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公开(公告)号：US20150205210A1
公开(公告)日：2015-07-23
申请号：US14413667
申请日：2013-05-15
Applicant: ASML NETHERLANDS B.V.
CPC classification number: G03F7/70833 , F16C32/0459 , G03F7/70058 , G03F7/704 , G03F7/70816
Abstract: A support for a movable element includes a stator element, a gravity compensator field inducing element mounted on the stator element, the gravity compensator field inducing element configured to apply a translational force to the movable element by controlling a magnetic field in a gap between the stator element and the movable element, and a plurality of torque compensator field inducing elements mounted on the stator element, the torque compensator field inducing elements configured to apply a torque to the movable element by controlling a magnetic field in the gap between the stator element and the movable element, the torque being about a first axis substantially perpendicular to the direction of the translational force applied by the gravity compensator field inducing element.
Abstract translation: 可移动元件的支撑件包括定子元件，安装在定子元件上的重力补偿器场感应元件，重力补偿器场引发元件被配置为通过控制定子之间的间隙中的磁场向可移动元件施加平移力 元件和可移动元件以及安装在定子元件上的多个扭矩补偿器场诱导元件，扭矩补偿器场诱导元件被配置为通过控制定子元件和定子元件之间的间隙中的磁场向可移动元件施加扭矩 所述扭矩大约是基本上垂直于由重力补偿器场诱导元件施加的平移力的方向的第一轴线。
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公开(公告)号：US09535340B2
公开(公告)日：2017-01-03
申请号：US14413667
申请日：2013-05-15
Applicant: ASML Netherlands B.V.
CPC classification number: G03F7/70833 , F16C32/0459 , G03F7/70058 , G03F7/704 , G03F7/70816
Abstract: A support for a movable element includes a stator element, a gravity compensator field inducing element mounted on the stator element, the gravity compensator field inducing element configured to apply a translational force to the movable element by controlling a magnetic field in a gap between the stator element and the movable element, and a plurality of torque compensator field inducing elements mounted on the stator element, the torque compensator field inducing elements configured to apply a torque to the movable element by controlling a magnetic field in the gap between the stator element and the movable element, the torque being about a first axis substantially perpendicular to the direction of the translational force applied by the gravity compensator field inducing element.
Abstract translation: 可移动元件的支撑件包括定子元件，安装在定子元件上的重力补偿器场感应元件，重力补偿器场引发元件被配置为通过控制定子之间的间隙中的磁场向可移动元件施加平移力 元件和可移动元件以及安装在定子元件上的多个扭矩补偿器场诱导元件，扭矩补偿器场诱导元件被配置为通过控制定子元件和定子元件之间的间隙中的磁场向可移动元件施加扭矩 所述扭矩大约是基本上垂直于由重力补偿器场诱导元件施加的平移力的方向的第一轴线。
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公开(公告)号：US20140340666A1
公开(公告)日：2014-11-20
申请号：US14357530
申请日：2012-12-05
Applicant: ASML NETHERLANDS B.V.
Inventor： Hans Butler , Arno Jan Bleeker , Pieter Renaat Marie Hennus , Martinus Hendricus Henricus Hoeks , Sven Antoin Johan Hol , Harmen Klaas Van Der Schoot , Bernardus Antonius Slaghekke , Patricius Aloysius Jacobus Tinnemans , Marc Wilhelmus Maria Van Der Wijst , Koen Jacobus Johannes Maria Zaal , Theodorus Petrus Maria Cadee , Ruud Antonius Catharina Maria Beerens , Olof Martinus Josephus Fischer , Wilhelmus Henricus Theodorus Maria Aangenent , Niels Johannes Maria Bosch
IPC: G03F7/20
CPC classification number: G03F7/70258 , G03F7/70275 , G03F7/70366 , G03F7/70391 , G03F7/704 , G03F7/70558 , G03F7/70816 , G03F7/709
Abstract: An exposure apparatus including a projection system configured to project a plurality of radiation beams onto a target; a movable frame that is at least rotatable around an axis; and an actuator system configured to displace the movable frame to an axis away from an axis corresponding to the geometric center of the movable frame and to cause the frame to rotate around an axis through the center of mass of the frame.
