Invention Application
- Patent Title: ANTI-ELECTROSTATIC SUBSTRATE CASSETTE
- Patent Title (中): 抗静电基材CASSETTE
-
Application No.: US14246337Application Date: 2014-04-07
-
Publication No.: US20140299508A1Publication Date: 2014-10-09
- Inventor: CHIEN-FENG WANG , SHAO-WEI LU , PO-TIN LEE
- Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Applicant Address: TW New Taipei City
- Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Current Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Current Assignee Address: TW New Taipei City
- Priority: TW102206395 20130409
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
The present invention provides an anti-electrostatic cassette, which mainly comprises at least an electrostatic discharge (ESD) device connected electrically to the carrying frames, which are disposed in the substrate cassette and carry the substrates, and to the handles, which are disposed on the outer sides of the substrate cassette, for forming the conductive path. By means of the contact between the equipment and the two handles of the substrate cassette, the residual static charges on the substrates are conducted to the ground for reducing the residual static charges on the substrates. Consequently, the ESD phenomena in the substrates due to friction can be avoided and hence preventing the damages in the substrates caused by static charges.
Public/Granted literature
- US09396980B2 Anti-electrostatic substrate cassette Public/Granted day:2016-07-19
Information query
IPC分类: