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公开(公告)号：US09898000B2
公开(公告)日：2018-02-20
申请号：US14400796
申请日：2013-01-30
发明人： Sastra Budiman , Yong Peng Leow , Mun Hoon Ng
IPC分类号： G06F19/00 , G05B19/418 , H01L21/68 , G03F7/20
CPC分类号： G05B19/418 , G03F7/70758 , G05B2219/45031 , G05B2219/45032 , G05B2219/49276 , H01L21/68
摘要： A positioning system having a flat base comprising (i) a X-axis assembly having a X-axis linear actuator means arranged orthogonal to the Y-axis; (ii) a Y-axis assembly having a pair of Y-axis linear actuator means mounted onto the flat base forming a H-configuration; (iii) a Z-axis assembly having an aerostatic bearing mechanism that floats on thin film of externally pressurized air on top of the flat base; and a θ-axis actuator anchored from the X-axis to drive the Z-axis assembly which carries a workpiece, wherein the Z-axis assembly is rotated with the rotary axis for the θ-axis perpendicular to the flat base.
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2.发明申请公开(公告)号：US20170083009A1
公开(公告)日：2017-03-23
申请号：US14919720
申请日：2015-10-21
发明人： Naiqi Wu , Fajun Yang , Yan Qiao , Mengchu Zhou
IPC分类号： G05B19/418
CPC分类号： G05B19/4187 , G05B2219/31429 , G05B2219/45032 , Y02P90/205 , Y10S901/02 , Y10S901/41
摘要： Since single and dual-arm tools behave differently, it is difficult to coordinate their activities in a hybrid multi-cluster tool that is composed of both single- and dual-arm tools. Aiming at finding an optimal one-wafer cyclic schedule for a treelike hybrid multi-cluster tool whose bottleneck tool is process-bound, the present work extends a resource-oriented Petri net to model such system. By the developed Petri net model, to find a one-wafer cyclic schedule is to determine robot waiting times. By doing so, it is shown that, for any treelike hybrid multi-cluster tool whose bottleneck tool is process-bound, there is always a one-wafer cyclic schedule. Then, computationally efficient algorithms are developed to obtain the minimal cycle time and the optimal one-wafer cyclic schedule. Examples are given to illustrate the developed method.
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3.发明授权公开(公告)号：US09396443B2
公开(公告)日：2016-07-19
申请号：US14097907
申请日：2013-12-05
IPC分类号： G06F17/00 , G06N5/02 , G06N99/00 , G05B19/418
CPC分类号： G06N99/005 , G05B19/41885 , G05B2219/31464 , G05B2219/32017 , G05B2219/45032 , Y02P90/14 , Y02P90/22 , Y02P90/26 , Y02P90/86
摘要： A system and method for learning and/or optimizing processes related to semiconductor manufacturing is provided. A learning component generates a set of candidate process models based on process data associated with one or more fabrication tools. The learning component also selects a particular process model from the set of candidate process models that is associated with lowest error. An optimization component generates a set of candidate solutions associated with the particular process model. The optimization component also selects a particular solution from the set of candidate solutions based on a target output value and an output value associated with the particular solution.
摘要翻译： 提供了一种用于学习和/或优化与半导体制造有关的过程的系统和方法。 学习组件基于与一个或多个制造工具相关联的过程数据生成一组候选过程模型。 学习组件还从与最低错误相关联的候选过程模型集中选择特定过程模型。 优化组件生成与特定过程模型相关联的一组候选解。 优化组件还基于与特定解决方案相关联的目标输出值和输出值从候选解决方案集中选择特定解决方案。
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4.发明申请公开(公告)号：US20150332167A1
公开(公告)日：2015-11-19
申请号：US14276349
申请日：2014-05-13
IPC分类号： G06N99/00 , G05B19/418
CPC分类号： G06N20/00 , G05B19/418 , G05B2219/45032 , G06F17/5009 , Y02P90/14 , Y02P90/26 , Y02P90/86
摘要： Systems and techniques for modeling and/or analyzing manufacturing processes are presented. A dataset component generates a plurality of binary classification datasets based on process data associated with one or more fabrication tools. A learning component generates a plurality of learned models based on the plurality of binary classification datasets and applies a weight to the plurality of learned models based on a number of data samples associated with the plurality of binary classification datasets to generate a weighted plurality of learned models. A merging component merges the weighted plurality of learned models to generate a process model for the process data.
