公开(公告)号：US6013195A

公开(公告)日：2000-01-11

申请号：US796872

申请日：1997-02-07

Applicant: Alessio Corazza ,  Claudio Boffito

Inventor： Alessio Corazza ,  Claudio Boffito

IPC: B01J3/00 ,  B01J20/02 ,  H01J7/18 ,  H01J17/18 ,  H01J29/94 ,  H01J35/20

CPC classification number: H01J17/186 ,  H01J7/183

Abstract: Compositions containing getter material and getter devices for which gettering activity can be activated at applied temperatures that are lower than those temperatures required for activating the getter material alone are disclosed. In one aspect, a getter composition that includes a getter component and an activator component is provided. The getter component is selected from the group consisting of evaporable and non-evaporable getter materials. The activator component is effective to heat said getter material to a temperature greater than about 500.degree. C. when said activator material is heated to a temperature of between about 280.degree. C. and about 500.degree. C. In some embodiments, the activator component is effective to bring the temperature of the getter material to greater than about 1,000.degree. C. These materials can be used in devices and locations for which low applied activation temperatures are required.

Abstract translation: 公开了含有吸气剂材料和吸气装置的组合物，其吸附活性可以在低于单独活化吸气剂材料所需的温度的应用温度下活化。 一方面，提供了包含吸气剂组分和活化剂组分的吸气剂组合物。 吸气剂组分选自蒸发和非蒸发吸气剂材料组。 当所述活化剂材料被加热至约280℃至约500℃的温度时，活化剂组分有效地将所述吸气剂材料加热至大于约500℃的温度。在一些实施方案中，活化剂组分为 有效地将吸气剂材料的温度提高到大于约1000℃。这些材料可以用于需要低施加活化温度的装置和位置。

公开(公告)号：US07928645B2

公开(公告)日：2011-04-19

申请号：US12475965

申请日：2009-06-01

Applicant: Yoshio Suzuki ,  Kazuya Ishiwata

Inventor： Yoshio Suzuki ,  Kazuya Ishiwata

IPC: H01J1/62

CPC classification number: H01J9/02 ,  H01J9/241 ,  H01J9/32 ,  H01J17/04 ,  H01J17/16 ,  H01J17/186 ,  H01J29/04 ,  H01J29/861 ,  H01J29/90 ,  H01J2329/02 ,  H01J2329/861 ,  H01J2329/90 ,  H01L27/3288 ,  H01L51/5246

Abstract: An airtight container includes a first substrate and a second substrate facing the first substrate and joined thereto using joint members. The first substrate has a groove extending on a surface of the first substrate and a wiring provided along a direction of the extended groove. The wiring includes a section inside and along the groove and a section outside the groove and extending from the section inside the groove, and the first substrate includes joint members provided on and across the section of the wiring outside the groove. In addition, a frame is joined on the second substrate by second joint members and is interposed between the first substrate and the second substrate. The frame is joined to the first substrate by the first joint members.

Abstract translation: 密封容器包括第一基板和面向第一基板的第二基板，并使用接头构件与其连接。 第一基板具有在第一基板的表面上延伸的凹槽和沿着延伸槽的方向设置的布线。 布线包括槽内部和沿着槽的部分以及槽外部并从槽内的部分延伸的部分，并且第一基板包括设置在槽外侧的布线部分上的横向的接合部件。 此外，框架通过第二接合构件连接在第二基板上，并且介于第一基板和第二基板之间。 框架通过第一联接构件连接到第一基板。

公开(公告)号：US09941087B2

公开(公告)日：2018-04-10

申请号：US15410711

申请日：2017-01-19

Applicant: Axcelis Technologies, Inc.

Inventor： Neil K. Colvin ,  Tseh-Jen Hsieh ,  Paul b. Silverstein

IPC: H01J7/24 ,  H05B31/26 ,  H01J17/06 ,  H01J17/18 ,  H01J27/08 ,  H01J27/02

CPC classification number: H01J17/06 ,  H01J17/186 ,  H01J27/022 ,  H01J27/08 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/006 ,  H01J2237/061

Abstract: An ion source has an arc chamber having an arc chamber body. An electrode extends into an interior region of the arc chamber body, and a cathode shield has a body that is cylindrical having an axial hole. The axial hole is configured to pass the electrode therethrough. First and second ends of the body have respective first and second gas conductance limiters. The first gas conductance limiter extends from an outer diameter of the body and has a U-shaped lip. The second gas conductance limiter has a recess for a seal to protect the seal from corrosive gases and maintain an integrity of the seal. A gas source introduces a gas to the arc chamber body. A liner has an opening configured to pass the cathode shield therethrough, where the liner has a recess. A gap is defined between the U-shaped lip and the liner, wherein the U-shaped lip reduces a conductance of gas into the gap and the recess further reduces conductance of gas into the region.

