公开(公告)号：US20230268710A1

公开(公告)日：2023-08-24

申请号：US18310089

申请日：2023-05-01

Applicant: Gigaphoton Inc.

Inventor： Youichi YAMANOUCHI ,  Hiroshi UMEDA ,  Kazuki NAGAI ,  Takeshi UEYAMA

IPC: H01S3/0977 ,  H01S3/097

CPC classification number: H01S3/0977 ,  H01S3/09702

Abstract: A gas laser apparatus according to an aspect of the present disclosure includes a main discharge circuit that supplies main discharge voltage that causes main discharge to a pair of main discharge electrodes, and a pre-ionization circuit that supplies pre-ionization voltage that causes corona discharge to a pre-ionization electrode. The main discharge circuit includes a step-up pulse transformer, a main capacitor and a switch connected to a primary side of the step-up pulse transformer, a first power source that charges the main capacitor, a first capacitor connected in parallel to a secondary side of the step-up pulse transformer, a first magnetic switch connected to the first capacitor, and a peaking capacitor connected in parallel to the first capacitor through the first magnetic switch and to the main discharge electrodes. An interval between start timings of the corona discharge and the main discharge is 30 ns to 60 ns inclusive.

公开(公告)号：US07251263B2

公开(公告)日：2007-07-31

申请号：US11136617

申请日：2005-05-23

Applicant: Jorge J. Rocca

Inventor： Jorge J. Rocca

IPC: H01S3/22 ,  H01S3/095

CPC classification number: H01S4/00 ,  H01S3/0323 ,  H01S3/038 ,  H01S3/0975 ,  H01S3/0977 ,  H01S3/22

Abstract: A compact, high repetition rate, extreme ultraviolet/soft x-ray laser and method for generating such radiation are described. Excitation of the gaseous or vaporous lasing medium is achieved by discharging energy stored in a solid-dielectric capacitive device through a capillary channel containing the medium. By reducing the inductance of the discharge apparatus, excitation of the laser medium can be achieved without the use of Marx generators. Neon-like Ar atom laser pulses at 46.9 nm having energies of about 13 μJ are generated at repetition rates up to 12 Hz. Between 2 and 3×104 laser shots can be generated using a single capillary. Such a source of intense, short-wavelength radiation can be used for applications which include surface characterization of materials, high resolution imaging and printing, photochemistry and photophysics, laser ablation, characterization of x-ray optics, and dense plasma diagnostics.

Abstract translation: 描述了紧凑，高重复率，极紫外/软X射线激光器和用于产生这种辐射的方法。 气体或气相激光介质的激发通过将储存在固体介电电容器件中的能量通过包含介质的毛细通道放电来实现。 通过减小放电装置的电感，可以在不使用马克思发生器的情况下实现激光介质的激发。 以高达12Hz的重复率产生具有约13μJ能量的46.9nm处的氖样Ar原子激光脉冲。 可以使用单个毛细管产生2至3×10 4个激光照射。 这种强烈的短波长辐射源可用于包括材料的表面表征，高分辨率成像和印刷，光化学和光物理学，激光烧蚀，X射线光学表征和致密等离子体诊断等应用。

公开(公告)号：US06546036B1

公开(公告)日：2003-04-08

申请号：US09587996

申请日：2000-06-06

Applicant: Igor Bragin ,  Vadim Berger

Inventor： Igor Bragin ,  Vadim Berger

IPC: H01S322

CPC classification number: H01S3/038 ,  H01S3/0384 ,  H01S3/0977

Abstract: A method and devices for preionizing the main discharge gas volume of a gas discharge laser are described. The method and devices provide a preionizing discharge to the main gas discharge volume from above or below the main gas discharge volume. In combination with a shielding arrangement which reduces the spread of the preionization discharge other than to the main gas discharge volume, the exposure of other laser components and gas volumes to said preionization discharge is thereby minimized.

Abstract translation: 对气体放电激光器的主放电气体体积进行预处理的方法和装置进行说明。 所述方法和装置从主气体排出容积的上方或下方提供对主气体排出容积的预放电排放。 与除了主气体放电容积之外的减少预除电放电扩散的屏蔽装置相结合，其他激光成分的曝光和气体体积因此被最小化。

公开(公告)号：US4980894A

公开(公告)日：1990-12-25

申请号：US401027

申请日：1989-08-31

Applicant: Gerd Steinfuhrer

Inventor： Gerd Steinfuhrer

IPC: H01S3/097 ,  H01S3/0977 ,  H01S3/225

CPC classification number: H01S3/225 ,  H01S3/0977

Abstract: An ignitor for a preionizing means of an excimer laser has an electrically conductive core which projects into the gas space of the laser and which is surrounded by a jacket of a fluoroplastic. The jacket is brought into sealing engagement with the wall of the laser gas space by means of a pressure sleeve via mating conical surfaces.

