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公开(公告)号：US11441893B2
公开(公告)日：2022-09-13
申请号：US16018355
申请日：2018-06-26
Applicant: KLA-Tencor Corporation
Inventor： Prasanna Dighe , Dieter Mueller , Dong Chen , Dengpeng Chen , Steve Zamek , Daniel Kavaldjiev , Alexander Buettner
Abstract: A system for analyzing a sample includes an illumination source with a plurality of transmitting optical fibers optically coupled to the illumination source and a detector with a plurality of receiving optical fibers optically coupled to the detector. The system further includes a plurality of probes coupled to respective ones of the plurality of transmitting optical fibers and respective ones of the plurality of receiving optical fibers. The plurality of probes are configured to illuminate respective portions of a surface of the sample and configured to receive illumination reflected, refracted, or radiated from the respective portions of the surface of the sample. The system may further include one or more switches and/or splitters configured to optically couple respective ones of the plurality of transmitting optical fibers to the illumination source and/or configured to optically couple respective ones of the plurality of receiving optical fibers to the detector.
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Patent Agency Ranking
公开(公告)号：US20190331592A1
公开(公告)日：2019-10-31
申请号：US16018355
申请日：2018-06-26
Applicant: KLA-Tencor Corporation
Inventor： Prasanna Dighe , Dieter Mueller , Dong Chen , Dengpeng Chen , Steve Zamek , Daniel Kavaldjiev , Alexander Buettner
Abstract: A system for analyzing a sample includes an illumination source with a plurality of transmitting optical fibers optically coupled to the illumination source and a detector with a plurality of receiving optical fibers optically coupled to the detector. The system further includes a plurality of probes coupled to respective ones of the plurality of transmitting optical fibers and respective ones of the plurality of receiving optical fibers. The plurality of probes are configured to illuminate respective portions of a surface of the sample and configured to receive illumination reflected, refracted, or radiated from the respective portions of the surface of the sample. The system may further include one or more switches and/or splitters configured to optically couple respective ones of the plurality of transmitting optical fibers to the illumination source and/or configured to optically couple respective ones of the plurality of receiving optical fibers to the detector.
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公开(公告)号：US10236222B2
公开(公告)日：2019-03-19
申请号：US15622629
申请日：2017-06-14
Applicant: KLA-Tencor Corporation
Inventor： Dengpeng Chen , Andrew Zeng
Abstract: The system includes a dual interferometer sub-system configured to measure flatness across a substrate. The system includes a mass sensor configured to measure the mass of the substrate. The system includes a controller communicatively coupled to the dual interferometer sub-system and the mass sensor. The controller includes one or more processors. The one or more processors are configured to execute a set of program instructions stored in memory, the set of program instructions configured to cause the one or more processors to determine a thickness distribution of at least one of the substrate or a film deposited on the substrate as a function of position across the substrate based on one or more flatness measurements from the dual interferometer sub-system and one or more mass measurements from the mass sensor.
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公开(公告)号：US20160146590A1
公开(公告)日：2016-05-26
申请号：US14945847
申请日：2015-11-19
Applicant: KLA-Tencor Corporation
Inventor： Dengpeng Chen , Yi Zhang , Jie-Fei Zheng
IPC: G01B9/02
CPC classification number: G01B9/02027 , G01B9/02007
Abstract: The system includes a dual interferometer sub-system including a first and second channel. The system includes an illumination source. The illumination source includes a first laser source disposed along a first input path and a second laser source disposed along a second input path. The illumination sources includes a combiner-splitter element optically coupled to an output of the first laser source and an output of the second laser source and is configured to combine light of a first wavelength from the first laser source and light of a second wavelength from the second laser source. The combiner-splitter element is further configured to split the combined light into a first channel and a second channel of the dual interferometer sub-system, where the first and second each receive a portion of the light of the first wavelength and the light of the second wavelength.
Abstract translation: 该系统包括包括第一和第二通道的双干涉仪子系统。 该系统包括照明源。 照明源包括沿着第一输入路径设置的第一激光源和沿着第二输入路径设置的第二激光源。 照明源包括光耦合到第一激光源的输出和第二激光源的输出的组合器分离器元件，并且被配置为将来自第一激光源的第一波长的光和来自第一激光源的第二波长的光组合 第二激光源。 组合分离器元件还被配置为将组合的光分成双干涉仪子系统的第一通道和第二通道，其中第一和第二通道接收第一波长的光的一部分和 第二波长。
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公开(公告)号：US20180226304A1
公开(公告)日：2018-08-09
申请号：US15622629
申请日：2017-06-14
Applicant: KLA-Tencor Corporation
Inventor： Dengpeng Chen , Andrew Zeng
CPC classification number: H01L22/12 , G01B9/02007 , G01B9/02021 , G01B11/06 , G01B11/306 , G01B21/08 , G01B2290/70 , H01L21/67253
Abstract: The system includes a dual interferometer sub-system configured to measure flatness across a substrate. The system includes a mass sensor configured to measure the mass of the substrate. The system includes a controller communicatively coupled to the dual interferometer sub-system and the mass sensor. The controller includes one or more processors. The one or more processor are configured to execute a set of program instructions stored in memory, the set of program instructions configured to cause the one or more processors to determine a thickness distribution of at least one of the substrate or a film deposited on the substrate as a function of position across the substrate based on one or more flatness measurements from the dual interferometer sub-system and one or more mass measurements from the mass sensor.
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公开(公告)号：US09651359B2
公开(公告)日：2017-05-16
申请号：US14945847
申请日：2015-11-19
Applicant: KLA-Tencor Corporation
Inventor： Dengpeng Chen , Yi Zhang , Jie-Fei Zheng
IPC: G01B9/02
CPC classification number: G01B9/02027 , G01B9/02007
Abstract: The system includes a dual interferometer sub-system including a first and second channel. The system includes an illumination source. The illumination source includes a first laser source disposed along a first input path and a second laser source disposed along a second input path. The illumination sources includes a combiner-splitter element optically coupled to an output of the first laser source and an output of the second laser source and is configured to combine light of a first wavelength from the first laser source and light of a second wavelength from the second laser source. The combiner-splitter element is further configured to split the combined light into a first channel and a second channel of the dual interferometer sub-system, where the first and second each receive a portion of the light of the first wavelength and the light of the second wavelength.
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