Invention Grant
- Patent Title: Dual wavelength dual interferometer with combiner-splitter
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Application No.: US14945847Application Date: 2015-11-19
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Publication No.: US09651359B2Publication Date: 2017-05-16
- Inventor: Dengpeng Chen , Yi Zhang , Jie-Fei Zheng
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
The system includes a dual interferometer sub-system including a first and second channel. The system includes an illumination source. The illumination source includes a first laser source disposed along a first input path and a second laser source disposed along a second input path. The illumination sources includes a combiner-splitter element optically coupled to an output of the first laser source and an output of the second laser source and is configured to combine light of a first wavelength from the first laser source and light of a second wavelength from the second laser source. The combiner-splitter element is further configured to split the combined light into a first channel and a second channel of the dual interferometer sub-system, where the first and second each receive a portion of the light of the first wavelength and the light of the second wavelength.
Public/Granted literature
- US20160146590A1 Dual Wavelength Dual Interferometer with Combiner-Splitter Public/Granted day:2016-05-26
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