Gas meter with thermal time-of-flight sensing

    公开(公告)号:US11512990B2

    公开(公告)日:2022-11-29

    申请号:US16918237

    申请日:2020-07-01

    摘要: An electronic utility gas meter using MEMS thermal time-of-flight flow sensor to meter gas custody transfer mass flowrate and an additional MEMS gas sensor to measure the combustion gas composition for the correlations to the acquisition of gas high heat value simultaneously is disclosed in the present invention. The meter is designed for the applications in the city utility gas consumption in compliance with the current tariff while metering the true thermal value of the delivered gases for future upgrades. Data safety, remote data communication, and other features with state-of-the-art electronics are also included in the design.

    Vacuum gauge with an extended dynamic measurement range

    公开(公告)号:US11428596B2

    公开(公告)日:2022-08-30

    申请号:US17022988

    申请日:2020-09-16

    IPC分类号: G01L21/12

    摘要: The design of a vacuum gauge utilizing a micromachined silicon vacuum sensor to measure the extended vacuum range from ambient to ultrahigh vacuum by registering the gas thermal properties at each vacuum range is disclosed in the present invention. This single device is capable of measuring the pressure range from ambient and above to ultrahigh vacuum. This device applies to all types of vacuum measurement where no medium attack silicon is present. The disclosed vacuum gauge operates with thermistors and thermopile on a membrane of the thermal isolation diaphragm structure with a heat isolation cavity underneath.

    Gas meter with gas thermal property measurement and auto-compensation

    公开(公告)号:US11353336B2

    公开(公告)日:2022-06-07

    申请号:US16903825

    申请日:2020-06-17

    IPC分类号: G01D4/00 G01F1/684 G01F1/44

    摘要: An electronic utility gas meter using MEMS thermal mass flow sensor to meter gas custody transfer and MEMS gas thermal property sensor to compensate the metering values due to gas composition variations is disclosed in the present invention. The meter is designed to have a MEMS mass flow sensor to meter the city utility gas consumption independent of environmental temperature and pressure while a MEMS gas thermal property or dual gas thermal property sensors to compensate the tariff due to the gas composition variations for compliance with the current regulation requirements of tariff and remove the major concerns for the wide deployment of the thermal mass MEMS utility gas meters.

    GAS METER WITH THERMAL TIME-OF-FLIGHT SENSING

    公开(公告)号:US20220003584A1

    公开(公告)日:2022-01-06

    申请号:US16918237

    申请日:2020-07-01

    摘要: An electronic utility gas meter using MEMS thermal time-of-flight flow sensor to meter gas custody transfer mass flowrate and an additional MEMS gas sensor to measure the combustion gas composition for the correlations to the acquisition of gas high heat value simultaneously is disclosed in the present invention. The meter is designed for the applications in the city utility gas consumption in compliance with the current tariff while metering the true thermal value of the delivered gases for future upgrades. Data safety, remote data communication, and other features with state-of-the-art electronics are also included in the design.

    AUTOMATIC OXYGEN THERAPY DEVICE
    6.
    发明申请

    公开(公告)号:US20210379323A1

    公开(公告)日:2021-12-09

    申请号:US16896643

    申请日:2020-06-09

    摘要: The design and structure of a fully automatic oxygen therapy apparatus is exhibited in this disclosure. The apparatus integrates a MEMS mass flow meter, an oximeter, a proportional valve and a smart liquid bottle. The control unit of the apparatus is embedded with a wireless communication device and powered by a battery pack. This apparatus is designed to replace the mechanical oxygen rotameter used in today's hospital or homecare oxygen therapy applications. With a set recipe or parameters locally or remotely, the disclosed apparatus can perform a fully automatic oxygen therapy for recovering the blood oxygen level of patient, without the frequent attention of the therapy administrator, and especially it significantly reduces the possibility of cross infection to the administrator during the attendance of the oxygen therapy process. The therapy process data are relayed to local users as well as a designated cloud or data center. This disclosure will be beneficial for both medical staffs and patient.

