Quantitative analyzing method of CIGS film using a laser induced breakdown spectroscopy
    10.
    发明授权
    Quantitative analyzing method of CIGS film using a laser induced breakdown spectroscopy 有权
    使用激光诱导击穿光谱法对CIGS膜的定量分析方法

    公开(公告)号:US09557273B2

    公开(公告)日:2017-01-31

    申请号:US14143723

    申请日:2013-12-30

    摘要: Disclosed herein is a quantitative analyzing method of a copper indium gallium selenide (CIGS) film, the method including: obtaining spectra by irradiating a laser on the plurality of CIGS films having different component compositions, selecting a first spectral line and a second spectral line among the spectra of target elements to be analyzed and obtaining a correlation plot between a measured intensity of the first spectral line and a measured intensity of the second spectral line, correcting the measured intensity of the first spectral line and the measured intensity of the second spectral line using results obtained by curve fitting the correlation plot, obtaining a linear calibration curve using the corrected intensity of the first spectral line and the corrected intensity of the second spectral line; and comparing the linear calibration curve with LIBS analysis of a target sample to be analyzed.

    摘要翻译: 本文公开了一种铜铟镓硒(CIGS)膜的定量分析方法,该方法包括:通过在具有不同组成成分的多个CIGS膜上照射激光来获得光谱,选择第一光谱线和第二光谱线 要分析的目标元素的光谱,并且获得第一光谱线的测量强度和第二光谱线的测量强度之间的相关图,校正第一光谱线的测量强度和第二光谱线的测量强度 使用通过曲线拟合相关图获得的结果,使用第一光谱线的校正强度和第二光谱线的校正强度获得线性校准曲线; 并将线性校准曲线与要分析的目标样品的LIBS分析进行比较。