 沉积单元，其包括室和至少一个有机层沉积组件; 以及位于所述加载单元和所述沉积单元之间的测量单元，用于在将有机层沉积到所述基板上之前测量所述基板的位置信息; 以及用于从所述转印单元分离已经完成所述沉积的所述基板的卸载单元，其中所述转移单元构造成在所述第一输送单元和所述第二输送单元之间循环移动，并且其中固定到所述转印件的所述基板 单元构造成在被第一输送单元传送的同时与至少一个有机层沉积组件间隔开。
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