Abstract translation: 一种曝光装置，包括被配置为将多个辐射束投影到目标上的投影系统; 至少可绕轴旋转的可移动框架; 以及致动器系统，其构造成将可移动框架移动到远离与可移动框架的几何中心对应的轴线的轴线上，并使框架围绕通过框架的质心的轴线旋转。
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公开(公告)号：US11029612B2
公开(公告)日：2021-06-08
申请号：US16494200
申请日：2018-02-15
Applicant: ASML NETHERLANDS B.V.
Inventor： Maarten Hartger Kimman , Hans Butler , Olof Martinus Josephus Fischer , Christiaan Alexander Hoogendam , Theodorus Mattheus Joannus Maria Huizinga , Johannes Marinus Maria Rovers , Eric Pierre-Yves Vennat , Maurice Willem Jozef Etienne Wijckmans
Abstract: The invention relates to a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, comprising a magnetic gravity compensator. The magnetic gravity compensator comprises: a first permanent magnet assembly mounted to one of the first part and the second part and comprising at least a first column of permanent magnets, the first column extending in the vertical direction, wherein the permanent magnets have a polarization direction in a first horizontal direction or in a second horizontal direction opposite to the first horizontal direction, wherein vertically adjacent permanent magnets have opposite polarization directions, a second permanent magnet assembly mounted to the other of the first part and the second part and comprising at least one other column of permanent magnets, the at least one other column extending in the vertical direction, wherein vertically adjacent permanent magnets of the at least one other column have opposite polarization directions in the first horizontal direction or the second horizontal direction, wherein the first permanent magnet assembly at least partially encloses the second permanent magnet assembly.
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公开(公告)号：US20150212430A1
公开(公告)日：2015-07-30
申请号：US14415518
申请日：2013-06-18
Applicant: ASML NETHERLANDS B.V.
Inventor： Fidelus Adrianus Boon , Olof Martinus Josephus Fischer
CPC classification number: G03F7/70716 , G03F7/70758 , G03F7/70816 , H01F7/0252
Abstract: A magnetic device, comprising a first part, a second part, a first magnetic part coupled to the first part and having a first magnetic polarization, a second magnetic part coupled to the second part and having a second magnetic polarization and an additional magnetic part coupled to the first part and having an additional magnetic polarization, wherein the first magnetic part and the second magnetic part are configured to magnetically interact with each other, wherein the first magnetic part exerts a first force on the second magnetic part, the second magnetic part exerts a second force on the first magnetic part and the first force and the second force have opposite directions that are parallel to a reference direction, the first magnetic polarization is substantially parallel to the reference direction, the second magnetic polarization is substantially perpendicular to the reference direction, the additional magnetic polarization makes an angle with the first magnetic polarization and the angle has a magnitude in a range of about 90° to about 270°.
Abstract translation: 一种磁性装置，包括第一部分，第二部分，耦合到第一部分并具有第一磁极化的第一磁性部分，耦合到第二部分的第二磁性部分，并且具有第二磁极化和附加磁性部分耦合 到第一部分并且具有额外的磁极化，其中第一磁性部分和第二磁性部分被配置为彼此磁性相互作用，其中第一磁性部分在第二磁性部分上施加第一力，第二磁性部分施加 第一磁性部分上的第二力和第一力和第二力具有平行于参考方向的相反方向，第一磁极化基本上平行于参考方向，第二磁极化基本上垂直于参考方向 ，附加的磁极化与第一磁极化a成一个角度 该角度的大小在约90°至约270°的范围内。
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Patent Agency Ranking
公开(公告)号：US11262663B2
公开(公告)日：2022-03-01
申请号：US17050240
申请日：2019-03-21
Applicant: ASML Netherlands B.V.
Inventor： Peter Michel Silvester Maria Heijmans , Olof Martinus Josephus Fischer , Maarten Hartger Kimman , Edwin Van Horne , Antonie Hendrik Verweij
Abstract: The present invention provides a tubular linear actuator, comprising: a tubular coil assembly comprising multiple tubular coils arranged next to each other in longitudinal direction of the tubular linear actuator and concentric with respect to a longitudinal axis of the tubular linear actuator, and a magnet assembly comprising a series of permanent magnets with alternating polarization direction extending in the longitudinal direction, wherein the magnet assembly is at least partially arranged in the coil assembly and movably with respect to the coil assembly, wherein the tubular coils comprise edge windings.
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公开(公告)号：US10955759B2
公开(公告)日：2021-03-23
申请号：US16308223
申请日：2017-05-05
Applicant: ASML Netherlands B.V.
