公开(公告)号：US20110285246A1

公开(公告)日：2011-11-24

申请号：US13106644

申请日：2011-05-12

Applicant: Göran Cewers

Inventor： Göran Cewers

IPC: F01K27/00 ,  B23P11/00 ,  F02G1/04

CPC classification number: H02N2/009 ,  F03G7/06 ,  H01L41/053 ,  Y10T29/49826

Abstract: The disclosure pertains to a device and a method for compensating for heat expansion effects in solid materials, as well as a method for manufacturing the device.

Abstract translation: 本公开涉及用于补偿固体材料中的热膨胀效应的装置和方法，以及用于制造该装置的方法。

公开(公告)号：US07915787B2

公开(公告)日：2011-03-29

申请号：US12169575

申请日：2008-07-08

Applicant: Mahito Negishi ,  Takao Yokomatsu ,  Ken Meisho ,  Seiichi Hata ,  Akira Shimokohbe ,  Dongming Sun ,  Sheng Wang

Inventor： Mahito Negishi ,  Takao Yokomatsu ,  Ken Meisho ,  Seiichi Hata ,  Akira Shimokohbe ,  Dongming Sun ,  Sheng Wang

IPC: H01L41/08

CPC classification number: H02N2/009 ,  H02N2/021 ,  H02N2/08

Abstract: A cylindrical piezoelectric element is arranged to share an axis with a cylindrical vibrator having different diameters at central and end portions to fix the vibrator forming a gap at the central portion. Vibration voltages are applied across first electrodes on the piezoelectric element and the vibrator, namely, a second electrode, to vibrate the vibrator and bring a wave front of a traveling wave into contact with a tubular member, i.e., a supporting member fitted to the vibrator. Friction at a contact portion of the vibrator moves a mover including the vibrator and the piezoelectric element in an axial direction of the tubular member. By amplifying the vibration amplitude using the vibrator provided separately from the piezoelectric element, a small actuator capable of performing high-speed driving is realized.

Abstract translation: 圆柱形压电元件被布置成与中心部分和端部具有不同直径的圆柱形振动器共轴以固定在中心部分形成间隙的振动器。 在压电元件和振动器（即第二电极）上的第一电极上施加振动电压，以使振动器振动并使行波的波前与管状构件（即，安装到振动器的支撑构件）接触 。 在振动器的接触部分的摩擦使包括振动器和压电元件在内的动子在管状构件的轴向上移动。 通过使用与压电元件分开设置的振动器放大振动振幅，实现了能够进行高速驱动的小型致动器。

公开(公告)号：US20090021113A1

公开(公告)日：2009-01-22

申请号：US12169575

申请日：2008-07-08

Applicant: Mahito Negishi ,  Takao Yokomatsu ,  Ken Meisho ,  Seiichi Hata ,  Akira Shimokohbe ,  Dongming Sun ,  Sheng Wang

Inventor： Mahito Negishi ,  Takao Yokomatsu ,  Ken Meisho ,  Seiichi Hata ,  Akira Shimokohbe ,  Dongming Sun ,  Sheng Wang

IPC: H02N2/02

CPC classification number: H02N2/009 ,  H02N2/021 ,  H02N2/08

Abstract: A cylindrical piezoelectric element is arranged to share an axis with a cylindrical vibrator having different diameters at central and end portions to fix the vibrator forming a gap at the central portion. Vibration voltages are applied across first electrodes on the piezoelectric element and the vibrator, namely, a second electrode, to vibrate the vibrator and bring a wave front of a traveling wave into contact with a tubular member, i.e., a supporting member fitted to the vibrator. Friction at a contact portion of the vibrator moves a mover including the vibrator and the piezoelectric element in an axial direction of the tubular member. By amplifying the vibration amplitude using the vibrator provided separately from the piezoelectric element, a small actuator capable of performing high-speed driving is realized.

Abstract translation: 圆柱形压电元件被布置成与中心部分和端部具有不同直径的圆柱形振动器共轴以固定在中心部分形成间隙的振动器。 在压电元件和振动器（即第二电极）上的第一电极上施加振动电压，以使振动器振动并使行波的波前与管状构件（即，安装到振动器的支撑构件）接触 。 在振动器的接触部分的摩擦使包括振动器和压电元件在内的动子在管状构件的轴向上移动。 通过使用与压电元件分开设置的振动器放大振动振幅，实现了能够进行高速驱动的小型致动器。

