Abstract:
An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.
Abstract:
An X-ray target and an X-ray generation device including the X-ray target are provided. In an X-ray target, a frame for supporting an irradiation window is divided into a first frame closer to the irradiation window and a second frame on the outer side of the first frame. The irradiation window is formed of a diamond plate having a thermal expansion coefficient of 1×10−6/K. The first frame is formed of Mo (molybdenum) having a thermal expansion coefficient of 4.8×10−6/K or W (tungsten) having a thermal expansion coefficient of 4.3×10−6/K. The second frame is formed of Cu (copper) having a thermal expansion coefficient of 16.5×10−6/K. A difference between the thermal expansion coefficients of the irradiation window and the first frame is less than a difference between the thermal expansion coefficients of the irradiation window and the second frame.
Abstract:
A micro X-ray source comprising a target acting as anode, and a cathode, which during operation interacts with the target and functions as electron source, wherein the target is embodied as a metal foil possessing a spot where the electrons from the electron source arrive, and the metal foil being locally thinner at the spot.
Abstract:
A compact x-ray source includes an electron beam source with a metallic film on a diamond window. The metallic film, which may be copper or scandium, absorbs the electron beams and produces k-alpha x-rays. The diamond window is a single crystal of diamond with a crystallographic orientation to diffract the x-rays, thereby producing a monochromatic and well collimated x-ray beam. The orientation of the crystal lattice may be configured to produce multiple x-ray beams. A plurality of electron beam sources may also be used to generate multiple x-ray beams. A detector is used to receive the x-ray beam after it interacts with a sample to be measured.
Abstract:
An x-ray tube and method of operating include a vacuum chamber vessel and a source of an electron beam inside the vacuum chamber vessel. A target disposed inside the vacuum chamber vessel includes a substrate and one or more deposits attached to the substrate. Each different deposit includes an atomic element having a different atomic number. The x-ray tube also includes a means for directing the electron beam to a selectable deposit of multiple deposits. The substrate material can be selected with better vacuum sustaining strength, x-ray transparency, melting point, and thermal conductivity than a deposit. The substrate may be cooled by an integrated cooling system. The x-ray tube allows a selectable x-ray frequency to be produced with enhanced economy of power, reduced moving parts, and reduced size. For improved bone mass applications, one of the deposits has a k-fluorescence energy less than about 53 thousand electron volts.
Abstract:
According to some aspects, a carrier configured for use with a broadband x-ray source comprising an electron source and a primary target arranged to receive electrons from the electron source to produce broadband x-ray radiation in response to electrons impinging on the primary target is provided. The carrier comprising a housing configured to be removeably coupled to the broadband x-ray source and configured to accommodate a secondary target capable of producing monochromatic x-ray radiation in response to incident broadband x-ray radiation, the housing comprising a transmissive portion configured to allow broadband x-ray radiation to be transmitted to the secondary target when present, and a blocking portion configured to absorb broadband x-ray radiation.
Abstract:
X-rays can be used for material identification. X-ray beam purity, target adhesion the x-ray window, and a robust hermetic seal of the x-ray window are useful. To achieve these objectives, a target 17 can be mounted by an adhesion-layer 16 on the x-ray window. The adhesion-layer 16 can include chromium. A sealing-layer 13 can seal the x-ray window to a flange 19. Material of the sealing-layer 13 can be different from material of the adhesion-layer 16. There can be a gap 21 between the flange 19 and the target 17. There can be a conductive-layer 18 on the x-ray window 14 in the gap 21. A thickness Ts of the adhesion-layer 16 between the sealing-layer 13 and the x-ray window 14 can be different than a thickness Tt of the adhesion-layer 16 between the target 17 and the x-ray window 14.
Abstract:
An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector has an energy resolution not less than 1 keV or the X-ray detector has no energy analysis function.
Abstract:
A beam injector may include a cathode emitter to emit electrons and an electrode to bias at least a portion of the electrons to remain on the cathode emitter and focus the emitted electrons into an electron beam. The beam injector may also include a resistor coupled between the cathode emitter and the electrode and configured to allow self-regulation of a voltage potential on the electrode based at least in part on a current of the electron beam.
Abstract:
According to some aspects, a carrier configured for use with a broadband x-ray source comprising an electron source and a primary target arranged to receive electrons from the electron source to produce broadband x-ray radiation in response to electrons impinging on the primary target is provided. The carrier comprising a housing configured to be removably coupled to the broadband x-ray source and configured to accommodate a secondary target capable of producing monochromatic x-ray radiation in response to incident broadband x-ray radiation, the housing comprising a transmissive portion configured to allow broadband x-ray radiation to be transmitted to the secondary target when present, and a blocking portion configured to absorb broadband x-ray radiation.