公开(公告)号：US06818961B1

公开(公告)日：2004-11-16

申请号：US10611789

申请日：2003-06-30

申请人： Nicholas D. Rizzo ,  Bradley N. Engel ,  Jason A. Janesky ,  Jon M. Slaughter ,  Jijun Sun

发明人： Nicholas D. Rizzo ,  Bradley N. Engel ,  Jason A. Janesky ,  Jon M. Slaughter ,  Jijun Sun

IPC分类号： H01L2982

CPC分类号： H01F10/3254 ,  B82Y25/00 ,  B82Y40/00 ,  G11C11/16 ,  H01F10/3272 ,  H01F41/18 ,  H01F41/303 ,  H01L43/12

摘要： A method of fabricating a magnetoresistive tunneling junction cell comprising the steps of providing a substrate with a surface, depositing a first magnetic region (17) having a resultant magnetic moment vector onto the substrate, depositing an electrically insulating material (16) onto the first magnetic region, and depositing a second magnetic region (15) onto the electrically insulating material, wherein at least a portion of one of the first and second magnetic regions is formed by depositing said region at a nonzero deposition angle relative to a direction perpendicular to the surface of the substrate to create an induced anisotropy.

摘要翻译： 一种制造磁阻隧道结电池的方法，包括以下步骤：向衬底提供表面;将具有合成磁矩矢量的第一磁区（17）沉积到衬底上，将电绝缘材料（16）沉积到第一磁 并且将第二磁性区域（15）沉积到所述电绝缘材料上，其中所述第一和第二磁性区域中的一个的至少一部分相对于垂直于所述表面的方向以非零沉积角沉积所述区域而形成 的基底以产生诱导各向异性。

公开(公告)号：US06815785B2

公开(公告)日：2004-11-09

申请号：US10625705

申请日：2003-07-24

申请人： Tsukasa Ooishi

发明人： Tsukasa Ooishi

IPC分类号： H01L2982

CPC分类号： H01L27/228 ,  B82Y10/00 ,  G11C11/15 ,  H01L43/08 ,  H01L43/12

摘要： A thin film magnetic memory device includes: a TMR element, provided on a main surface of a silicon substrate, operating as a memory element; a buffer layer having a first surface bringing into contact with the TMR element and a second surface, located on the side opposite to the first surface, having an area smaller than that of the first surface; and a bit line, formed of a conductor film and a barrier metal film that bring into contact with the second surface, extending in one direction so as to intersect the TMR element. Thereby, it is possible to provide a thin film magnetic memory device realizing miniaturization of the memory cell and, also, having a high reliability, and a manufacturing method therefor.

公开(公告)号：US06815782B2

公开(公告)日：2004-11-09

申请号：US10444463

申请日：2003-05-22

申请人： Eric Stadler ,  Julien Charton

发明人： Eric Stadler ,  Julien Charton

IPC分类号： H01L2982

CPC分类号： B81B3/0021 ,  B81B2203/0109 ,  B81B2203/0163 ,  B81B2203/053 ,  G02B26/0841 ,  H01H59/0009

摘要： The invention relates to a miniature electrostatic actuation device (100) capable of generating movements along a determined direction (F), comprising pairs of electrodes (4) of which the mobile electrodes (8) may be pulled into contact with a fixed electrode (6) on a variable pull-in surface that varies as a function of the voltage applied between these pairs of electrodes. According to the invention, the device also comprises an actuation element (12) connected to the mobile electrodes (8), the element (12) being capable of occupying a rest position and of being guided along the determined direction (F) when the voltage applied between the electrodes in each pair (4) varies, the device comprising return arms (14) capable of pulling the actuation element (12) back towards its rest position, when the voltage applied between the two electrodes in each pair of electrodes is reduced. To be applied to actuation of continuously deformable micro-mirrors.

摘要翻译： 本发明涉及能够产生沿着确定方向（F）的运动的微型静电致动装置（100），包括一对电极（4），其中可移动电极（8）可以被拉动与固定电极（6）接触 ）在可变拉入表面上，其随着施加在这些电极对之间的电压而变化。 根据本发明，该装置还包括连接到移动电极（8）的致动元件（12），该元件（12）能够占据静止位置并且当电压 施加在每对电极（4）中的电极之间变化，当在每对电极中的两个电极之间施加的电压减小时，包括能够将致动元件（12）拉回其静止位置的返回臂（14）的装置 适用于连续变形微镜的致动。

公开(公告)号：US06812543B2

公开(公告)日：2004-11-02

申请号：US10370708

申请日：2003-02-24

申请人： Akifumi Kamijima

发明人： Akifumi Kamijima

IPC分类号： H01L2982

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/00 ,  G11B5/313 ,  G11B5/3909 ,  G11B5/3967 ,  G11B2005/3996 ,  H01F17/0006 ,  H01L23/5227 ,  H01L27/08 ,  H01L2924/0002 ,  H01L2924/00

摘要： A micro device includes a first magnetic layer, a second magnetic layer and a thin film coil. The first magnetic layer and the second magnetic layer are formed so as to be opposite to each other and magnetically connected via a joint. The thin film coil includes a planer round portion winding around the joint in between the first and the second magnetic layers and a perpendicular round portion provided perpendicularly to the planer round portion.

