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公开(公告)号：US09898000B2
公开(公告)日：2018-02-20
申请号：US14400796
申请日：2013-01-30
发明人： Sastra Budiman , Yong Peng Leow , Mun Hoon Ng
IPC分类号： G06F19/00 , G05B19/418 , H01L21/68 , G03F7/20
CPC分类号： G05B19/418 , G03F7/70758 , G05B2219/45031 , G05B2219/45032 , G05B2219/49276 , H01L21/68
摘要： A positioning system having a flat base comprising (i) a X-axis assembly having a X-axis linear actuator means arranged orthogonal to the Y-axis; (ii) a Y-axis assembly having a pair of Y-axis linear actuator means mounted onto the flat base forming a H-configuration; (iii) a Z-axis assembly having an aerostatic bearing mechanism that floats on thin film of externally pressurized air on top of the flat base; and a θ-axis actuator anchored from the X-axis to drive the Z-axis assembly which carries a workpiece, wherein the Z-axis assembly is rotated with the rotary axis for the θ-axis perpendicular to the flat base.
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公开(公告)号：US20150127133A1
公开(公告)日：2015-05-07
申请号：US14400796
申请日：2013-01-30
发明人： Sastra Budiman , Yong Peng Leow , Mun Hoon Ng
IPC分类号： G05B19/418
CPC分类号： G05B19/418 , G03F7/70758 , G05B2219/45031 , G05B2219/45032 , G05B2219/49276 , H01L21/68
摘要： A positioning system having a flat base comprising (i) a X-axis assembly having a X-axis linear actuator means arranged orthogonal to the Y-axis; (ii) a Y-axis assembly having a pair of Y-axis linear actuator means mounted onto the flat base forming a H-configuration; (iii) a Z-axis assembly having an aerostatic bearing mechanism that floats on thin film of externally pressurized air on top of the flat base; and a θ-axis actuator anchored from the X-axis to drive the Z-axis assembly which carries a workpiece, wherein the Z-axis assembly is rotated with the rotary axis for the θ-axis perpendicular to the flat base.
摘要翻译： 一种具有平坦基座的定位系统，包括：（i）具有与所述Y轴正交布置的X轴线性致动器装置的X轴组件; （ii）Y轴组件，其具有安装在形成H形构造的平底上的一对Y轴线性致动器装置; （iii）具有空气静力轴承机构的Z轴组件，该空气静力轴承机构浮在平底座顶部上的外部加压空气的薄膜上; 以及从X轴锚固的驱动轴驱动装载工件的Z轴组件的轴承致动器，其中Z轴组件与旋转轴线一起旋转，垂直于平底。
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