IPC: H02K41/03 , G03F7/20 , H02K41/035
Abstract: An electromagnetic actuator is described the actuator comprising: a magnet assembly comprising: an array of permanent magnets arranged in a first direction and configured to generate, outside the magnet assembly, a spatially varying magnetic field distribution in the first direction; a ferromagnetic member onto which the array of permanent magnets is mounted; a coil assembly, at least partly arranged in the spatially varying magnetic field distribution, configured to co-operate with the magnet assembly to generate an electromagnetic force; wherein a thickness of the array of permanent magnets in a second direction perpendicular to the first direction varies along the first direction and wherein a thickness of the ferromagnetic member in the second direction varies along the first direction such that a combined thickness of the array of permanent magnets and the ferromagnetic member in the second direction is substantially constant along the first direction.
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公开(公告)号：US10437160B2
公开(公告)日：2019-10-08
申请号：US15749226
申请日：2016-07-28
Applicant: ASML NETHERLANDS B.V.
Inventor： Olof Martinus Josephus Fischer , Fidelus Adrianus Boon
Abstract: A Lorentz actuator includes: a magnet arrangement; a coil arrangement; and a current controller for supplying a current to the coil arrangement; wherein the magnet and coil arrangement are moveable relative to each other in a main direction, wherein the coil arrangement has a first and second coil portion that are separately operable by the current controller, such that when the same current is supplied to the first coil portion as is supplied to the second coil portion, Lorentz forces generated in the main direction by the first and second coil portions are also the same, and wherein the current controller is configured to supply a current to the first and second coil portions with a phase difference in order to compensate for parasitic reluctance and/or Lorentz forces in an auxiliary direction perpendicular to the main direction.
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公开(公告)号：US20190258181A1
公开(公告)日：2019-08-22
申请号：US16308223
申请日：2017-05-05
Applicant: ASML Netherlands B.V.
IPC: G03F7/20 , H02K41/035
Abstract: An electromagnetic actuator is described the actuator comprising: a magnet assembly comprising: an array of permanent magnets arranged in a first direction and configured to generate, outside the magnet assembly, a spatially varying magnetic field distribution in the first direction; a ferromagnetic member onto which the array of permanent magnets is mounted; a coil assembly, at least partly arranged in the spatially varying magnetic field distribution, configured to co-operate with the magnet assembly to generate an electromagnetic force; wherein a thickness of the array of permanent magnets in a second direction perpendicular to the first direction varies along the first direction and wherein a thickness of the ferromagnetic member in the second direction varies along the first direction such that a combined thickness of the array of permanent magnets and the ferromagnetic member in the second direction is substantially constant along the first direction.
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公开(公告)号：US09519230B2
公开(公告)日：2016-12-13
申请号：US14415518
申请日：2013-06-18
Applicant: ASML Netherlands B.V.
Inventor： Fidelus Adrianus Boon , Olof Martinus Josephus Fischer
CPC classification number: G03F7/70716 , G03F7/70758 , G03F7/70816 , H01F7/0252
Abstract: A magnetic device includes first and second parts, a first magnetic part, with a first magnetic polarization, coupled to the first part, a second magnetic part, with a second magnetic polarization, coupled to the second part and an additional magnetic part coupled to the first part and having an additional magnetic polarization. The first and second magnetic parts magnetically interact with each other. The first magnetic part exerts a first force on the second magnetic part, the second magnetic part exerts a second force on the first magnetic part and the first and second forces have opposite directions that are parallel to a reference direction. The first magnetic polarization is substantially parallel to the reference direction, the second magnetic polarization is substantially perpendicular to the reference direction, the additional magnetic polarization makes an angle with the first magnetic polarization and has a magnitude in a range of about 90°-270°.
Abstract translation: 磁性装置包括第一和第二部分，具有耦合到第一部分的具有第一磁极化的第一磁性部分，具有耦合到第二部分的第二磁极化的第二磁性部分和耦合到第二部分的附加磁性部分 第一部分并具有额外的磁极化。 第一和第二磁性部件彼此磁性地相互作用。 第一磁性部件在第二磁性部件上施加第一力，第二磁性部件在第一磁性部件上施加第二力，并且第一和第二力具有与参考方向平行的相反方向。 第一磁极化基本上平行于参考方向，第二磁极化基本上垂直于参考方向，附加磁极化与第一磁极化成一个角度，并且具有大约在90°-270° 。
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