公开(公告)号：US07067958B2

公开(公告)日：2006-06-27

申请号：US10778348

申请日：2004-02-17

Applicant: Stefan Johansson ,  Mats Bexell ,  Anders Jansson

Inventor： Stefan Johansson ,  Mats Bexell ,  Anders Jansson

IPC: H02N2/02 ,  H01L41/16

CPC classification number: H02N2/021 ,  H01L41/083 ,  H01L41/0913 ,  H02N2/009

Abstract: An electromechanical actuator 10 is disclosed, having drive elements (14a–d) movable in two dimensions and connected to an actuator backing (12). The actuator backing (12) is made of a material being ferromechanically inactive. Furthermore, the joint between the drive element (14a–d) and the actuator backing (12) is stiff and highly stable. This is achieved by use of an irreversible joint made e.g. by thermoset plastic glues, diffusion bonding or co-sintering. Co-sintering is to prefer. The actuator backing (12) material is selected to be stiff, preferably having a stiffness above 70 GPa and more preferably above 100 GPa, and having a high heat conductivity, preferably above 5 W/mK and more preferably above 10 W/mK, Electrodes (22) are preferably integrated in the actuator backing to increase stiffness as well as improving the heat conductivity. The drive elements (14a–d) are preferably covered (28, 26), at least at the driving surface, by heat-conducting material.

Abstract translation: 公开了一种机电致动器10，其具有可在两个维度上移动并连接到致动器背衬（12）的驱动元件（14a-d）。 致动器背衬（12）由铁机械不起作用的材料制成。 此外，驱动元件（14a-d）和致动器背衬（12）之间的接合是刚性且高度稳定的。 这通过使用例如不可逆的接头来实现。 通过热固性塑料胶，扩散粘合或共烧结。 共烧是喜欢的。 致动器背衬（12）材料选择为刚性的，优选具有高于70GPa，更优选高于100GPa的刚度，并且具有高导热性，优选高于5W / mK，更优选高于10W / m·K，电极 （22）优选地集成在致动器背衬中以增加刚度并提高导热性。 驱动元件（14a-d）优选至少在驱动表面处被导热材料覆盖（28,26）。

公开(公告)号：US5471108A

公开(公告)日：1995-11-28

申请号：US193658

申请日：1994-02-03

Applicant: Daniel Guyomar ,  Thierry Mazoyer ,  Jean-Denis Sauzade ,  Gil Ching

Inventor： Daniel Guyomar ,  Thierry Mazoyer ,  Jean-Denis Sauzade ,  Gil Ching

IPC: H02N2/00 ,  H01L41/09 ,  H02N2/16 ,  H01L41/08

CPC classification number: H02N2/163 ,  H02N2/0085 ,  H02N2/009

Abstract: A distribution network of electric signals in a piezoelectric or ultrasonic waves motor, is produced by depositing electrodes of conductive material on one face of a strip in dielectric material, that on the other face of the strip conductive tracks are deposited according to an interconnection diagram, designed beforehand to supply the piezoelectric elements with proper voltage. Drillings are made through the strip between the conductive tracks and the electrodes, and through plating or deposit of conducting material, these drillings are made conductive.

Abstract translation: 在压电或超声波电动机中的电信号分配网络是通过在电介质材料的条带的一个表面上沉积导电材料的电极而产生的，根据互连图在带状导电轨道的另一面上沉积， 预先设计为压电元件提供适当的电压。 通过导电轨道和电极之间的条形成钻孔，并且通过电镀或沉积导电材料，这些钻孔被制成导电的。

公开(公告)号：US12117739B2

公开(公告)日：2024-10-15

申请号：US17629202

申请日：2020-06-30

Applicant: ASML Netherlands B.V.

Inventor： Bas Jansen ,  Koen Martin Willem Jan Bos ,  Johannes Petrus Martinus Bernardus Vermeulen

IPC: G03F7/00 ,  H02N2/00 ,  H02N2/02 ,  H02N2/06

CPC classification number: G03F7/70783 ,  G03F7/70266 ,  G03F7/70716 ,  G03F7/70891 ,  H02N2/009 ,  H02N2/028 ,  H02N2/062

Abstract: Disclosed is a thermo-mechanical actuator (100) comprising a piezo¬electric module (110), the piezo-electric module comprising at least one piezo-electric element (120), wherein the thermo-mechanical actuator is configured to: •o receive a thermal actuation signal (132) for controlling a thermal behaviour of the piezo-electric module, or •o provide a thermal sensing signal (132) representative of a thermal state of the piezo-electric module, and, wherein the thermo-mechanical actuator is configured to: •o receive a mechanical actuation (134) signal for controlling a mechanical behaviour of the piezo-electric module, or •o provide a mechanical sensing signal (134) representative of a mechanical state of the piezo-electric module.

公开(公告)号：US20240012332A1

公开(公告)日：2024-01-11

申请号：US18038601

申请日：2021-11-12

Applicant: ASML Netherlands B.V.

