公开(公告)号：US12087605B2

公开(公告)日：2024-09-10

申请号：US17237323

申请日：2021-04-22

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Ming-Chien Chiu ,  Chia-Ho Chuang ,  Yi-Hsuan Lee ,  Hsing-Min Wen ,  Hsin-Min Hsueh

IPC: H01L21/673 ,  G03F7/00 ,  G08C17/02 ,  H05K5/00 ,  H05K5/02

CPC classification number: H01L21/67359 ,  G03F7/70741 ,  G08C17/02 ,  H01L21/67369 ,  H01L21/67383 ,  H01L21/67396 ,  H05K5/0034 ,  H05K5/0208

Abstract: A reticle pod with antistatic capability includes a base and plural of support members. The base has a carrying surface having a recess formed thereon and defined by a bottom surface. The support members encircle the carrying surface of the base and are adapted to support a reticle. The recess is defined by a depth extending between the carrying surface and the bottom surface. The depth ranges from 300 μm to 3400 μm to thereby weaken the electrostatic force exerted upon particles on the carrying surface.

公开(公告)号：US20180048169A1

公开(公告)日：2018-02-15

申请号：US15233454

申请日：2016-08-10

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Abner BELLO ,  Stephanie WAITE ,  William J. FOSNIGHT

IPC: H02J7/00 ,  H02J50/10 ,  H01L21/677 ,  H02J7/02 ,  H01L21/67

CPC classification number: H02J50/10 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/67396 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67775 ,  H02J7/0044 ,  H02J7/025

Abstract: Rechargeable wafer carrier systems and methods are provided. A rechargeable wafer carrier system includes, for instance, a housing for holding at least one wafer and at least one electronics system therein, a rechargeable power source operably connected to the housing for powering the at least one electronics system, and a charging interface for receiving a supply of power for charging the rechargeable power source. The housing may be configured for transport within an automated material handling system. Also provided are methods of charging a rechargeable wafer carrier system, which includes, for instance, providing a rechargeable wafer carrier system having at least one electronics system and a rechargeable power source, operably connecting the rechargeable wafer carrier system to a charging base, and supplying power from the charging base to the rechargeable power source.

公开(公告)号：US20160141189A1

公开(公告)日：2016-05-19

申请号：US15006154

申请日：2016-01-26

Applicant: Infineon Technologies AG

Inventor： Germar Schneider ,  Matthias Taubert ,  Michael Mitrach ,  Thomas Gadau ,  Markus Pfeifenberger ,  Walter Leitgeb ,  Frank Boenewitz

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/673

CPC classification number: H01L21/6773 ,  H01L21/67161 ,  H01L21/67373 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67389 ,  H01L21/67396 ,  H01L21/67733

Abstract: According to various embodiments, a frame cassette may include: a housing; a mounting structure inserted in the housing, the mounting structure including a plurality of tape-frame slots, wherein each tape-frame slot is configured to receive a tape-frame, wherein the housing includes an opening to introduce a tape-frame into a tape-frame slot of the plurality of tape-frame slots or to remove a tape-frame from a tape-frame slot of the plurality of tape-frame slots, and a door mounted at the housing, wherein the door is configured to close the opening of the housing to seal the interior of the housing from the exterior of the housing.

公开(公告)号：US20150083638A1

公开(公告)日：2015-03-26

申请号：US14036999

申请日：2013-09-25

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Damyon L. Corbin ,  Charles F. Musante

IPC: H01L21/673

CPC classification number: H01L21/67396 ,  B65B5/06 ,  B65B7/16 ,  B65B61/20 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67386

Abstract: A package assembly for thin wafer shipping using a wafer container and a method of use are disclosed. The package assembly includes a shipping container and a wafer container having a bottom surface and a plurality of straps attached thereto placed within the shipping container. The package assembly further includes upper and lower force distribution plates provided within the shipping container positioned respectively on a top side and bottom side thereof.