摘要翻译： 微器件包括第一磁性层，第二磁性层和薄膜线圈。 第一磁性层和第二磁性层形成为彼此相对并通过接头磁连接。 薄膜线圈包括绕第一和第二磁性层之间的接头缠绕的平面圆形部分和垂直于平面圆形部分设置的垂直圆形部分。

公开(公告)号：US06781208B2

公开(公告)日：2004-08-24

申请号：US10215912

申请日：2002-08-09

申请人： Toshiyuki Okumura

发明人： Toshiyuki Okumura

IPC分类号： H01L2982

CPC分类号： G02B6/29395 ,  B81B2201/047 ,  B81C1/00238 ,  B81C3/001 ,  B81C2201/019 ,  G02B6/12007 ,  G02B6/29358 ,  G02B6/29361 ,  G02B6/29362 ,  G02B6/3518 ,  G02B6/352 ,  G02B6/3546 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3588 ,  G02B6/3594 ,  G02B26/001 ,  G02B26/0833 ,  G02B26/0841 ,  G02B2006/12104 ,  H01L2924/0002 ,  H01L2924/00

摘要： A driver circuit substrate is prepared and a mirror substrate is so provided as to be placed on the driver circuit substrate. Nine mirror elements are lad out on the mirror substrate in a 3×3 matrix form. The mirror elements are prepared by a microelectromechanical system (MEMS). An insulating substrate is provided on the driver circuit substrate and a driver circuit which drives a light reflecting mirror element is provided on the insulating substrate. The driver circuit substrate is connected to the mirror substrate via a resin layer of a thermosetting adhesive or the like.

公开(公告)号：US06777765B2

公开(公告)日：2004-08-17

申请号：US10322728

申请日：2002-12-19

申请人： Li-Shu Chen ,  Howard N. Fudem ,  Donald E. Crockett ,  Philip C. Smith

发明人： Li-Shu Chen ,  Howard N. Fudem ,  Donald E. Crockett ,  Philip C. Smith

IPC分类号： H01L2982

CPC分类号： H01H59/0009

摘要： A capacitive type MEMS switch having a conductor arrangement comprised of first and second RF conductors deposited on a substrate. A bridge member having a central enlarged portion is positioned over the conductor arrangement. In one embodiment, the first RF conductor has an end defining an open area in which is positioned a pull down electrode, with the end of the first RF conductor substantially surrounding the pull down electrode. In another embodiment, two opposed RF conductors, each having ends with first and second branches, define an open area in which a pull down electrode is positioned. A dielectric layer is deposited on the conductor arrangement such that when a pull down voltage is applied to the pull down electrode, the switch impedance is significantly reduced so as to allow signal propagation between the RF conductors.

摘要翻译： 一种电容型MEMS开关，其具有由沉积在基板上的第一和第二RF导体构成的导体装置。 具有中央扩大部分的桥接件位于导体装置的上方。 在一个实施例中，第一RF导体具有限定开放区域的端部，其中定位有下拉电极，第一RF导体的端部基本上围绕下拉电极。 在另一个实施例中，每个具有第一和第二分支的端部的两个相对的RF导体限定其中定位有下拉电极的开放区域。 电介质层沉积在导体布置上，使得当下拉电压施加到下拉电极时，开关阻抗显着减小，以便允许RF导体之间的信号传播。

公开(公告)号：US06753583B2

公开(公告)日：2004-06-22

申请号：US10372984

申请日：2003-02-24

申请人： Axel Stoffel ,  Zdenek Skvor

发明人： Axel Stoffel ,  Zdenek Skvor

IPC分类号： H01L2982

CPC分类号： G01N27/223 ,  G01L9/0072 ,  H04R19/005 ,  H04R19/02 ,  H04R19/04 ,  H04R31/00

摘要： An electrostatic electroacoustical transducer contains an electrically conductive fixed electrode plate having an active surface with recesses. A conductive or semiconductive flexible diaphragm is disposed at a distance from the active surface of the electrode plate and within the recesses. An insulating device is disposed between the electrode plate and the diaphragm.