Inventor： Luc Roger Simonne HASPESLAGH ,  Nitesh PANDEY ,  Ties Wouter VAN DER WOORD ,  Halil Gökay YEGEN ,  Guilherme BRONDANI TORRI ,  Sebastianus Adrianus GOORDEN ,  Alexander Ludwig KLEIN ,  Jim Vincent OVERKAMP ,  Edgar Alberto OSORIO OLIVEROS

IPC: G03F7/00 ,  G02B26/08 ,  H02N2/10 ,  H02N2/00 ,  H10N30/50 ,  H10N30/05

CPC classification number: G03F7/70116 ,  G02B26/0858 ,  H02N2/108 ,  H02N2/009 ,  H10N30/50 ,  H10N30/05 ,  G03F7/70625 ,  G03F7/7015 ,  G03F7/706849

Abstract: A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light and, for each mirror of the plurality of mirrors, at least one multilayer piezoelectric actuator for displacing the mirror, wherein the at least one multilayer piezoelectric actuator is connected to the substrate, and wherein the at least one multilayer piezoelectric actuator comprises a plurality of piezoelectric layers of piezoelectric material interleaved with a plurality of electrode layers to form a stack of layers. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection and/or metrology apparatus.

公开(公告)号：US09621076B2

公开(公告)日：2017-04-11

申请号：US14249130

申请日：2014-04-09

Applicant: CANON KABUSHIKI KAISHA

Inventor： Yuki Oda ,  Masanori Takahashi

IPC: H02N2/16 ,  H02N2/00

CPC classification number: H02N2/163 ,  H02N2/009

Abstract: A vibration type driving device includes an electro-mechanical energy conversion element; a vibrator fixed to the electro-mechanical energy conversion element and configured to be vibrated by application of voltage to the electro-mechanical energy conversion element; a first driven member and a second driven member frictionally driven by press-contact with the vibrator and configured to transmit rotational forces by frictional driving to an output shaft; and at least one pressing portion configured to bring the first driven member and the second driven member into press contact with the vibrator, wherein the pressing portion, the first driven member, the second driven member, and the vibrator are arranged to allow an air flow generated by an airflow generation unit to flow through an air-ventilation path of the pressing portion, between the first driven member and the second driven member, and an air-ventilation path of the vibrator.

公开(公告)号：US09143059B2

公开(公告)日：2015-09-22

申请号：US13810009

申请日：2011-06-29

Applicant: Satoshi Tsuchiya

Inventor： Satoshi Tsuchiya

IPC: H02N2/00 ,  H02N2/16

CPC classification number: H02N2/009 ,  H02N2/163

Abstract: Provided is a vibration wave motor including: a vibration member having an elastic body joined with a electric-mechanical energy converter; and a moving member contacting the vibration member, the vibration member and the moving member being annularly formed, the vibration wave motor frictionally driving the moving member by a motion generated at a contacting portion with the moving member of the vibration member upon application of an AC signal to the electric-mechanical energy converter. The vibration wave motor includes a centrifugal fan provided at an outer peripheral portion and/or an inner peripheral portion of a circular ring formed of the vibration member and the moving member, and the centrifugal fan rotates integrally with the moving member.

Abstract translation: 本发明提供一种振动波马达，包括：振动部件，具有与电动机械能转换器连接的弹性体; 以及移动构件，其与所述振动构件接触，所述振动构件和所述移动构件环形地形成，所述振动波马达在施加AC时通过在与所述振动构件的移动构件的接触部分处产生的运动来摩擦地驱动所述移动构件 信号到机电能量转换器。 振动波马达包括设置在由振动部件和移动部件构成的圆环的外周部和/或内周部的离心风扇，离心风扇与移动部件一体旋转。

公开(公告)号：US20140306578A1

公开(公告)日：2014-10-16

申请号：US14249130

申请日：2014-04-09

Applicant: CANON KABUSHIKI KAISHA

Inventor： Yuki Oda ,  Masanori Takahashi

IPC: H02N2/12 ,  H02N2/10

CPC classification number: H02N2/163 ,  H02N2/009

Abstract: A vibration type driving device includes an electro-mechanical energy conversion element; a vibrator fixed to the electro-mechanical energy conversion element and configured to be vibrated by application of voltage to the electro-mechanical energy conversion element; a first driven member and a second driven member frictionally driven by press-contact with the vibrator and configured to transmit rotational forces by frictional driving to an output shaft; and at least one pressing portion configured to bring the first driven member and the second driven member into press contact with the vibrator, wherein the pressing portion, the first driven member, the second driven member, and the vibrator are arranged to allow an air flow generated by an airflow generation unit to flow through an air-ventilation path of the pressing portion, between the first driven member and the second driven member, and an air-ventilation path of the vibrator.

Abstract translation: 振动型驱动装置包括机电能转换元件; 振动器，固定在所述机电能转换元件上，并被配置为通过向所述机电能转换元件施加电压而振动; 第一从动构件和第二从动构件，其通过与所述振动器压接摩擦地驱动并且构造成通过摩擦驱动将旋转力传递到输出轴; 以及构造成使第一从动构件和第二从动构件与振动体压接的至少一个按压部，其中，按压部，第一从动构件，第二从动构件和振动器被布置成允许空气流 由气流发生单元产生的流过第一从动构件和第二从动构件之间的按压部的通气路径，以及振动器的通气路径。