Abstract translation: 公开了一种用于使用晶片容器的薄晶片运输的封装组件和使用方法。 包装组件包括运送容器和晶片容器，其具有底部表面和附接到其上的多个带状物，放置在运输容器内。 包装组件还包括设置在分配在其顶侧和底侧的运输容器内的上部和下部力分配板。

公开(公告)号：US08863956B2

公开(公告)日：2014-10-21

申请号：US13351911

申请日：2012-01-17

Applicant: Ray G. Brooks ,  Timothy Wayne Brooks

Inventor： Ray G. Brooks ,  Timothy Wayne Brooks

IPC: B65D85/48 ,  H01L21/673

CPC classification number: H01L21/67369 ,  H01L21/67383 ,  H01L21/67396

Abstract: The packaging system includes an enclosure having an interior volume. A wafer stack, comprising plural wafers and separators in contact with the wafers, is located in the interior volume. The separators have raised bumps extending from each side. The bumps create spaces that allow air to flow therethrough. The separator film intercepts and captures airborne molecular contaminants belonging to organic and inorganic chemical families. In addition, the film is dissipative to static discharge. Furthermore, the bumps provided by the separators protect the fragile wafers from damage due to mechanical shock. The separators are also provided with a peripheral ring or embossment, which contacts the wafer edges and further protects the wafers from damage to mechanical shock. Air cushions can be provided in the wafer stack, which cushions are provided with bands to regulate the compression.

Abstract translation: 包装系统包括具有内部容积的外壳。 包括多个晶片和与晶片接触的分离器的晶片堆叠位于内部体积中。 分离器具有从每一侧延伸的凸起。 这些凸块产生允许空气流过其中的空间。 分离膜拦截并捕获属于有机和无机化学家族的空气中的分子污染物。 此外，该薄膜耗散静电放电。 此外，由分离器提供的凸起保护脆弱的晶片免受机械冲击的损坏。 分离器还设置有周边环或压花，其接触晶片边缘并进一步保护晶片免受机械冲击的损害。 可以在晶片堆叠中提供空气垫，该衬垫设置有用于调节压缩的带。

公开(公告)号：US20140299508A1

公开(公告)日：2014-10-09

申请号：US14246337

申请日：2014-04-07

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： CHIEN-FENG WANG ,  SHAO-WEI LU ,  PO-TIN LEE

IPC: H01L21/673

CPC classification number: H01L21/67396 ,  B65D85/30

Abstract: The present invention provides an anti-electrostatic cassette, which mainly comprises at least an electrostatic discharge (ESD) device connected electrically to the carrying frames, which are disposed in the substrate cassette and carry the substrates, and to the handles, which are disposed on the outer sides of the substrate cassette, for forming the conductive path. By means of the contact between the equipment and the two handles of the substrate cassette, the residual static charges on the substrates are conducted to the ground for reducing the residual static charges on the substrates. Consequently, the ESD phenomena in the substrates due to friction can be avoided and hence preventing the damages in the substrates caused by static charges.

Abstract translation: 本发明提供了一种抗静电盒，其主要包括至少一个静电放电（ESD）装置，其电连接到承载框架上，静电放电装置设置在基板盒中并承载基板，并且被放置在手柄上 用于形成导电路径的基板盒的外侧。 通过设备与基板盒的两个手柄之间的接触，将基板上的残留静电电荷传导到地面，以减少基板上的残余静电。 因此，可以避免由于摩擦而导致的基板中的ESD现象，并因此防止由静电引起的基板中的损坏。

公开(公告)号：US08276759B2

公开(公告)日：2012-10-02

申请号：US13024817

申请日：2011-02-10

Applicant: Gregory Bores ,  Suraj Kalia ,  Anthony Mathius Tieben

Inventor： Gregory Bores ,  Suraj Kalia ,  Anthony Mathius Tieben

IPC: B65D85/00

CPC classification number: H01L21/67373 ,  H01L21/67396 ,  Y10T29/49117

Abstract: A front opening wafer carrier formed principally of plastic and comprising an enclosure portion and door has a path to ground with respect to the wafers, the path to ground effectuated by the door. The base “ground” may be provided at the machine interface upon which the carrier sits, or through the robotic arm that grasps, operates and moves the door.