Abstract translation: 用于准分子激光器的预处理装置的点火器具有引导到激光器的气体空间中并被氟塑料的护套包围的导电芯体。 通过配合的锥形表面，通过压力套筒使夹套与激光气体空间的壁密封接合。

公开(公告)号：US4667162A

公开(公告)日：1987-05-19

申请号：US625405

申请日：1984-06-28

Applicant: Theodore W. Broberg ,  David D. Rathe

Inventor： Theodore W. Broberg ,  David D. Rathe

IPC: H01S3/03 ,  H01S3/083 ,  H01S3/0977

CPC classification number: H01S3/03 ,  G01C19/661 ,  H01S3/083 ,  H01S3/0977 ,  H01S3/0835

Abstract: Start up apparatus for starting the laser beams in a laser angular rate sensor with improved reliability and in a reduced amount of time.

Abstract translation: 启动激光角度传感器激光器的可靠性和时间的减少。

公开(公告)号：US4509176A

公开(公告)日：1985-04-02

申请号：US388590

申请日：1982-06-15

Applicant: Renato Marchetti ,  Eugenio Penco

Inventor： Renato Marchetti ,  Eugenio Penco

IPC: H01S3/0977 ,  H01S3/097

CPC classification number: H01S3/0977

Abstract: A longitudinal-discharge-pulse laser has two coaxial sections in the form of glass tubes joined together by a grounded central electrode and terminated by two outer electrodes. Each glass tube carries on its outer surface a multiplicity of metal rings connected in parallel, via a step-up transformer, to the anode of a first thyratron for energization with a steep negative pulse to generate a corona effect for the preionization of a gas mixture in the tubes on command of a pulse-cadence generator. This generator also controls a second thyratron, with a predetermined delay, which applies negative trigger pulses to the two outer electrodes for initiating a pumping discharge of the laser.

Abstract translation: 纵向放电脉冲激光器具有由接地中心电极连接在一起并由两个外部电极端接的玻璃管形式的两个同轴部分。 每个玻璃管在其外表面上承载多个金属环，其通过升压变压器并联连接到第一闸流管的阳极，用于以陡峭的负脉冲通电，以产生电晕效应，用于气体混合物的预电离 在指挥脉冲发生器的管中。 该发生器还以预定的延迟来控制第二闸流管，其将两个外部电极施加负触发脉冲，以启动激光器的泵浦放电。

公开(公告)号：US4287487A

公开(公告)日：1981-09-01

申请号：US52195

申请日：1979-06-26

Applicant: Kouji Kuwabara ,  Hiroyuki Sugawara ,  Toshiharu Shirakura ,  Kouji Sasaki ,  Satoshi Takemori

Inventor： Kouji Kuwabara ,  Hiroyuki Sugawara ,  Toshiharu Shirakura ,  Kouji Sasaki ,  Satoshi Takemori

IPC: H01S3/038 ,  H01S3/036 ,  H01S3/04 ,  H01S3/041 ,  H01S3/097 ,  H01S3/0977 ,  H01S3/03

CPC classification number: H01S3/036 ,  H01S3/097 ,  H01S3/0977

Abstract: A gas laser generating device of the longitudinal gas flow type having at least two glow discharge tubes, each of which has positive and negative electrodes, electric insulating tubes which are inserted between the two glow discharge tubes in order to provide insulation therebetween, and mirrors which are positioned at the ends of the two glow discharge tubes. In the glow discharge tubes, gas is excited to generate gas lasing and this gas lasing is amplified by the reflections of the mirros. Also, there are further provided triggering electrodes near either the negative or positive electrodes of the glow discharge tubes, respectively, which triggering electrodes are connected to the positive electrodes through triggering resistors, respectively.

