公开(公告)号：US20160290971A1

公开(公告)日：2016-10-06

申请号：US15184590

申请日：2016-06-16

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N29/24 ,  G01N21/95 ,  G01N21/956 ,  G01N21/88

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

Abstract translation: 扫描样本的方法同时形成多个共线扫描。 通过声光装置（AOD）的扫描形成每个扫描。 共线扫描以预定间隔分开。 通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。 第一多个条带具有与预定间隔相同的跨幅间距。 预定间隔可以是扫描长度或整数倍的扫描长度。 可以在第一多个条带附近形成第二多个条带。 形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。 检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。

公开(公告)号：US09645093B2

公开(公告)日：2017-05-09

申请号：US14930254

申请日：2015-11-02

Applicant: KLA-Tencor Corporation

Inventor： Jamie M. Sullivan ,  Gary Janik ,  Steve Cui ,  Rex Runyon ,  Dieter Wilk ,  Steve Short ,  Mikhail Haurylau ,  Qiang Q. Zhang ,  Grace Hsiu-Ling Chen ,  Robert M. Danen ,  Suwipin Martono ,  Shobhit Verma ,  Wenjian Cai ,  Meier Brender

IPC: G01N21/00 ,  G02B27/58 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8825 ,  G02B27/58

Abstract: An inspection system with selectable apodization includes a selectably configurable apodization device disposed along an optical pathway of an optical system. The apodization device includes one or more apodization elements operatively coupled to one or more actuation stages. The one or more actuation stages are configured to selectably actuate the one or more apodization elements along one or more directions. The inspection system includes a control system communicatively coupled to the one or more actuation stages. The control system is configured to selectably control an actuation state of at the one or more apodization elements so as to apply a selected apodization profile formed with the one or more apodization elements.

公开(公告)号：US20140260640A1

公开(公告)日：2014-09-18

申请号：US13844576

申请日：2013-03-15

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N29/24

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

Abstract translation: 扫描样本的方法同时形成多个共线扫描。 通过声光装置（AOD）的扫描形成每个扫描。 共线扫描以预定间隔分开。 通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。 第一多个条带具有与预定间隔相同的跨幅间距。 可以在第一多个条带附近形成第二多个条带。 形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。 检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。

公开(公告)号：US09395340B2

公开(公告)日：2016-07-19

申请号：US13844576

申请日：2013-03-15

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N21/88 ,  G01N21/95 ,  G01N29/24 ,  G01N21/956

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

Abstract translation: 扫描样本的方法同时形成多个共线扫描。 通过声光装置（AOD）的扫描形成每个扫描。 共线扫描以预定间隔分开。 通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。 第一多个条带具有与预定间隔相同的跨幅间距。 可以在第一多个条带附近形成第二多个条带。 形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。 检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。

公开(公告)号：US20140016125A1

公开(公告)日：2014-01-16

申请号：US13760829

申请日：2013-02-06

Applicant: KLA-Tencor Corporation

Inventor： Jamie M. Sullivan ,  Gary Janik ,  Steve Cui ,  Rex Runyon ,  Dieter Wilk ,  Steve Short ,  Mikhail Haurylau ,  Qiang Q. Zhang ,  Grace Hsiu-Ling Chen ,  Robert M. Danen ,  Suwipin Martono ,  Shobhit Verma ,  Wenjian Cai ,  Meier Brender

IPC: G01N21/88 ,  G02B27/58

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8825 ,  G02B27/58

Abstract: An inspection system with selectable apodization includes an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light emanating from the surface of the sample, the illumination source and the detector being optically coupled via an optical pathway of an optical system, a selectably configurable apodization device disposed along the optical pathway, wherein the apodization device includes one or more apodization elements operatively coupled to one or more actuation stages configured to selectably actuate the one or more apodization elements along one or more directions, and a control system communicatively coupled to the one or more actuation and configured to selectably control apodization of illumination transmitted along the optical pathway by controlling an actuation state of the one or more apodization elements.