Abstract translation: 主要由塑料形成并且包括外壳部分和门的前开口晶片载体具有相对于晶片接地的路径，通过门实现的接地路径。 基座可以设置在承载器所在的机器接口处，或者通过抓握，操作和移动门的机器人臂来设置。

公开(公告)号：US08016114B2

公开(公告)日：2011-09-13

申请号：US12508042

申请日：2009-07-23

Applicant: Gavin Charles Rider ,  Joseph A. Durben ,  Robert K. Lindsley

Inventor： Gavin Charles Rider ,  Joseph A. Durben ,  Robert K. Lindsley

IPC: B65D85/00

CPC classification number: H01L21/67353 ,  H01L21/67359 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67396 ,  H01L21/67763 ,  H01L21/67778

Abstract: A continuously electrically-conductive container contains an electrically-insulating support for holding an electric-field-sensitive article, such as a reticle, so that the article is shielded from external electric fields and is not in electrical contact with a conductive container wall. A SMIF pod comprises an electrically conductive container for holding an electric-field-sensitive article. A system has boundary walls that form a chamber for a controlled environment. The system includes a load port for receiving a SMIF pod and an end effector made of insulating material for moving a field-sensitive article within the chamber to and from the SMIF pod. An ionizer neutralizes electric charges on the field-sensitive article.

Abstract translation: 连续导电容器包含用于保持诸如掩模版之类的电场敏感物品的电绝缘支撑件，使得物品不受外部电场屏蔽，并且不与导电容器壁电接触。 SMIF盒包括用于保持电场敏感物品的导电容器。 系统具有形成用于受控环境的室的边界壁。 该系统包括用于接收SMIF盒的负载端口和由绝缘材料制成的端部执行器，用于将室内的场敏感物品移动到SMIF盒和从SMIF盒中移出。 电离器中和场敏感物品上的电荷。

公开(公告)号：US20090038985A1

公开(公告)日：2009-02-12

申请号：US12110276

申请日：2008-04-25

Applicant: Chien-Feng WANG

Inventor： Chien-Feng WANG

IPC: B65D85/00

CPC classification number: H01L21/67359 ,  G03F7/70741 ,  G03F7/70825 ,  G03F7/70858 ,  H01L21/67396

Abstract: A photomask pod and a photomask transport pod are provided for preventing particles in the environment from defiling a photomask as well as charge accumulation on the photomask from causing ESD damage. The photomask pod comprises two covers and the supporters or retainers on at least one of the two covers are made of a static dissipative material, which facilitates reducing charge accumulation and protecting the photomask from ESD damage.

Abstract translation: 提供光掩模盒和光掩模传送盒，用于防止环境中的颗粒污染光掩模以及光掩模上的电荷累积，从而导致ESD损坏。 光掩模盒包括两个盖，并且两个盖中的至少一个上的支撑件或保持器由静电耗散材料制成，这有助于减少电荷累积并保护光掩模免受ESD损坏。

公开(公告)号：US20080302701A1

公开(公告)日：2008-12-11

申请号：US12134257

申请日：2008-06-06

Applicant: Po-Shin LEE

Inventor： Po-Shin LEE

IPC: B65D90/46 ,  H05K9/00 ,  H01L21/60

CPC classification number: H05K9/0067 ,  G03F7/70741 ,  H01L21/67353 ,  H01L21/67359 ,  H01L21/67396 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The present invention provides a reticle pod preventing particles in the environment from contaminating the reticle and preventing statistic electricity discharge caused by accumulated electric charge from damaging the reticle pod. The reticle pod of the present invention comprises two cover members and at least one of the cover members is made of a macromolecule material doped with metal. The metal may be stainless steel wires, conductive metal wires or metal particles.

Abstract translation: 本发明提供一种防止环境中的颗粒污染掩模版并防止由积累的电荷引起的统计放电损坏光罩舱的掩模版盒。 本发明的掩模版盒包括两个盖构件，并且至少一个覆盖构件由掺杂有金属的高分子材料制成。 金属可以是不锈钢丝，导电金属线或金属颗粒。