公开(公告)号：US10164017B2

公开(公告)日：2018-12-25

申请号：US15887773

申请日：2018-02-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yuichiro Sasaki ,  Bong Soo Kim ,  Tae Gon Kim ,  Yoshiya Moriyama ,  Seung Hyun Song ,  Alexander Schmidt ,  Abraham Yoo ,  Heung Soon Lee ,  Kyung In Choi

IPC: H01L29/10 ,  H01L29/08 ,  H01L29/66 ,  H01L29/78 ,  H01L27/092 ,  H01L21/8238 ,  H01L21/223 ,  H01L21/265

Abstract: A semiconductor device having an impurity region is provided. The semiconductor device includes a fin active region having protruding regions and a recessed region between the protruding regions. Gate structures overlapping the protruding regions are disposed. An epitaxial layer is disposed in the recessed region to have a height greater than a width. An impurity region is disposed in the fin active region, surrounds side walls and a bottom of the recessed region, has the same conductivity type as a conductivity type of the epitaxial layer, and includes a majority impurity that is different from a majority impurity included in at least a portion of the epitaxial layer.

公开(公告)号：US09911809B2

公开(公告)日：2018-03-06

申请号：US15424081

申请日：2017-02-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yuichiro Sasaki ,  Bong Soo Kim ,  Tae Gon Kim ,  Yoshiya Moriyama ,  Seung Hyun Song ,  Alexander Schmidt ,  Abraham Yoo ,  Heung Soon Lee ,  Kyung In Choi

IPC: H01L29/10 ,  H01L29/78 ,  H01L27/092 ,  H01L29/66 ,  H01L29/08 ,  H01L21/8238

CPC classification number: H01L29/1083 ,  H01L21/2236 ,  H01L21/26586 ,  H01L21/823814 ,  H01L21/823821 ,  H01L21/823892 ,  H01L27/0921 ,  H01L27/0924 ,  H01L29/0847 ,  H01L29/66537 ,  H01L29/66545 ,  H01L29/66636 ,  H01L29/66795 ,  H01L29/7851

Abstract: A semiconductor device having an impurity region is provided. The semiconductor device includes a fin active region having protruding regions and a recessed region between the protruding regions. Gate structures overlapping the protruding regions are disposed. An epitaxial layer is disposed in the recessed region to have a height greater than a width. An impurity region is disposed in the fin active region, surrounds side walls and a bottom of the recessed region, has the same conductivity type as a conductivity type of the epitaxial layer, and includes a majority impurity that is different from a majority impurity included in at least a portion of the epitaxial layer.