公开(公告)号：US20060270304A1

公开(公告)日：2006-11-30

申请号：US11411934

申请日：2006-04-27

Applicant: Toshiharu Aita

Inventor： Toshiharu Aita

IPC: H01J9/26

CPC classification number: H01J9/261 ,  H01J5/24 ,  H01J5/32 ,  H01J9/32 ,  H01J17/183 ,  H01J17/186 ,  H01J2329/867 ,  H01J2329/90 ,  H01L27/3276 ,  H01L27/3288 ,  H01L51/524 ,  H01L51/56 ,  H01L2251/566

Abstract: It is an object of the present invention to provide an improved structure having an adequate strength to satisfy a requirement of making a thin electro-optical panel. The electro-optical panel forms a sealing area having an electro-optical functional section between the support substrate and the sealing member. The support substrate has a lead-out area containing an area for forming lead-out wiring extending from the sealing area and for connecting or mounting the driving means (IC chip, flexible substrate and the like) to the lead-out wiring. The sealing member has protruding reinforcement sections protruding from the sealing area S on to the lead-out area. The support substrate and the sealing member are bonded together through an adhesive layer, thereby forming an adhesive area surrounding the sealing member. It is another object of the present invention to provide an improved process of producing a plurality of self-emission panels formed by cutting a mother panel into a plurality of unit panels, to prevent lead-out wiring portions from being wounded during the cutting process, thereby improving the yield of production. A further object of the invention is to improve the efficiency of inspection step, thereby improving the productivity of manufacturing process. A mother self-emission panel comprises a mother support substrate having formed thereon a plurality of self-emission sections, and a mother sealing member having arranged thereon a plurality of sealing sections corresponding to the plurality of self-emission sections. When the mother support substrate and the mother sealing member are bonded together, a plurality of sealing areas will be formed to seal the plurality of self-emission sections corresponding to the plurality of sealing sections. The mother support substrate has a plurality of lead-out areas having formed thereon a plurality of lead-out wiring portions extending from the plurality of self-emission sections to the outsides of the sealing areas. The mother sealing member has a plurality of hole processing portions for exposing the lead-out wiring portions.

公开(公告)号：US06506319B1

公开(公告)日：2003-01-14

申请号：US09653574

申请日：2000-08-31

Applicant: Alessio Corazza ,  Claudio Boffito

Inventor： Alessio Corazza ,  Claudio Boffito

IPC: H01J718

CPC classification number: H01J17/186 ,  H01J7/183

Abstract: Compositions containing getter material and getter devices for which gettering activity can be activated to applied temperatures that are lower than those temperatures required for activating the getter material alone are disclosed. In one aspect, a getter composition that includes a getter component and an activator component is provided. The getter component is selected from the group consisting of evaporable and non-evaporable getter materials. The activator component is effective to heat said getter material to a temperature greater than about 500° C. when said activator material is heated to a temperature of between about 280° C. and about 500° C. In some embodiments, the activator component is effective to bring the temperature of the getter material to greater than about 1,000° C. These materials can be used in devices and locations for which low applied activation temperatures are required.

Abstract translation: 公开了含有吸气剂材料和吸气装置的组合物，其中吸气活性可以被激活到低于单独激活吸气剂材料所需温度的温度。 一方面，提供了包含吸气剂组分和活化剂组分的吸气剂组合物。 吸气剂组分选自蒸发和非蒸发吸气剂材料组。 当所述活化剂材料被加热至约280℃至约500℃的温度时，活化剂组分有效地将所述吸气剂材料加热至大于约500℃的温度。在一些实施方案中，活化剂组分为 有效地使吸气材料的温度大于约1000℃。这些材料可用于需要低施加活化温度的装置和位置。

公开(公告)号：US20170207054A1

公开(公告)日：2017-07-20

申请号：US15410711

申请日：2017-01-19

Applicant: Axcelis Technologies, Inc.

