-
公开(公告)号：US08788087B2
公开(公告)日：2014-07-22
申请号：US13003081
申请日：2008-07-10
IPC分类号： G06F7/00
CPC分类号： H01L21/68707 , B25J9/1692 , G05B19/401 , G05B2219/39516 , G05B2219/40562 , G05B2219/45032 , G05B2219/45057 , H01L21/67265
摘要： A robot arm having a distal end to which a wrist axis is rotatably provided; arm drive unit, each configured to move the robot arm; a wrist axis drive unit configured to rotate the wrist axis; and a robot control unit configured to control the arm drive unit and wrist axis drive unit. The robot control unit is configured to control the arm drive unit to move the distal end of the robot arm to bring a contact member attached to the wrist axis into contact with an instruction target, thereby detecting a posture of the robot arm and an angular position of the wrist axis when the wrist axis begins to be angularly displaced due to the contact between the contact member and the instruction target, thus determining a position of an instruction point.
摘要翻译： 一种机器人臂，具有可旋转地设置有腕轴的远端; 手臂驱动单元，每个配置为移动机器人手臂; 构造成旋转腕轴的腕轴驱动单元; 以及机器人控制单元，被配置为控制所述臂驱动单元和所述腕轴驱动单元。 机器人控制单元被配置为控制臂驱动单元移动机器人臂的远端以使附接到腕轴的接触构件与指示目标接触，从而检测机器人手臂的姿势和角位置 当腕轴由于接触构件和指示目标之间的接触而开始成角度位移时，从而确定指示点的位置。
-
公开(公告)号：US20110118873A1
公开(公告)日：2011-05-19
申请号：US13003081
申请日：2008-07-10
IPC分类号： B25J9/02
CPC分类号： H01L21/68707 , B25J9/1692 , G05B19/401 , G05B2219/39516 , G05B2219/40562 , G05B2219/45032 , G05B2219/45057 , H01L21/67265
摘要： A robot arm having a distal end to which a wrist axis is rotatably provided; arm drive unit, each configured to move the robot arm; a wrist axis drive unit configured to rotate the wrist axis; and a robot control unit configured to control the arm drive unit and wrist axis drive unit. The robot control unit is configured to control the arm drive unit to move the distal end of the robot arm to bring a contact member attached to the wrist axis into contact with an instruction target, thereby detecting a posture of the robot arm and an angular position of the wrist axis when the wrist axis begins to be angularly displaced due to the contact between the contact member and the instruction target, thus determining a position of an instruction point.
摘要翻译： 一种机器人臂，具有可旋转地设置有腕轴的远端; 手臂驱动单元，每个配置为移动机器人手臂; 构造成旋转腕轴的腕轴驱动单元; 以及机器人控制单元，被配置为控制所述臂驱动单元和所述腕轴驱动单元。 机器人控制单元被配置为控制臂驱动单元移动机器人臂的远端以使附接到腕轴的接触构件与指示目标接触，从而检测机器人手臂的姿势和角位置 当腕轴由于接触构件和指示目标之间的接触而开始成角度位移时，从而确定指示点的位置。
-
公开(公告)号：US08121732B2
公开(公告)日：2012-02-21
申请号：US12232441
申请日：2008-09-17
IPC分类号： G05B19/00
CPC分类号： H01L21/67778 , B25J9/1692 , G05B2219/37411 , G05B2219/39013 , G05B2219/39041 , G05B2219/39413 , H01L21/67259 , H01L21/67766 , H01L21/68
摘要： A target position detection apparatus for a robot includes: a robot including an arm configured to be freely moved in at least two directions of X and Y axes, the arm having a wrist axis provided at a distal end of the arm and configured to be freely moved in a horizontal direction, and the wrist axis being provided with an end effector; and a control unit adapted for driving a memory to store a teaching point therein and controlling an operation of the robot such that the end effector will be moved toward the teaching point stored in the memory. The control unit is further adapted for changing a pressing force of the end effector against a target by changing a control loop gain, and bringing the end effector into contact with the target, while setting the control loop gain of the wrist axis lower than a predetermined value at least from a position adjacent to the teaching point at which the target is located, so as to capture a position in a state in which the end effector is in contact with the target, thereby detecting the position of the target.
