公开(公告)号：US10816910B2

公开(公告)日：2020-10-27

申请号：US16079169

申请日：2017-02-03

Applicant: ASML Netherlands B.V.

Inventor： Hans Butler ,  Cornelius Adrianus Lambertus De Hoon ,  Fransiscus Mathijs Jacobs ,  Pavel Kagan ,  Jeroen Pieter Starreveld ,  Maurice Willem Jozef Etienne Wijckmans

IPC: G03F7/20 ,  F16F9/02 ,  F16F15/023 ,  F16F13/00 ,  F16F15/027

Abstract: The invention relates to a vibration isolator, comprising: a base; a coupling element to be coupled to a vibration sensitive object; a decoupling mass; a first vibration isolator part arranged between the base and the decoupling mass; and a second vibration isolator part arranged between the decoupling mass and the coupling element, and wherein at least one of the first and second vibration isolator part comprises a pneumatic isolator.

公开(公告)号：US11029612B2

公开(公告)日：2021-06-08

申请号：US16494200

申请日：2018-02-15

Applicant: ASML NETHERLANDS B.V.

Inventor： Maarten Hartger Kimman ,  Hans Butler ,  Olof Martinus Josephus Fischer ,  Christiaan Alexander Hoogendam ,  Theodorus Mattheus Joannus Maria Huizinga ,  Johannes Marinus Maria Rovers ,  Eric Pierre-Yves Vennat ,  Maurice Willem Jozef Etienne Wijckmans

IPC: G03F7/20 ,  F16C39/06

Abstract: The invention relates to a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, comprising a magnetic gravity compensator. The magnetic gravity compensator comprises: a first permanent magnet assembly mounted to one of the first part and the second part and comprising at least a first column of permanent magnets, the first column extending in the vertical direction, wherein the permanent magnets have a polarization direction in a first horizontal direction or in a second horizontal direction opposite to the first horizontal direction, wherein vertically adjacent permanent magnets have opposite polarization directions, a second permanent magnet assembly mounted to the other of the first part and the second part and comprising at least one other column of permanent magnets, the at least one other column extending in the vertical direction, wherein vertically adjacent permanent magnets of the at least one other column have opposite polarization directions in the first horizontal direction or the second horizontal direction, wherein the first permanent magnet assembly at least partially encloses the second permanent magnet assembly.

公开(公告)号：US20190049852A1

公开(公告)日：2019-02-14

申请号：US16079169

申请日：2017-02-03

Applicant: ASML Netherlands B.V.

Inventor： Hans Butler ,  Cornelius Adrianus Lambertus De Hoon ,  Fransiscus Mathijs Jacobs ,  Pavel Kagan ,  Jeroen Pieter Starreveld ,  Maurice Willem Jozef Etienne Wijckmans

IPC: G03F7/20 ,  F16F13/00 ,  F16F9/02 ,  F16F15/023

Abstract: The invention relates to a vibration isolator, comprising: a base; a coupling element to be coupled to a vibration sensitive object; a decoupling mass; a first vibration isolator pan arranged between the base and the decoupling mass; and a second vibration isolator part arranged between the decoupling mass and the coupling element, and wherein at least one of the first and second vibration isolator part comprises a pneumatic isolator.