Inventor： Neil K. Colvin ,  Tseh-Jen Hsieh ,  Paul b. Silverstein

IPC: H01J17/06 ,  H01J27/08 ,  H01J17/18

CPC classification number: H01J17/06 ,  H01J17/186 ,  H01J27/022 ,  H01J27/08 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/006 ,  H01J2237/061

Abstract: An ion source has an arc chamber having an arc chamber body. An electrode extends into an interior region of the arc chamber body, and a cathode shield has a body that is cylindrical having an axial hole. The axial hole is configured to pass the electrode therethrough. First and second ends of the body have respective first and second gas conductance limiters. The first gas conductance limiter extends from an outer diameter of the body and has a U-shaped lip. The second gas conductance limiter has a recess for a seal to protect the seal from corrosive gases and maintain an integrity of the seal. A gas source introduces a gas to the arc chamber body. A liner has an opening configured to pass the cathode shield therethrough, where the liner has a recess. A gap is defined between the U-shaped lip and the liner, wherein the U-shaped lip reduces a conductance of gas into the gap and the recess further reduces conductance of gas into the region.

公开(公告)号：US20090302734A1

公开(公告)日：2009-12-10

申请号：US12475965

申请日：2009-06-01

Applicant: Yoshio Suzuki ,  Kazuya Ishiwata

Inventor： Yoshio Suzuki ,  Kazuya Ishiwata

IPC: H01J21/10 ,  H01J9/00 ,  H01J9/26

CPC classification number: H01J9/02 ,  H01J9/241 ,  H01J9/32 ,  H01J17/04 ,  H01J17/16 ,  H01J17/186 ,  H01J29/04 ,  H01J29/861 ,  H01J29/90 ,  H01J2329/02 ,  H01J2329/861 ,  H01J2329/90 ,  H01L27/3288 ,  H01L51/5246

Abstract: To realize airtight joining on wirings, even in a case of arranging the wirings within grooves formed on a substrate surface, the wirings include a section arranged inside the grooves and a section arranged outside the grooves so as to extend over both sections. The first substrate and the second substrate are jointed through a joint member provided on the wirings outside the grooves so as to intersect with the wirings outside the grooves.

Abstract translation: 为了在布线上实现气密接合，即使在布置在基板表面上形成的凹槽内的布线的情况下，布线包括布置在凹槽内的部分和布置在凹槽外侧的部分，以在两个部分上延伸。 第一基板和第二基板通过设置在凹槽外侧的布线上的接合构件接合，以便与沟槽外部的布线相交。

公开(公告)号：US06514430B1

公开(公告)日：2003-02-04

申请号：US09723614

申请日：2000-11-27

Applicant: Alessio Corazza ,  Claudio Boffito

Inventor： Alessio Corazza ,  Claudio Boffito

IPC: H01J718

CPC classification number: H01J17/186 ,  H01J7/183

Abstract: Compositions containing getter material and getter devices for which gettering activity can be activated at applied temperatures that are lower than those temperatures required for activating the getter material alone are disclosed. In one aspect, a getter composition that includes a getter component and an activator component is provided. The getter component is selected from the group consisting of evaporable and non-evaporable getter materials. The activator component is effective to heat said getter material to a temperature greater than about 500° C. when said activator material is heated to a temperature of between about 280° C. and about 500° C. In some embodiments, the activator component is effective to bring the temperature of the getter material to greater than about 1,000° C. These materials can be used in devices and locations for which low applied activation temperatures are required.

Abstract translation: 公开了含有吸气剂材料和吸气装置的组合物，其吸附活性可以在低于单独活化吸气剂材料所需的温度的应用温度下活化。 一方面，提供了包含吸气剂组分和活化剂组分的吸气剂组合物。 吸气剂组分选自蒸发和非蒸发吸气剂材料组。 当所述活化剂材料被加热至约280℃至约500℃的温度时，活化剂组分有效地将所述吸气剂材料加热至大于约500℃的温度。在一些实施方案中，活化剂组分为 有效地使吸气材料的温度大于约1000℃。这些材料可用于需要低施加活化温度的装置和位置。