摘要翻译： 一种用于机器人的目标位置检测装置，包括：机器人，其包括构造成能够在X轴和Y轴的至少两个方向上自由移动的臂，所述臂具有设置在所述臂的前端的手腕轴， 沿水平方向移动，腕轴设置有端部执行器; 以及控制单元，适于驱动存储器以存储其中的教导点，并且控制机器人的操作，使得末端执行器将朝向存储在存储器中的教学点移动。 控制单元还适于通过改变控制环增益来改变端部执行器对目标的按压力，并且使端部执行器与目标接触，同时将手腕轴的控制环增益设置为低于预定值 至少从与目标所在的教导点相邻的位置获得值，以便捕获末端执行器与目标物接触的状态下的位置，从而检测目标的位置。
-
公开(公告)号：US20090093908A1
公开(公告)日：2009-04-09
申请号：US12232441
申请日：2008-09-17
IPC分类号： G05B19/408 , G06F19/00
CPC分类号： H01L21/67778 , B25J9/1692 , G05B2219/37411 , G05B2219/39013 , G05B2219/39041 , G05B2219/39413 , H01L21/67259 , H01L21/67766 , H01L21/68
摘要： A target position detection apparatus for a robot includes: a robot including an arm configured to be freely moved in at least two directions of X and Y axes, the arm having a wrist axis provided at a distal end of the arm and configured to be freely moved in a horizontal direction, and the wrist axis being provided with an end effector; and a control unit adapted for driving a memory to store a teaching point therein and controlling an operation of the robot such that the end effector will be moved toward the teaching point stored in the memory. The control unit is further adapted for changing a pressing force of the end effector against a target by changing a control loop gain, and bringing the end effector into contact with the target, while setting the control loop gain of the wrist axis lower than a predetermined value at least from a position adjacent to the teaching point at which the target is located, so as to capture a position in a state in which the end effector is in contact with the target, thereby detecting the position of the target.
摘要翻译： 一种用于机器人的目标位置检测装置，包括：机器人，其包括构造成能够在X轴和Y轴的至少两个方向上自由移动的臂，所述臂具有设置在所述臂的前端的手腕轴， 沿水平方向移动，腕轴设置有端部执行器; 以及控制单元，适于驱动存储器以存储其中的教导点，并且控制机器人的操作，使得末端执行器将朝向存储在存储器中的教学点移动。 控制单元还适于通过改变控制环增益来改变端部执行器对目标的按压力，并且使端部执行器与目标接触，同时将手腕轴的控制环增益设置为低于预定值 至少从与目标所在的教导点相邻的位置获得值，以便捕获末端执行器与目标物接触的状态下的位置，从而检测目标的位置。
-
公开(公告)号：US20110166704A1
公开(公告)日：2011-07-07
申请号：US13062426
申请日：2008-09-30
申请人： Yasuhiko Hashimoto
发明人： Yasuhiko Hashimoto
CPC分类号： B25J15/0616 , B25J13/087 , B25J15/0052 , B25J19/0095 , B65G47/917 , B65G47/918 , B66C1/0218 , B66C1/0243
摘要： The invention is a monitoring apparatus for monitoring a condition of an end-effector of a robot having a vacuum absorption pad to hold an article. The pad is elastically supported by the end-effector. The apparatus includes a pad receiving part having a front surface and a through hole, the pad receiving part being movable in a direction perpendicular to the front surface; an elastically supporting unit for elastically supporting the pad receiving part in a direction perpendicular to the front surface; a movement detection unit for detecting a movement of the pad receiving part; a vacuum sensor connected to the through hole; and a judging unit for judging conditions of an elastic support of the pad and a vacuum absorption of the pad based on detection results of the movement detection unit and the vacuum sensor.