摘要翻译： 静电电声换能器包括具有凹陷的活性表面的导电固定电极板。 导电或半导电柔性隔膜设置在与电极板的有效表面和凹部内一定距离处。 绝缘装置设置在电极板和隔膜之间。

公开(公告)号：US06737729B2

公开(公告)日：2004-05-18

申请号：US10001214

申请日：2001-10-23

申请人： Masakazu Shiinoki ,  Kenji Sakurai ,  Mitsuru Fujii

发明人： Masakazu Shiinoki ,  Kenji Sakurai ,  Mitsuru Fujii

IPC分类号： H01L2982

CPC分类号： B81C1/00103 ,  B81B2203/0353 ,  B81B2203/0384

摘要： A semiconductor device is provided that simplifies wiring pattern and is capable of being etched through an etching hole as a concavity is produced over a short time period. A dielectric film 12 is formed so as to shield the concavity formed upon the upper surface of a silicon substrate 10. A circuit pattern that has a thermoelectric conversion element 18 is formed upon the dielectric film. The upper surface of the silicon wafer becomes a (100) surface, and a first etching hole 16 extending in the direction of the silicon substrate and a second etching hole 17 extending in the direction are formed. These holes intersect in a cross shape. Shapes of the first and second etching holes become parallelograms which have oblique sides tilted with respect to and . Imaginary rectangles passing though the vertices of the first and second etching holes are continuous. As a cross shape is removed from the silicon substrate, etching is rapid due to the appearance of (411) surfaces at the intersecting part.

摘要翻译： 提供一种半导体器件，其简化了布线图案，并且能够在短时间内产生凹陷时通过蚀刻孔蚀刻。 形成电介质膜12以屏蔽形成在硅衬底10的上表面上的凹面。在电介质膜上形成具有热电转换元件18的电路图案。 硅晶片的上表面成为（100）表面，并且形成沿硅衬底的<110>方向延伸的第一蚀刻孔16和沿<-110>方向延伸的第二蚀刻孔17。 这些孔相交十字形。 第一和第二蚀刻孔的形状变为相对于<110>和<-110>倾斜的倾斜边的平行四边形。 穿过第一和第二蚀刻孔的顶点的虚拟矩形是连续的。 由于从硅衬底去除了十字形状，所以由于在交叉部分的（411）表面的外观，蚀刻很快。

公开(公告)号：US06727562B2

公开(公告)日：2004-04-27

申请号：US10165490

申请日：2002-06-07

申请人： Naiqian Han ,  Jidong Hou ,  Xiaoping Zhang ,  Liji Huang ,  Gaofeng Wang

发明人： Naiqian Han ,  Jidong Hou ,  Xiaoping Zhang ,  Liji Huang ,  Gaofeng Wang

IPC分类号： H01L2982

CPC分类号： H01S5/18366 ,  H01S5/0207

摘要： The present invention discloses a tunable optical device. The tunable optical device includes a tuning cavity having a tuning means provided for alternately bonding to at least two different tunable optical cells each comprising a tuning membrane wherein the tuning cavity disposed near the tuning membrane for moving the tuning membrane for tuning one of the at least two tunable optical cells bonded thereon. In a preferred embodiment, the tuning cavity further includes a first electrode disposed on the tuning membrane and a second electrode disposed on a substrate supporting the tuning cavity for applying a voltage to move the tuning membrane. In a preferred embodiment, the optical device further includes an optical device control circuit connected to the tuning means for controlling and moving the tuning membrane. In a preferred embodiment, the tuning cavity further includes through hole along an optical path for an optical transmission passing through the tunable membrane for providing an interface-free and ripple-free optical path for the optical transmission. In a preferred embodiment, the tunable optical cells constitute an optical filter for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the tunable optical cells constitute an optical attenuator for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the tunable optical cells constitute an optical switch for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the tunable optical cells constitute an optical dispersion compensator for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the optical device constitutes a micro-electro-mechanical system (MEMS) optical device manufactured by applying a micro-electro-mechanical system (MEMS) technology.

公开(公告)号：US06710417B2

公开(公告)日：2004-03-23

申请号：US10055688

申请日：2002-01-23

申请人： Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Wayne A. Bonin

发明人： Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Wayne A. Bonin

IPC分类号： H01L2982

CPC分类号： B81B3/0035 ,  B81B2203/0118 ,  B81B2207/115

摘要： A method of improving the robustness of microcomponents formed of silicon by armor coating the microcomponent with a ductile material, such as a metal. The armored coating may comprise either partial armored coating or total armored coating. Providing the microcomponent with an armored coating reduces chipping and breaking, and likewise reduces contamination problems which arise from chips and breaks.

摘要翻译： 通过用延性材料（例如金属）对微组件进行铠装涂覆来提高由硅形成的微组件的坚固性的方法。 装甲涂层可以包括部分铠装涂层或全部铠装涂层。 为微型组件提供铠装涂层可减少碎裂和破碎，同时减少由碎屑和断裂引起的污染问题。