摘要翻译： 介绍了制造过程建模和/或分析的系统和技术。 数据集组件基于与一个或多个制造工具相关联的过程数据生成多个二进制分类数据集。 学习组件基于多个二进制分类数据集生成多个学习模型，并且基于与多个二进制分类数据集相关联的数据样本的数量向多个学习模型应用权重，以产生加权的多个学习模型 。 合并组件合并加权的多个学习模型以生成过程数据的过程模型。
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公开(公告)号：US20150142161A1
公开(公告)日：2015-05-21
申请号：US14542821
申请日：2014-11-17
申请人： Futrfab Inc.
发明人： Frederick A. Flitsch
IPC分类号： G05B19/418
CPC分类号： G05B19/41845 , G05B2219/31338 , G05B2219/45032 , Y02P90/16 , Y02P90/265 , Y02P90/28
摘要： The present invention provides apparatus for a mobile cleanspace fabrication facility. Various methods relating to moving a mobile cleanspace fabrication facility and to the locations that a mobile cleanspace fabrication facility may be moved to are discussed.
摘要翻译： 本发明提供一种移动清洁空间制造设备的装置。 讨论了关于移动移动清洁空间制造设施以及移动清洁空间制造设施可能被移动到的位置的各种方法。
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6.发明授权Clustering for prediction models in process control and for optimal dispatching 有权用于过程控制和最优调度的预测模型的聚类公开(公告)号：US09037279B2
公开(公告)日：2015-05-19
申请号：US12831597
申请日：2010-07-07
申请人： Francis Ko , Tzu-yu Wang , Kewei Zuo , Henry Lo , Jean Wang , Chih-Wei Lai
发明人： Francis Ko , Tzu-yu Wang , Kewei Zuo , Henry Lo , Jean Wang , Chih-Wei Lai
CPC分类号： G05B19/41885 , G05B17/02 , G05B2219/45032
摘要： A first embodiment is a method for semiconductor process control comprising clustering processing tools of a processing stage into a tool cluster based on processing data and forming a prediction model for processing a semiconductor wafer based on the tool cluster. A second embodiment is a method for semiconductor process control comprising providing cluster routes between first stage tool clusters and second stage tool clusters, assigning a comparative optimization ranking to each cluster route, and scheduling processing of wafers. The comparative optimization ranking identifies comparatively which cluster routes provide for high wafer processing uniformity. Further, wafers that require high wafer processing uniformity are scheduled to be processed along one cluster route that has a high comparative optimization ranking that identifies the one cluster route to have a highest wafer processing uniformity, and wafers that do not require high wafer processing uniformity are scheduled to be processed along another cluster route.
摘要翻译： 第一实施例是一种用于半导体处理控制的方法，其包括基于处理数据将处理级的处理工具集群到工具集群中，并且基于工具集群形成用于处理半导体晶片的预测模型。 第二实施例是一种用于半导体处理控制的方法，包括提供第一级工具集群和第二级工具集群之间的集群路由，为每个集群路由分配比较优化等级，以及调度晶片的处理。 比较优化排名确定了哪些集群路由提供高晶圆处理均匀性。 此外，需要高晶圆处理均匀性的晶片被调度为沿着具有高比较优化等级的一个集群路由进行处理，该优先等级标识一个集群路由以具有最高的晶片处理均匀性，并且不需要高晶片处理均匀性的晶片是 计划沿着另一个集群路由处理。
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公开(公告)号：US20150127133A1
公开(公告)日：2015-05-07
申请号：US14400796
申请日：2013-01-30
发明人： Sastra Budiman , Yong Peng Leow , Mun Hoon Ng
IPC分类号： G05B19/418
CPC分类号： G05B19/418 , G03F7/70758 , G05B2219/45031 , G05B2219/45032 , G05B2219/49276 , H01L21/68
摘要： A positioning system having a flat base comprising (i) a X-axis assembly having a X-axis linear actuator means arranged orthogonal to the Y-axis; (ii) a Y-axis assembly having a pair of Y-axis linear actuator means mounted onto the flat base forming a H-configuration; (iii) a Z-axis assembly having an aerostatic bearing mechanism that floats on thin film of externally pressurized air on top of the flat base; and a θ-axis actuator anchored from the X-axis to drive the Z-axis assembly which carries a workpiece, wherein the Z-axis assembly is rotated with the rotary axis for the θ-axis perpendicular to the flat base.