摘要翻译： 本发明是一种监测装置，用于监测具有真空吸附垫的机器人的末端执行器的状态以保持物品。 该垫由末端执行器弹性支撑。 该装置包括具有前表面和通孔的焊盘接收部分，该焊盘接收部分可在垂直于前表面的方向上移动; 弹性支撑单元，用于沿垂直于所述前表面的方向弹性地支撑所述垫接收部; 移动检测单元，用于检测所述垫接收部的移动; 连接到通孔的真空传感器; 以及判断单元，用于基于移动检测单元和真空传感器的检测结果来判断垫的弹性支撑的状态和垫的真空吸收。
-
公开(公告)号：US20070286711A1
公开(公告)日：2007-12-13
申请号：US11808358
申请日：2007-06-08
IPC分类号： H01L21/677
CPC分类号： H01L21/67772 , H01L21/67766 , H01L21/67775
摘要： In the present invention, a base 43 of a robot 27 is fixed to a fixing portion 53 of a frame divided body 50. The base 43 allows force exerted from a robot main body 27A to be transmitted to the fixing portion 53 of the frame divided body 50. Contrary, the fixing portion 53 of the frame divided body 50 has rigidity which can prevent the force exerted from the base 43 of the robot 27 from being transmitted to a main body constituting member 51. Accordingly, the base 43 of the robot 27 has only to possess a function for connecting the robot main body 27A and the frame divided body 50. Therefore, even though reducing its rigidity, transmission of vibration to the wafer processing apparatus can be prevented, as well as occurrence of malfunctioning in the substrate processing work can be prevented. In addition, increasing the rigidity of the frame divided body 50 can be achieved easier with a simpler construction and more effective than increasing the rigidity of the robot. Accordingly, more secured wafer processing can be provided.
摘要翻译： 在本发明中，机器人27的基座43固定在框架分割体50的固定部53上。 底座43允许从机器人主体部件27A施加的力传递到框架分割体50的固定部分53。 相反，框架分割体50的固定部分53具有能够防止从机器人27的基座43施加的力传递到主体构成构件51的刚性。 因此，机器人27的基座43仅具有连接机器人主体部27A和框架分割体50的功能。 因此，即使降低其刚性，也能够防止向晶片加工装置的振动传递，并且能够防止基板处理作业发生故障。 此外，通过更简单的构造可以更容易地实现框架分割体50的刚性的提高，并且比增加机器人的刚性更有效。 因此，可以提供更加牢固的晶片处理。
-
公开(公告)号：US5357824A
公开(公告)日：1994-10-25
申请号：US972085
申请日：1992-11-05
申请人： Yasuhiko Hashimoto
发明人： Yasuhiko Hashimoto
CPC分类号： B25J9/047 , B25J9/1035 , B25J9/1065 , Y10S414/13 , Y10T74/20317
摘要： The industrial robot comprises two lower arms arranged parallel to each other and pivotably supported on a lower base member; an upper base member pivotably mounted on upper ends of these two lower arms, respectively so as to form a parallelogram together with the two lower arms; at least one first driving source for driving the parallelogrammic link; an upper arm pivotably supported on one side of the upper base member so as not to interfere with the parallelogrammic link and driven by a second driving source. Since the upper arm can be moved horizontally by inclination motion of the parallelogrammic link mechanism and further the upper arm is pivoted on one side of the upper base, the upper arm can be moved frontward, rearward and upward without any interference with the lower arms. Further, since a moment of the lower arm generated when a load is applied to the wrist of the upper arm is not subjected to the influence of the length and pivotal angle of the upper arm, the motor torque and reduction gear capacity for driving the lower arms can be reduced markedly.
摘要翻译： 工业机器人包括彼此平行布置并可枢转地支撑在下基部构件上的两个下臂; 分别可旋转地安装在这两个下臂的上端的上基部件，以便与两个下臂一起形成平行四边形; 至少一个驱动平行四边形连杆的第一驱动源; 上臂可枢转地支撑在所述上基座的一侧上，以便不与所述平行四边形连杆相干并由第二驱动源驱动。 由于上臂可以通过平行四边形连杆机构的倾斜运动水平移动，并且上臂在上基座的一侧枢转，所以上臂可以向前，向后和向上移动，而不会与下臂干涉。 此外，由于当负载施加到上臂的腕部时产生的下臂的力矩不受上臂的长度和枢转角度的影响，所以用于驱动下臂的电机扭矩和减速齿轮容量 武器可以显着减少。
-
公开(公告)号：US4538425A
公开(公告)日：1985-09-03
申请号：US546463
申请日：1983-10-28
申请人： Kenji Ohishi , Yasuhiko Hashimoto
发明人： Kenji Ohishi , Yasuhiko Hashimoto
CPC分类号： F24F1/027 , F24F13/224 , F25B39/04 , F24F2013/225
摘要： An integral type air conditioning device has a refrigerator in a room interior side which is defined by a partition plate. Drain water condensed by the refrigerator is led to a room exterior side of the air conditioning device to be splashed onto a condenser for evaporation by a slinger ring formed integrally with a propeller fan. There are provided in the air conditioning device a fan cover to form a room exterior air course with said condenser and said propeller fan arranged on a base member and inhibiting means formed integrally with, or attach to, said fan cover to prevent drain water drops splashed by said slinger ring from dropping onto said propeller fan.
