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    Thermal-field type electron source composed of transition metal carbide material with artificial facet
    1.
    发明授权
    Thermal-field type electron source composed of transition metal carbide material with artificial facet 有权
    由过渡金属碳化物材料与人造面组成的热场型电子源

    公开(公告)号：US09240301B1

    公开(公告)日：2016-01-19

    申请号：US13851732

    申请日：2013-03-27

    Applicant: Applied Physics Technologies, Inc.

    Inventor： William A. Mackie ,  Gerald G. Magera

    IPC: H01J1/14 ,  H01J1/146 ,  H01J19/10 ,  H01J1/148

    CPC classification number: H01J1/148 ,  H01J1/14 ,  H01J1/146 ,  H01J19/10 ,  H01J37/06 ,  H01J2201/196 ,  H01J2201/2889 ,  H01J2201/30484 ,  H01J2201/317 ,  H01J2237/06316

    Abstract: An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.

    Abstract translation: 电子源由具有高耐火性质的混合金属碳化物材料制成。 从这些材料产生场强增强的热离子发射，即热场或延伸的肖特基发射需要使用某种低功函数的晶体学方向，例如（100），（210）和（310） 。 这些材料由于其耐火性质而不自然而然。 所披露的由过渡金属碳化物材料制成的电子源在安装在需要高亮度，远光束电流源的先进成像应用的扫描电子显微镜（SEM）中是特别有用的。

    FIELD EMISSION ELECTRON GUN AND ELECTRON BEAM APPLIED DEVICE USING THE SAME
    5.
    发明申请
    FIELD EMISSION ELECTRON GUN AND ELECTRON BEAM APPLIED DEVICE USING THE SAME 有权
    现场发射电子枪和使用该电子枪的电子束应用装置

    公开(公告)号：US20080029700A1

    公开(公告)日：2008-02-07

    申请号：US11831989

    申请日：2007-08-01

    Applicant: TADASHI FUJIEDA ,  Makoto Okai ,  Kishio Hidaka ,  Mitsuo Hayashibara ,  Shunichi Watanabe

    Inventor： TADASHI FUJIEDA ,  Makoto Okai ,  Kishio Hidaka ,  Mitsuo Hayashibara ,  Shunichi Watanabe

    IPC: H01J37/073 ,  H01J37/26 ,  H01J37/30

    CPC classification number: H01J37/073 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/3044 ,  H01J9/025 ,  H01J37/3174 ,  H01J2201/3043 ,  H01J2201/30434 ,  H01J2201/30469 ,  H01J2201/30484 ,  H01J2201/30488 ,  H01J2201/30496 ,  H01J2237/06341 ,  H01J2237/26

    Abstract: The object of the present invention is to enable the optical axis of an electron beam of a field emission electron gun mounting thereon an electron gun composed of a fibrous carbon material to be adjusted easily. Moreover, it is also to obtain an electron beam whose energy spread is narrower than that of the electron gun. Further, it is also to provide a high resolution electron beam applied device mounting thereon the field emission electron gun. The means for achieving the objects of the present invention is in that the fibrous carbon material is coated with a material having a band gap, in the field emission electron gun including an electron source composed of a fibrous carbon material and an electrically conductive base material for supporting the fibrous carbon material, an extractor for field-emitting electrons, and an accelerator for accelerating the electrons. Moreover, it is also to apply the field emission electron gun to various kinds of electron beam applied devices.