Abstract translation: 具有可选择变迹的检查系统包括被配置为照亮样品表面的照明源，被配置为检测从样品表面发出的至少一部分光的检测器，所述照明源和检测器通过光学 光学系统的可选择地配置的变迹装置，其中所述变迹装置包括可操作地耦合到一个或多个致动级的一个或多个变迹元件，所述一个或多个致动级被配置成沿着一个或多个方向可选地致动所述一个或多个变迹元件 以及控制系统，其通信地耦合到所述一个或多个致动并被配置为通过控制所述一个或多个变迹元件的致动状态来选择性地控制沿着所述光学路径传输的照明的变迹。

公开(公告)号：US10060884B2

公开(公告)日：2018-08-28

申请号：US15184590

申请日：2016-06-16

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N21/88 ,  G01N21/95 ,  G01N29/24 ,  G01N21/956

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

公开(公告)号：US20160054232A1

公开(公告)日：2016-02-25

申请号：US14930254

申请日：2015-11-02

Applicant: KLA-Tencor Corporation

Inventor： Jamie M. Sullivan ,  Gary Janik ,  Steve Cui ,  Rex Runyon ,  Dieter Wilk ,  Steve Short ,  Mikhail Haurylau ,  Qiang Q. Zhang ,  Grace Hsiu-Ling Chen ,  Robert M. Danen ,  Suwipin Martono ,  Shobhit Verma ,  Wenjian Cai ,  Meier Brender

IPC: G01N21/88 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8825 ,  G02B27/58

Abstract: An inspection system with selectable apodization includes a selectably configurable apodization device disposed along an optical pathway of an optical system. The apodization device includes one or more apodization elements operatively coupled to one or more actuation stages. The one or more actuation stages are configured to selectably actuate the one or more apodization elements along one or more directions. The inspection system includes a control system communicatively coupled to the one or more actuation stages. The control system is configured to selectably control an actuation state of at the one or more apodization elements so as to apply a selected apodization profile formed with the one or more apodization elements.

Abstract translation: 具有可选择变迹的检查系统包括沿着光学系统的光学路径设置的可选择地配置的变迹装置。 变迹装置包括一个或多个操作性地耦合到一个或多个致动级的变迹元件。 所述一个或多个致动台被配置成沿着一个或多个方向可选地致动所述一个或多个变迹元件。 检查系统包括通信地耦合到一个或多个致动级的控制系统。 控制系统被配置为可选择地控制在一个或多个变迹元件处的致动状态，以便施加与所述一个或多个变迹元件形成的选择的变迹轮廓。

公开(公告)号：US09176069B2

公开(公告)日：2015-11-03

申请号：US13760829

申请日：2013-02-06

Applicant: KLA-Tencor Corporation

Inventor： Jamie M. Sullivan ,  Gary Janik ,  Steve Cui ,  Rex Runyon ,  Dieter Wilk ,  Steve Short ,  Mikhail Haurylau ,  Qiang Q. Zhang ,  Grace Hsiu-Ling Chen ,  Robert M. Danen ,  Suwipin Martono ,  Shobhit Verma ,  Wenjian Cai ,  Meier Brender

IPC: G01N21/00 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G02B27/58

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8825 ,  G02B27/58

Abstract: An inspection system with selectable apodization includes an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light emanating from the surface of the sample, the illumination source and the detector being optically coupled via an optical pathway of an optical system, a selectably configurable apodization device disposed along the optical pathway, wherein the apodization device includes one or more apodization elements operatively coupled to one or more actuation stages configured to selectably actuate the one or more apodization elements along one or more directions, and a control system communicatively coupled to the one or more actuation and configured to selectably control apodization of illumination transmitted along the optical pathway by controlling an actuation state of the one or more apodization elements.

Abstract translation: 具有可选择变迹的检查系统包括被配置为照亮样品表面的照明源，被配置为检测从样品表面发出的至少一部分光的检测器，所述照明源和检测器通过光学 光学系统的可选择地配置的变迹装置，其中所述变迹装置包括可操作地耦合到一个或多个致动级的一个或多个变迹元件，所述一个或多个致动级被配置成沿着一个或多个方向可选地致动所述一个或多个变迹元件 以及控制系统，其通信地耦合到所述一个或多个致动并被配置为通过控制所述一个或多个变迹元件的致动状态来选择性地控制沿着所述光学路径传输的照明的变迹。