摘要翻译： 一种具有平坦基座的定位系统，包括：（i）具有与所述Y轴正交布置的X轴线性致动器装置的X轴组件; （ii）Y轴组件，其具有安装在形成H形构造的平底上的一对Y轴线性致动器装置; （iii）具有空气静力轴承机构的Z轴组件，该空气静力轴承机构浮在平底座顶部上的外部加压空气的薄膜上; 以及从X轴锚固的驱动轴驱动装载工件的Z轴组件的轴承致动器，其中Z轴组件与旋转轴线一起旋转，垂直于平底。
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公开(公告)号：US08812151B2
公开(公告)日：2014-08-19
申请号：US13479518
申请日：2012-05-24
申请人： Teruo Nakata , Keita Nogi , Satomi Inoue , Michinori Kawaguchi
发明人： Teruo Nakata , Keita Nogi , Satomi Inoue , Michinori Kawaguchi
CPC分类号： G05B19/41865 , G05B2219/45032 , H01L21/67276 , Y02P90/18 , Y02P90/20
摘要： An efficient method of controlling transportation in a linear tool type vacuum process device in a state that a length of time required for a process is not stable. For each process chamber, the number of unprocessed wafers that are in process or are being transported to the process chamber is counted, and in deciding a transport destination of a wafer, when the number of unprocessed wafers is equal to or larger than a charge limit amount, a transport destination of a wafer is decided excluding the process chamber. Also, a wafer holding mechanism on a transport path to a process chamber is reserved, and a transport destination of a processed member to be transported next is decided according to a status of reservation.
摘要翻译： 一种在线性工具式真空处理装置中控制运输的有效方法，其处理过程所需的时间长度不稳定。 对于每个处理室，计数正在处理或正在运送到处理室的未处理晶片的数量，并且在确定晶片的传送目的地时，当未处理的晶片的数量等于或大于充电极限 除了处理室之外，决定晶片的传送目的地。 此外，保留了到处理室的传送路径上的晶片保持机构，并且根据预约状态来决定随后要传送的被处理部件的传送目的地。
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公开(公告)号：US08788087B2
公开(公告)日：2014-07-22
申请号：US13003081
申请日：2008-07-10
IPC分类号： G06F7/00
CPC分类号： H01L21/68707 , B25J9/1692 , G05B19/401 , G05B2219/39516 , G05B2219/40562 , G05B2219/45032 , G05B2219/45057 , H01L21/67265
摘要： A robot arm having a distal end to which a wrist axis is rotatably provided; arm drive unit, each configured to move the robot arm; a wrist axis drive unit configured to rotate the wrist axis; and a robot control unit configured to control the arm drive unit and wrist axis drive unit. The robot control unit is configured to control the arm drive unit to move the distal end of the robot arm to bring a contact member attached to the wrist axis into contact with an instruction target, thereby detecting a posture of the robot arm and an angular position of the wrist axis when the wrist axis begins to be angularly displaced due to the contact between the contact member and the instruction target, thus determining a position of an instruction point.
摘要翻译： 一种机器人臂，具有可旋转地设置有腕轴的远端; 手臂驱动单元，每个配置为移动机器人手臂; 构造成旋转腕轴的腕轴驱动单元; 以及机器人控制单元，被配置为控制所述臂驱动单元和所述腕轴驱动单元。 机器人控制单元被配置为控制臂驱动单元移动机器人臂的远端以使附接到腕轴的接触构件与指示目标接触，从而检测机器人手臂的姿势和角位置 当腕轴由于接触构件和指示目标之间的接触而开始成角度位移时，从而确定指示点的位置。
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公开(公告)号：US20110118873A1
公开(公告)日：2011-05-19
申请号：US13003081
申请日：2008-07-10
IPC分类号： B25J9/02
CPC分类号： H01L21/68707 , B25J9/1692 , G05B19/401 , G05B2219/39516 , G05B2219/40562 , G05B2219/45032 , G05B2219/45057 , H01L21/67265
摘要： A robot arm having a distal end to which a wrist axis is rotatably provided; arm drive unit, each configured to move the robot arm; a wrist axis drive unit configured to rotate the wrist axis; and a robot control unit configured to control the arm drive unit and wrist axis drive unit. The robot control unit is configured to control the arm drive unit to move the distal end of the robot arm to bring a contact member attached to the wrist axis into contact with an instruction target, thereby detecting a posture of the robot arm and an angular position of the wrist axis when the wrist axis begins to be angularly displaced due to the contact between the contact member and the instruction target, thus determining a position of an instruction point.
摘要翻译： 一种机器人臂，具有可旋转地设置有腕轴的远端; 手臂驱动单元，每个配置为移动机器人手臂; 构造成旋转腕轴的腕轴驱动单元; 以及机器人控制单元，被配置为控制所述臂驱动单元和所述腕轴驱动单元。 机器人控制单元被配置为控制臂驱动单元移动机器人臂的远端以使附接到腕轴的接触构件与指示目标接触，从而检测机器人手臂的姿势和角位置 当腕轴由于接触构件和指示目标之间的接触而开始成角度位移时，从而确定指示点的位置。
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