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    METHOD OF WAFER SYSTEM INTERLOCK FOR THE PROTECTION OF EQUIPMENT AND PRODUCT IN SEMICONDUCTOR PROCESSING BRIDGE TOOL
    1.
    发明申请
    METHOD OF WAFER SYSTEM INTERLOCK FOR THE PROTECTION OF EQUIPMENT AND PRODUCT IN SEMICONDUCTOR PROCESSING BRIDGE TOOL 有权
    用于半导体加工桥工具中设备和产品保护的波浪系统互锁方法

    公开(公告)号：US20140277727A1

    公开(公告)日：2014-09-18

    申请号：US13797460

    申请日：2013-03-12

    申请人： KAWASAKI ROBOTICS (USA), INC.

    发明人： Thomas Miu ,  Shinya Kitano ,  Simon Jeyapalan ,  Ming Zeng ,  Avish A. Bharwani

    IPC分类号： B25J9/16

    CPC分类号： G05B19/401 ,  G05B2219/37345 ,  G05B2219/45032 ,  Y10S901/02

    摘要： The present disclosure is directed to methods and systems for evaluating wafer size handling capabilities of wafer handling robots and wafer stations in a wafer processing environment. In one embodiment, a method is provided in which size parameters for each of one or more wafer stations and one or more robot hands of a wafer handling robot are set based on user input. A user command identifying a desired robot hand and a desired wafer station is received. A first size parameter of the desired robot hand is compared to a second size parameter of the desired wafer station. If the first size parameter is equal to the second size parameter, or if the second size parameter is an all-size parameter, the user command is executed. If the first size parameter is not equal to the second size parameter, an error is generated.

    摘要翻译： 本公开涉及用于在晶片处理环境中评估晶片处理机器人和晶圆台的晶片尺寸处理能力的方法和系统。 在一个实施例中，提供了一种方法，其中基于用户输入来设置晶片处理机器人的一个或多个晶片台和一个或多个机器人手中的每一个的尺寸参数。 接收识别所需机器人手和期望的晶片台的用户命令。 将期望的机器人手的第一尺寸参数与期望的晶片台的第二尺寸参数进行比较。 如果第一个尺寸参数等于第二个尺寸参数，或者如果第二个尺寸参数是全尺寸参数，则执行用户命令。 如果第一个尺寸参数不等于第二个尺寸参数，则会生成错误。

    Machine tool and controlling method thereof
    2.
    发明授权
    Machine tool and controlling method thereof 有权
    机床及其控制方法

    公开(公告)号：US08299743B2

    公开(公告)日：2012-10-30

    申请号：US12685996

    申请日：2010-01-12

    申请人： Satoshi Abeta ,  Toshihiro Yonezu

    发明人： Satoshi Abeta ,  Toshihiro Yonezu

    IPC分类号： G05B19/25

    CPC分类号： G05B19/19 ,  B23Q15/02 ,  B24B49/02 ,  G05B2219/37345 ,  G05B2219/41021 ,  G05B2219/45161 ,  G05B2219/50062 ,  G05B2219/50074

    摘要： A machine tool a tool includes a supporting member relatively movable to a workpiece along a predetermined axis, a servo motor configured to drive the tool supporting member to the workpiece along the predetermined axis, a sizing sensor configured to measure a profile of the workpiece and to output a size deviation of measured values from a target profile, and a position detector configured to detect at least one of a relative position of the tool supporting member to the workpiece and a rotational position angle of the servo motor. The a servo driver is configured to drive the servo motor, and has a first feedback control having an output based on the size deviation, and a second feedback control based on an output of the position detector. The servo drives the servo motor by combining the outputs of the first and second feedback controls.

    摘要翻译： 一种机床工具，包括沿着预定轴线相对移动到工件的支撑构件，构造成沿着预定轴线将工具支撑构件驱动到工件的伺服电动机，被配置为测量工件轮廓的施胶传感器， 从目标轮廓输出测量值的尺寸偏差;以及位置检测器，被配置为检测工具支撑构件与工件的相对位置和伺服电动机的旋转位置角度中的至少一个。 伺服驱动器被配置为驱动伺服电动机，并且具有基于尺寸偏差的输出的第一反馈控制和基于位置检测器的输出的第二反馈控制。 伺服驱动伺服电机通过组合第一和第二反馈控制的输出。

    System and method for manufacturing a material using concurrent dimension certification
    4.
    发明申请
    System and method for manufacturing a material using concurrent dimension certification 审中-公开
    使用并行维度认证制造材料的系统和方法

    公开(公告)号：US20030093170A1

    公开(公告)日：2003-05-15

    申请号：US10045370

    申请日：2001-11-09

    发明人： Benjamin Angeles Escobar JR.

    IPC分类号： G06F019/00

    CPC分类号： G05B19/401 ,  G05B2219/37345 ,  G05B2219/37573 ,  G05B2219/45145 ,  G05B2219/50074

    摘要： A system and method for cutting material, adaptable for use with existing manufacturing devices, where the system can be adapted to work with existing controllable manufacturing processors, obtain one or more predetermined dimensions during a manufacturing process, and use those dimensions to simultaneously control the manufacturing process while generating a concurrent certification of the predetermined dimensions. In an exemplary embodiment the device comprises a milling line; a stepper motor; a mainframe; a protected real-time sensor; a controller; and a computer in communication with the controller and sensor. It is emphasized that this abstract is provided to comply with the rules requiring an abstract which will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope of meaning of the claims.

