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公开(公告)号：US11262663B2
公开(公告)日：2022-03-01
申请号：US17050240
申请日：2019-03-21
发明人： Peter Michel Silvester Maria Heijmans , Olof Martinus Josephus Fischer , Maarten Hartger Kimman , Edwin Van Horne , Antonie Hendrik Verweij
摘要： The present invention provides a tubular linear actuator, comprising: a tubular coil assembly comprising multiple tubular coils arranged next to each other in longitudinal direction of the tubular linear actuator and concentric with respect to a longitudinal axis of the tubular linear actuator, and a magnet assembly comprising a series of permanent magnets with alternating polarization direction extending in the longitudinal direction, wherein the magnet assembly is at least partially arranged in the coil assembly and movably with respect to the coil assembly, wherein the tubular coils comprise edge windings.
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公开(公告)号：US11621142B2
公开(公告)日：2023-04-04
申请号：US16992058
申请日：2020-08-12
发明人： Marcel Koenraad Marie Baggen , Peter Paul Hempenius , Maarten Frans Janus Kremers , Robertus Jacobus Theodorus Van Kempen , Sven Antoin Johan Hol , Henricus Martinus Johannes Van De Groes , Johannes Hubertus Antonius Van De Rijdt , Niels Johannes Maria Bosch , Maarten Hartger Kimman
摘要： An electron beam apparatus is provided. The apparatus comprises an e-beam source configured to generate an electron beam, a first part configured to support a substrate, the first part comprising an object table for supporting the substrate, the first part further comprising a short stroke actuator system for actuating the object table relative to the e-beam source, the short stroke actuator system comprising a short stroke forcer. The apparatus further comprises a second part configured to movably support the first part and a long stroke actuator system configured to actuate movement of the first part with respect to the second part, the long stroke actuator system comprising a long stroke forcer, wherein the short stroke forcer and/or the long stroke forcer is configured to be switched off while the electron beam is projected onto the substrate.
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公开(公告)号：US11029612B2
公开(公告)日：2021-06-08
申请号：US16494200
申请日：2018-02-15
发明人： Maarten Hartger Kimman , Hans Butler , Olof Martinus Josephus Fischer , Christiaan Alexander Hoogendam , Theodorus Mattheus Joannus Maria Huizinga , Johannes Marinus Maria Rovers , Eric Pierre-Yves Vennat , Maurice Willem Jozef Etienne Wijckmans
摘要： The invention relates to a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, comprising a magnetic gravity compensator. The magnetic gravity compensator comprises: a first permanent magnet assembly mounted to one of the first part and the second part and comprising at least a first column of permanent magnets, the first column extending in the vertical direction, wherein the permanent magnets have a polarization direction in a first horizontal direction or in a second horizontal direction opposite to the first horizontal direction, wherein vertically adjacent permanent magnets have opposite polarization directions, a second permanent magnet assembly mounted to the other of the first part and the second part and comprising at least one other column of permanent magnets, the at least one other column extending in the vertical direction, wherein vertically adjacent permanent magnets of the at least one other column have opposite polarization directions in the first horizontal direction or the second horizontal direction, wherein the first permanent magnet assembly at least partially encloses the second permanent magnet assembly.
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公开(公告)号：US11156925B2
公开(公告)日：2021-10-26
申请号：US16976326
申请日：2019-02-14
IPC分类号： G03F7/20 , H02K41/035 , H02K11/21
摘要： A positioning system to position a structure comprises an actuator and a control unit to control the actuator in response to a position setpoint received by the control unit. The actuator comprises a magnet assembly comprises a magnet configured to provide a magnetic flux, and a coil assembly, wherein the coil assembly and the magnet assembly are movable relative to each other, the coil assembly comprising a coil, an actuation of the coil by a drive current providing for a force between the magnet assembly and the coil assembly. The magnet assembly comprises a further electric conductor, the further electric conductor comprising a non-ferromagnetic electrically conductive material, wherein the further electric conductor is magnetically coupled to the coil of the coil assembly and forms a short circuit path for an inductive electrical current induced in the further electric conductor as a result of an actuator current in the coil.
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公开(公告)号：US11837931B2
公开(公告)日：2023-12-05
申请号：US17690203
申请日：2022-03-09
发明人： Maarten Hartger Kimman , Dave Braaksma , Peter Michel Silvester Maria Heijmans , Christiaan Alexander Hoogendam
CPC分类号： H02K3/28 , G03F7/70758 , H02K41/031 , H02K7/09 , H02K29/03 , H02K2201/18 , H02K2213/03
摘要： An electromagnetic motor is described, the electromagnetic motor comprising: a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction; a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.
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公开(公告)号：US20220200385A1
公开(公告)日：2022-06-23
申请号：US17690203
申请日：2022-03-09
发明人： Maarten Hartger Kimman , Dave Braaksma , Peter Michel Silvester Maria Heijmans , Christiaan Alexander Hoogendam
摘要： An electromagnetic motor is described, the electromagnetic motor comprising: a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction; a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.
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公开(公告)号：US11303175B2
公开(公告)日：2022-04-12
申请号：US16073258
申请日：2017-01-05
发明人： Maarten Hartger Kimman , Dave Braaksma , Peter Michel Silvester Maria Heijmans , Christiaan Alexander Hoogendam
摘要： An electromagnetic motor is described, the electromagnetic motor comprising:
a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction;
a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.-
8.发明申请公开(公告)号：US20190036405A1
公开(公告)日：2019-01-31
申请号：US16073258
申请日：2017-01-05
发明人： Maarten Hartger Kimman , Dave Braaksma , Peter Michel Silvester Maria Heijmans , Christiaan Alexander Hoogendam
摘要： An electromagnetic motor is described, the electromagnetic motor comprising: a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction; a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.
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