    Composite MEMS flow sensor on silicon-on-insulator device and method of making the same

    公开(公告)号:US10480974B2

    公开(公告)日:2019-11-19

    申请号:US16017917

    申请日:2018-06-25

    摘要: The present invention disclosed a micromachined composite silicon flow sensor that is comprised of calorimetric flow sensing elements, time-of-flight sensing elements as well as independent temperature sensing element on a silicon-on-insulator device where the device layer is used for the thermal isolation membrane. The disclosed composite silicon flow sensor can measure mass flowrate, volumetric flowrate and flow medium temperature simultaneously, from which a full spectrum of flow parameters including flow pressure can be obtained. The sensor can be further used to alert any changes in physical properties of flow medium during operation. The disclosed manufacture process details the micromachining process of making such a sensor.

    Smart device for gas range
    8.
    发明授权

    公开(公告)号:US09752783B2

    公开(公告)日:2017-09-05

    申请号:US14621043

    申请日:2015-02-12

    IPC分类号: F24C1/00 F24C3/12 F23N5/24

    摘要: The design and assembly of a smart device constituent of a micro-machined (a.k.a. MEMS, Micro Electro Mechanical Systems) mass flow sensor and an electrically controllable valve for applications in safety enhancement and intermit connectivity for residential or commercial gas range is disclosed in the present invention. The said smart device detects the gas flow at the unattended situations and sends information to the destined mobile devices of the users via the network such that it enables the users to remotely execute actions of either shutting off the gas supply or call for relevant party's immediate attention. The said smart device shall also automatically shut off the gas supply should the transmitted signal to users failed to send feedback signal such that it can prevent the safety incidents due to leakage or overheating or even fires. The capability of the MEMS mass flow sensor shall also provide the thermal value measurement of the supplied gases and enable the user to program the gas range for making complete tasks of cooking substances in the unattended situation.

    Smart Electronic Vaporizer
    9.
    发明申请
    Smart Electronic Vaporizer 审中-公开
    智能电子蒸发器

    公开(公告)号:US20160255878A1

    公开(公告)日:2016-09-08

    申请号:US14639824

    申请日:2015-03-05

    摘要: The design and structure as well as the control scheme of a smart electronic vaporizer device having a micro-machined (a.k.a. MEMS, Micro Electro Mechanical Systems) mass flow sensor and control electronics that provide the vaporizing process in proportional to the user inhalation flowrate or strength for the best simulation of the experience for traditional cigarette. The device further incorporates a MEMS gas composition sensor that is coupled with the mass flow sensor to measure the user's respiratory health data, including but not limited to asthma status and metabolism related respiratory exchange rate. The device is further capable to relay the data to the designated mobile device and further to the designated cloud for big data process and sharing.

    摘要翻译: 智能电子蒸发器装置的设计和结构以及控制方案具有微加工(即MEMS,微机电系统)质量流量传感器和控制电子装置,其提供与用户吸入流量或强度成比例的蒸发过程 为传统香烟体验的最佳模拟。 该装置还包括与质量流量传感器耦合的MEMS气体组成传感器,以测量用户的呼吸健康数据,包括但不限于哮喘状态和新陈代谢相关呼吸交换率。 该设备还能够将数据中继到指定的移动设备,并进一步传送到指定的云以进行大数据处理和共享。

    Micromachined oxygen sensor and method of making the same
    10.
    发明授权
    Micromachined oxygen sensor and method of making the same 有权
    微加工氧传感器及其制作方法

    公开(公告)号:US09354197B2

    公开(公告)日:2016-05-31

    申请号:US13870914

    申请日:2013-04-25

    IPC分类号: G01N27/409 G01N27/407

    摘要: The design and manufacture method of an oxygen concentration sensor made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of oxygen measurement with fast response time and low power consumption is disclosed in the present invention. The said silicon oxygen concentration sensor operates with an yttrium stabilized zirconia oxide amperometric cell supported on a membrane made of silicon nitride with a heat isolation cavity underneath or a silicon nitride membrane with silicon plug for mechanical strength enforcement.

    摘要翻译: 在本发明中公开了用硅微加工(a.k.a.MicroSystem,Micro Electro Mechanical Systems)制造的氧浓度传感器的设计和制造方法,该方法用于具有快速响应时间和低功耗的氧测量应用。 所述硅氧浓度传感器用支撑在由氮化硅制成的膜上的钇稳定的氧化锆氧化物电流计单元进行操作,或者具有用于机械强度实施的硅插头的氮化硅膜。