    Abstract translation: 本发明的目的是使得能够容易地调整由其上安装有由纤维状碳材料构成的电子枪的场发射电子枪的电子束的光轴。 此外，还要获得能量扩散比电子枪窄的电子束。 此外，还提供安装在其上的高分辨率电子束施加装置的场致发射电子枪。 用于实现本发明的目的的手段在于，在场发射电子枪中包括具有带隙的材料的纤维状碳材料包括由纤维状碳材料构成的电子源和用于 支撑纤维状碳材料，用于场发射电子的提取器和用于加速电子的加速器。 此外，还将场致发射电子枪应用于各种电子束施加装置。

    Thermionic-enhanced field emission electron source composed of transition metal carbide material with sharp emitter end-form
    6.
    发明授权
    Thermionic-enhanced field emission electron source composed of transition metal carbide material with sharp emitter end-form 有权

    公开(公告)号：US10083812B1

    公开(公告)日：2018-09-25

    申请号：US15359436

    申请日：2016-11-22

    Applicant: Applied Physics Technologies, Inc.

    Inventor： William A. Mackie ,  Gerald G. Magera ,  Joshua M. Lovell

    IPC: H01J1/304 ,  H01J9/02

    CPC classification number: H01J1/3044 ,  H01J9/025 ,  H01J2201/30407 ,  H01J2201/30484 ,  H01J2209/0223

    Abstract: An electron source emitter is made from transition metal carbide materials, including hafnium carbide (HfC), zirconium carbide (ZrC), titanium carbide (TiC), vanadium carbide (VC), niobium carbide (NbC), and tantalum carbide (TaC), which are of high refractory nature. Preferential evaporating and subsequent development of different crystallographic planes of the transition metal carbide emitter having initially at its apex a small radius (50 nm-300 nm) develop over time an on-axis, sharp end-form or tip that is uniformly accentuated circumferentially to an extreme angular form and persists over time. An emitter manufactured to the (110) crystallographic plane and operating at high electron beam current and high temperature for about 20 hours to 40 hours results in the (110) plane, while initially not a high emission crystallographic orientation, developing into a very high field emission orientation because of the geometrical change. This geometrical change allows for a very high electric field and hence high on-axis electron emission.

    COATED CARBON NANOFLAKES
    9.
    发明申请
    COATED CARBON NANOFLAKES 审中-公开
    涂层碳纳米管

    公开(公告)号：US20110175038A1

    公开(公告)日：2011-07-21

    申请号：US12359435

    申请日：2009-01-26

    Applicant: Kun Hou ,  Dennis M. Manos ,  Ronald A. Outlaw

    Inventor： Kun Hou ,  Dennis M. Manos ,  Ronald A. Outlaw

    IPC: H01B1/04 ,  H01B1/02 ,  B05D5/12 ,  B05D3/10 ,  B82Y30/00 ,  B82Y40/00

    CPC classification number: C23C14/18 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/20 ,  C23C14/5806 ,  C23C14/5853 ,  H01J1/304 ,  H01J9/025 ,  H01J2201/30453 ,  H01J2201/30484 ,  H01J2201/30488 ,  H01J2201/30492 ,  H01J2201/30496

    Abstract: Compositions of carbon nanoflakes are coated with a low Z compound, where an effective electron emission of the carbon nanoflakes coated with the low Z compound is improved compared to an effective electron emission of the same carbon nanoflakes that are not coated with the low Z compound or of the low Z compound that is not coated onto the carbon nanoflakes. Compositions of chromium oxide and molybdenum carbide-coated carbon nanoflakes are also described, as well as applications of these compositions. Carbon nanoflakes are formed and a low Z compound coating, such as a chromium oxide or molybdenum carbide coating, is formed on the surfaces of carbon nanoflakes. The coated carbon nanoflakes have excellent field emission properties.

    Abstract translation: 碳纳米片的组合物涂覆有低Z化合物，其中涂覆有低Z化合物的碳纳米片的有效电子发射与未涂覆低Z化合物的相同碳纳米片的有效电子发射相比有所改善，或 的未涂覆在碳纳米片上的低Z化合物。 还描述了氧化铬和碳化钼包覆的碳纳米片的组成以及这些组合物的应用。 形成碳纳米片，并且在碳纳米片的表面上形成低Z化合物涂层，例如氧化铬或碳化钼涂层。 涂覆的碳纳米片具有优异的场致发射特性。

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