    摘要翻译： 一种用于切割材料的系统和方法，适用于现有的制造装置，其中系统可以适应于现有的可控制造处理器，在制造过程中获得一个或多个预定尺寸，并使用这些尺寸来同时控制制造 同时生成预定维度的并发证书。 在示例性实施例中，该装置包括铣削线; 步进电机 大型机 受保护的实时传感器; 控制器 以及与控制器和传感器通信的计算机。 要强调的是，该摘要被提供以符合要求摘要的规则，这将允许搜索者或其他读者快速确定技术公开的主题。 提交的理由是，它不会用于解释或限制权利要求的含义范围。

    Method and apparatus for grinding composite workpieces
    5.
    发明授权
    Method and apparatus for grinding composite workpieces 失效
    复合工件磨削的方法和装置

    公开(公告)号：US06411861B1

    公开(公告)日：2002-06-25

    申请号：US09011081

    申请日：1998-01-27

    申请人： Stuart Clewes ,  John David Pickles

    发明人： Stuart Clewes ,  John David Pickles

    IPC分类号： G06F1900

    CPC分类号： B24B51/00 ,  B24B5/42 ,  B24B19/125 ,  B24B49/045 ,  G05B19/184 ,  G05B19/404 ,  G05B19/4166 ,  G05B2219/33078 ,  G05B2219/36103 ,  G05B2219/37308 ,  G05B2219/37339 ,  G05B2219/37345 ,  G05B2219/37525 ,  G05B2219/37576 ,  G05B2219/45156 ,  G05B2219/49177 ,  G05B2219/49188 ,  G05B2219/49342 ,  G05B2219/50056 ,  G05B2219/50059

    摘要： A method is described for grinding a composite workpiece to form a component having concentric and eccentric cylindrical regions. The method comprises mounting the workpiece in a computer controlled grinding machine having a grinding wheel the advance and withdrawal of which is controllable by a program entered into the controlling computer, loading a wheelfeed controlling program into the computer, relatively positioning the grinding wheel and the workpiece to align the wheel with a first selected region of the workpiece, advancing the grinding wheel towards the selected region so as to grind the surface thereof, controlling the wheelfeed so as to maintain grinding contact between the grinding wheel and the workpiece so as either to grind a concentric cylindrical region thereon or an offset cylindrical region thereon as required, information about each selected region of the workpiece being stored in the computer and addressed as appropriate so that the wheelfeed can be controlled appropriately depending on whether a selected workpiece region is to be ground as a concentric or an offset cylindrical region. The method allows a workpiece having both concentric and offset cylindrical regions thereon to be ground using a single grinding machine under computer control without demounting the workpiece from the machine. A computer controlled grinding machine is described as are programs for controlling the machine.

    摘要翻译： 描述了一种用于研磨复合工件以形成具有同心和偏心圆柱形区域的部件的方法。 该方法包括将工件安装在具有砂轮的计算机控制的研磨机中，该砂轮的前进和退出可通过输入到控制计算机中的程序控制，将磨料控制程序加载到计算机中，相对地定位砂轮和工件 使车轮与工件的第一选定区域对准，使砂轮朝向选定区域前进，以磨削其表面，控制磨砂，以保持砂轮与工件之间的研磨接触，以便研磨 在其上的同心圆柱形区域或其上的偏移圆柱形区域，关于工件的每个选定区域的信息被存储在计算机中并且适当地寻址，使得可以根据所选择的工件区域是否要被磨削来适当地控制所述砂浆 作为同心或偏移的圆柱形区域。 该方法允许在计算机控制下，使用单个研磨机在其上同时具有偏心圆柱形区域的工件进行研磨，而不将工件从机器上拆下。 计算机控制的研磨机被描述为用于控制机器的程序。

    Manufacturing process control
    6.
    发明授权
    Manufacturing process control 失效
    制造过程控制

    公开(公告)号：US4719586A

    公开(公告)日：1988-01-12

    申请号：US794077

    申请日：1985-11-01

    申请人： John A. Moyer ,  Jeffery W. Duguid

    发明人： John A. Moyer ,  Jeffery W. Duguid

    IPC分类号： G05B19/416 ,  G07C3/14 ,  G06F15/20 ,  G06G7/48

    CPC分类号： G05B19/4166 ,  G07C3/14 ,  G05B2219/37345 ,  G05B2219/37525 ,  G05B2219/37536 ,  G05B2219/37576 ,  G05B2219/50063

    摘要： A process control is provided for continuously monitoring and adjusting an apparatus for manufacturing discrete workpieces. The system measures a current workpiece by taking fifteen readings and deleting the highest five and lowest five readings and averaging the center five readings. This value is then used for sorting the workpiece in accordance with preset tolerance limits. The measured average value is also compared with an expected value which the system has computed and stored. An adjustment value is then calculated based on a comparison of the measured dimension of the current workpiece and a measured dimension of the last-produced workpiece and the expected value for the current workpiece. The apparatus is then adjusted in accordance with the computed adjustment value. The system also has the ability to calculate the statistical distribution of a plurality of previously produced workpieces and to adjust the apparatus in accordance with a comparison of the dimension of the current workpiece with the three sigma limits of the distribution. Furthermore, the system has the capability of calculating a statistical distribution and printing out this data as well as performing a capability study.

