发明授权
- 专利标题: Miniature electrostatic actuation device and installation comprising such devices
- 专利标题(中): 微型静电致动装置和包括这种装置的安装
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申请号: US10444463申请日: 2003-05-22
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公开(公告)号: US06815782B2公开(公告)日: 2004-11-09
- 发明人: Eric Stadler , Julien Charton
- 申请人: Eric Stadler , Julien Charton
- 优先权: FR0206293 20020523
- 主分类号: H01L2982
- IPC分类号: H01L2982
摘要:
The invention relates to a miniature electrostatic actuation device (100) capable of generating movements along a determined direction (F), comprising pairs of electrodes (4) of which the mobile electrodes (8) may be pulled into contact with a fixed electrode (6) on a variable pull-in surface that varies as a function of the voltage applied between these pairs of electrodes. According to the invention, the device also comprises an actuation element (12) connected to the mobile electrodes (8), the element (12) being capable of occupying a rest position and of being guided along the determined direction (F) when the voltage applied between the electrodes in each pair (4) varies, the device comprising return arms (14) capable of pulling the actuation element (12) back towards its rest position, when the voltage applied between the two electrodes in each pair of electrodes is reduced. To be applied to actuation of continuously deformable micro-mirrors.
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