Abstract translation: 一种纵向气流型气体激光发生装置，具有至少两个辉光放电管，每个具有正极和负极，插入在两个辉光放电管之间以提供绝缘的电绝缘管和反射镜 位于两个辉光放电管的端部。 在辉光放电管中，气体被激发以产生气体激光，并且该气体激光通过反射镜被放大。 此外，还分别在辉光放电管的负电极或正电极附近提供触发电极，触发电极分别通过触发电阻器连接到正电极。

公开(公告)号：US3721916A

公开(公告)日：1973-03-20

申请号：US3721916D

申请日：1971-04-28

Applicant: TRW INC

Inventor： ECK M ,  RUTHERFORD W ,  WITTE R ,  DAILEY C

IPC: H01S3/032 ,  H01S3/038 ,  H01S3/0977 ,  H01S3/09

CPC classification number: H01S3/0388 ,  H01S3/0323 ,  H01S3/0382 ,  H01S3/0977

Abstract: A gaseous laser of the type having a coaxial cold cathode constructed to minimize sputtering of the windows of the laser. The laser is preferably an argon or xenon-ion laser with an indium cathode disposed at one end of the insulating envelope and surrounding an insulating tube which extends in a direction toward the anode to minimize sputtering. Alternatively, both cathode and anode may consist of indium and may be disposed on the outside of the end portions of the laser envelope with the end portions extending beyond the electrodes and towards each other.

Abstract translation: 一种具有同轴冷阴极的类型的气体激光器，其被构造为最小化激光窗口的溅射。 该激光器优选为氩或氙离子激光器，其中铟阴极设置在绝缘封套的一端并围绕绝缘管，该绝缘管在朝向阳极的方向上延伸以最小化溅射。 或者，阴极和阳极都可以由铟组成，并且可以设置在激光外壳的端部的外侧，端部延伸超过电极并朝向彼此。

公开(公告)号：US20150155677A1

公开(公告)日：2015-06-04

申请号：US14094227

申请日：2013-12-02

Applicant: Epilog Corporation

Inventor： Roberto Julio RamÍrez Zárate ,  Jay Austin Moore

IPC: H01S3/038 ,  H01S3/0977

CPC classification number: H01S3/0384 ,  H01S3/0315 ,  H01S3/0385 ,  H01S3/09702 ,  H01S3/09713 ,  H01S3/0977 ,  H01S3/2232 ,  Y10T29/49117

Abstract: A slab gas laser has a live slab electrode and a ground slab electrode with the live slab electrode and the ground slab electrode defining a primary gas discharge chamber therebetween. The live electrode is in electrical communication with a first AC power supply to provide a first excitation signal. A pre-ionizing cell comprises a live electrode and a ground electrode defining a pre-ionizing gas discharge chamber therebetween. The live electrode is in electrical communication with a second AC power supply distinct from the first AC power supply to provide a second excitation signal delivering a discharge of electrons from the pre-ionizing gas discharge chamber. The pre-ionizing and the primary gas discharge chambers are aligned such that the pre-ionizing cell is oriented with the edges of its live and ground electrodes adjacent and substantially parallel to edges of the ground slab and live slab electrodes, respectively.

Abstract translation: 平板气体激光器具有活板电极和具有活板电极的接地板电极，并且接地板电极在其间限定主气体放电室。 活电极与第一AC电源电连通以提供第一激励信号。 预电离电池包括在其间限定预电离气体放电室的活电极和接地电极。 活电极与不同于第一AC电源的第二AC电源电连通，以提供从预电离气体放电室输送电子的放电的第二激励信号。 对预电离和初级气体放电室进行排列，使得预电离电池分别定位成其带电和接地电极的边缘分别与接地板和活板电极的边缘相邻并基本平行。

公开(公告)号：US07489718B2

公开(公告)日：2009-02-10

申请号：US11746019

申请日：2007-05-08

Applicant: Alan E. Hill

Inventor： Alan E. Hill

IPC: H01S3/091

CPC classification number: H01S3/036 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/09707 ,  H01S3/0977 ,  H01S3/09775 ,  H01S3/2215 ,  H01S3/223 ,  H01S3/2232

Abstract: Controlled avalanche driver circuits and apparatuses for gas lasers. One embodiment typically delivers short, rapid, high voltage ionizing pulses in combination with an electric field whose magnitude is too low to sustain a normal glow discharge. The plasma is typically impedance matched with the pulse-forming network. Pre-ionization pulses may be generated. The circuits enable very high power, stable lasers.

Abstract translation: 用于气体激光器的控制雪崩驱动电路和装置。 一个实施例通常传递短，快，高电压的电离脉冲与其幅度太低以维持正常辉光放电的电场的组合。 等离子体通常与脉冲形成网络阻抗匹配。 可以产生预电离脉冲。 这些电路可实现非常高功率，稳定的激光。