    摘要翻译： 提供了用于连续地监视和调整用于制造离散工件的装置的过程控制。 该系统通过读取十五个读数并删除最高五个和最低五个读数并平均中心五个读数来测量当前工件。 然后，该值用于根据预设公差极限对工件进行分选。 测量的平均值也与系统计算和存储的预期值进行比较。 然后基于当前工件的测量尺寸与最后生产的工件的测量尺寸与当前工件的预期值的比较来计算调整值。 然后根据计算的调整值来调整该装置。 该系统还具有计算多个先前生产的工件的统计分布的能力，并且根据当前工件的尺寸与分布的三个西格玛限制的比较来调整装置。 此外，该系统具有统计分布的计算能力，打印出这些数据以及进行能力研究。

    Feed control apparatus having a gauging device for a numerically controlled machine tool
    9.
    发明授权
    Feed control apparatus having a gauging device for a numerically controlled machine tool 失效
    具有数控机床的测量装置的进给控制装置

    公开(公告)号：US3748562A

    公开(公告)日：1973-07-24

    申请号：US3748562D

    申请日：1970-07-18

    申请人： TOYODA MACHINE WORKS LTD

    发明人： TAKEGAWA H ,  SEKI S

    IPC分类号： B24B49/02 ,  B24B49/10 ,  G05B19/416 ,  G05B19/24

    CPC分类号： G05B19/4166 ,  B24B49/10 ,  G05B2219/37207 ,  G05B2219/37345 ,  G05B2219/43152 ,  G05B2219/45161 ,  G05B2219/49394 ,  G05B2219/50048

    摘要： In a numerically controlled machine tool a feed control apparatus is provided which includes a gauging means for controlling the movement of a movable component, such as a wheel head or a work table, of the machine tool. Control means are coupled to a numerical control means of the numerically controlled machine tool and to the gauging means. The control means will enable a shifting of the numerical control means from a numerical control mode to a jog mode for allowing a miscellaneous function to be performed and from a jog mode to a numerical control mode after a sizing signal is generated by the gauging means whereby the tool is first moved in a coarse numerical mode to a preset position, then the workpiece is gauged while the system is in the jog mode, and finally switched back to a fine numerical control for final machining with a resultant saving in the amount of numerical information required.

    摘要翻译： 在数控机床中，提供了一种进给控制装置，其包括用于控制机床的可移动部件（例如轮头或工作台）的运动的测量装置。 控制装置连接到数控机床的数控装置和测量装置。 控制装置将能够使数值控制装置从数字控制模式转移到点动模式，以允许执行辅助功能，并且在通过测量装置产生尺寸信号之后从点动模式转换到数字控制模式，由此 首先将工具以粗略数字模式移动到预设位置，然后在系统处于点动模式时测量工件，最后切换回精确的数值控制以进行最终加工，从而节省数值 所需资料

    Grinding system
    10.
    发明授权
    Grinding system 失效
    研磨系统

    公开(公告)号：US3665652A

    公开(公告)日：1972-05-30

    申请号：US3665652D

    申请日：1970-10-21

    申请人： GORDON ENG CO

    发明人： GORDON BERNARD M ,  NEUMANN LEOPOLD ,  KIRSCH IVAN H

    IPC分类号： B24B49/10 ,  G05B19/416

    CPC分类号： G05B19/4166 ,  B24B49/10 ,  G05B2219/37345 ,  G05B2219/37536 ,  G05B2219/45161

    摘要： A grinder having a workpiece mounted thereon is operatively connected to a tracking analog to digital converter via a sensor unit. The analog to digital converter comprises a summing amplifier, a forward/backward counter, a gating control, and a digital to analog converter and defines a closed loop configuration. Signals at the output of the summing amplifier are applied to a peak detector which generates a signal representing the degree of out of round of the workpiece. Counting pulses generated by the counter are applied to a reset-delay via the gating control for generation of a signal indicating the rate of removal of material from the workpiece. Pulses representing the state of the counter are applied to a limit circuit which generates signals representing the amount of material removed from the workpiece.

    摘要翻译： 具有安装在其上的工件的研磨机经由传感器单元可操作地连接到跟踪模数转换器。 模数转换器包括加法放大器，前向/后向计数器，门控控制器和数模转换器，并且定义闭环配置。 在加法放大器的输出处的信号被施加到峰值检测器，峰值检测器产生表示工件的圆的程度的信号。 由计数器产生的计数脉冲经由门控控制器施加到复位延迟，用于产生指示从工件移除材料的速率的信号。 表示计数器状态的脉冲被应用于产生表示从工件移除的材料量的信号的限制电路。