摘要翻译： 一体型空调装置在室内由冷藏室隔开一个隔板限定。 通过冰箱冷凝的排水被引导到空调装置的室外侧，通过与螺旋桨式风扇整体形成的抛油环一起溅到冷凝器上进行蒸发。 在空调装置中设置有风扇盖，以形成室外空气路径，其中所述冷凝器和所述螺旋桨风扇布置在基座构件上，并且与所述风扇罩一体地或附接到所述风扇盖上的防止装置以防止漏水滴溅 通过所述抛油环落在所述螺旋桨式风扇上。
-
公开(公告)号：US08555744B2
公开(公告)日：2013-10-15
申请号：US10586789
申请日：2005-01-21
申请人： Yasuo Hirooka , Yasuhiko Hashimoto
发明人： Yasuo Hirooka , Yasuhiko Hashimoto
CPC分类号： F16H57/12 , B25J9/103 , F16H1/06 , F16H57/022 , F16H57/023 , F16H2057/0222 , F16H2057/125 , Y10T74/19502 , Y10T74/19623 , Y10T74/19628 , Y10T74/19647 , Y10T74/19898 , Y10T74/20305
摘要： The present gear mechanism includes a base body member, a first gear supported on the base body member so as to rotate about a first rotational axis, a second gear capable of being meshed with the first gear, a support member supporting the second gear so as to rotate about a second rotational axis and placed on the base body member so as to be movable in approaching and leaving directions respectively toward and away from the first rotational axis, and a retaining member engaged in a threaded hole formed in the base body member and capable of being turned so as to move in the approaching and leaving directions, and directly or indirectly engaged with the support member to restrain the support member from moving in the leaving direction away from the first rotational axis.
摘要翻译： 本齿轮机构包括基体构件，支撑在基体构件上以围绕第一旋转轴线旋转的第一齿轮，能够与第一齿轮啮合的第二齿轮，支撑第二齿轮的支撑构件， 围绕第二旋转轴线旋转并且放置在基体本体构件上，使得能够分别朝向和远离第一旋转轴线接近和离开方向移动;以及保持构件，其接合在形成在基体构件中的螺纹孔中， 能够被转动以在接近和离开方向上移动，并且直接或间接地与支撑构件接合以限制支撑构件在离开方向上离开第一旋转轴线移动。
-
公开(公告)号：US20110218663A1
公开(公告)日：2011-09-08
申请号：US13124777
申请日：2008-10-22
申请人： Yasuhiko Hashimoto
发明人： Yasuhiko Hashimoto
IPC分类号： G05D3/12
CPC分类号： H01L21/681 , H01L21/67748 , H01L21/68 , H01L21/68707 , H01L21/68742
摘要： The apparatus includes a rotary mechanism for holding a semiconductor wafer and rotating the same, a detection mechanism for detecting a positioning cutout portion formed in the wafer, and a wafer transfer mechanism for lifting the wafer from a wafer mounting portion of the rotary mechanism or mounting the wafer on the same. The wafer transfer mechanism has a movable holding portion for holding the wafer at a position just above the wafer mounting portion and is constituted such that the movable holding portion moves up or down while avoiding the wafer held by the rotary mechanism.
摘要翻译： 该装置包括用于保持半导体晶片并使其旋转的旋转机构，用于检测形成在晶片中的定位切口部分的检测机构和用于从旋转机构的晶片安装部分提升晶片的晶片传送机构或安装 晶片在同一个。 晶片传送机构具有用于将晶片保持在刚好在晶片安装部分上方的位置的可移动保持部分，并且构造成使得可移动保持部分在移动的同时避免由旋转机构保持的晶片而上下移动。
-
-
-
-
-
-
-
-
-
搜索结果
64 条记录 (耗时 0.018 秒)
