公开(公告)号：US20180227167A1

公开(公告)日：2018-08-09

申请号：US15427171

申请日：2017-02-08

申请人： Macau University of Science and Technology

发明人： Zhiwu Li ,  Syrine Ben Meskina ,  Mohamed Khalgui ,  Narjes Doggaz ,  Naiqi Wu

IPC分类号： H04L12/24

CPC分类号： H04L41/0613 ,  H04L41/048 ,  H04L41/0609 ,  H04L41/0654 ,  H04L41/145

摘要： A system for fault detection and recovery of a network includes a network simulation module arranged to receive component data regarding a plurality of components that form the network and simulate the network, a modelling module arranged to utilise the simulated network to model a number of faults in the network to determine the effect of the faults on the network, and a recovery module arranged to determine a solution to the fault on the network.

公开(公告)号：US10001773B2

公开(公告)日：2018-06-19

申请号：US14918577

申请日：2015-10-21

申请人： Macau University of Science and Technology

发明人： Naiqi Wu ,  Qinghua Zhu ,  Yan Qiao ,  Mengchu Zhou

IPC分类号： G05B19/41 ,  G05B19/418

CPC分类号： G05B19/4187 ,  G05B2219/45031 ,  G05B2219/50291 ,  Y02P90/205 ,  Y02P90/26

摘要： The scheduling problem of a multi-cluster tool with a tree topology whose bottleneck tool is process-bound is investigated. A method for scheduling the multi-cluster tool to thereby generate an optimal one-wafer cyclic schedule for this multi-cluster tool is provided. A Petri net (PN) model is developed for the multi-cluster tool by explicitly modeling robot waiting times such that a schedule is determined by setting the robot waiting times. Based on the PN model, sufficient and necessary conditions under which a one-wafer cyclic schedule exists are derived and it is shown that an optimal one-wafer cyclic schedule can be always found. Then, efficient algorithms are given to find the optimal cycle time and its optimal schedule. Examples are used to demonstrate the scheduling method.

公开(公告)号：US20170083010A1

公开(公告)日：2017-03-23

申请号：US14918564

申请日：2015-10-21

申请人： Macau University of Science and Technology

发明人： Naiqi Wu ,  Qinghua Zhu ,  Mengchu Zhou ,  Yan Qiao

IPC分类号： G05B19/418

CPC分类号： G05B19/41865 ,  G05B2219/34418 ,  G05B2219/45031 ,  G05B2219/50391 ,  Y10S901/02 ,  Y10S901/30

摘要： Recent trends of larger wafer and smaller lot sizes bring cluster tools with frequent lot switches. Practitioners must deal with more transient processes during such switches, including start-up and close-down processes. To obtain higher yield, it is necessary to shorten the duration of transient processes. Much prior effort was poured into the modeling and scheduling for the steady state of cluster tools. In the existing literature, no attention has been turned to optimize the close-down process for single-arm cluster tools with wafer residency constraints. This invention intends to do so by 1) developing a Petri net model to analyze their scheduling properties and 2) proposing Petri net-based methods to solve their close-down optimal scheduling problems under different workloads among their process steps. Industrial examples are used to illustrate the effectiveness and application of the proposed methods.

公开(公告)号：US09333645B1

公开(公告)日：2016-05-10

申请号：US14639960

申请日：2015-03-05

申请人： Macau University of Science and Technology

发明人： Naiqi Wu ,  Mengchu Zhou ,  Chunrong Pan ,  Yan Qiao

IPC分类号： G05D3/12 ,  B25J9/00 ,  G05B19/418 ,  G06F17/50

CPC分类号： B25J9/0087 ,  G05B19/41865 ,  G05B2219/32245 ,  G05B2219/45031 ,  G06F17/5013 ,  H01L21/67742 ,  Y02P90/20 ,  Y10S901/02 ,  Y10S901/41

摘要： A method for scheduling dual-armed cluster tools with wafer revisiting is provided. In order to speed up start-up transient processes, the present invention adopts a program evaluation and review technique for the analysis of start-up transient processes and develops optimization algorithms for their scheduling for dual-arm cluster tools. Then, their complexity is analyzed.

摘要翻译： 提供了一种使用晶片重新访问来调度双机群集工具的方法。 为了加快启动瞬态过程，本发明采用程序评估和审查技术对启动瞬态过程进行分析，并开发了用于双臂集群工具调度的优化算法。 然后分析其复杂性。

公开(公告)号：US09223307B1

公开(公告)日：2015-12-29

申请号：US14639980

申请日：2015-03-05

申请人： Macau University of Science and Technology

发明人： Naiqi Wu ,  Fajun Yang ,  Yan Qiao ,  MengChu Zhou

IPC分类号： G06F19/00 ,  G05B19/418 ,  B25J9/00 ,  G06F17/50

CPC分类号： G05B19/41865 ,  B25J9/009 ,  G05B2219/32245 ,  G05B2219/45032 ,  G06F17/5013 ,  H01L21/67745

摘要： In semiconductor manufacturing, there are wafer fabrication processes in cluster tools that need a wafer to visit some processing steps for more than once, leading to a revisiting process. Also, wafers may be subject to wafer residency time constraints. By considering atomic layer deposition (ALD) as a typical wafer revisiting process, this invention studies the challenging scheduling problem of single-arm cluster tools for the ALD process with wafer residency time constraints. By recognizing that the key to this problem is to schedule the robot tasks, the present invention presents different robot task sequencing strategies. With these strategies for different cases, the present invention performs the schedulability analysis and derives the schedulability conditions for such tools for the first time. If schedulable, the present invention proposes scheduling algorithms to obtain an optimal schedule efficiently. Illustrative examples are given to show the application of the proposed concepts and approach.

摘要翻译： 在半导体制造中，在集群工具中存在晶片制造工艺，其需要晶片多次访问一些处理步骤，导致重新审视过程。 此外，晶片可能受到晶片驻留时间限制。 通过考虑原子层沉积（ALD）作为典型的晶片再访问过程，本发明研究了具有晶圆驻留时间约束的ALD工艺的单臂簇工具的具有挑战性的调度问题。 通过认识到这个问题的关键是计划机器人任务，本发明提出了不同的机器人任务排序策略。 利用这些针对不同情况的策略，本发明首次执行可调度性分析并得出这些工具的可调度条件。 如果可调度，本发明提出调度算法以有效地获得最佳调度。 给出说明性的例子来说明所提出的概念和方法的应用。

公开(公告)号：US10101721B2

公开(公告)日：2018-10-16

申请号：US14920026

申请日：2015-10-22

申请人： Macau University of Science and Technology

发明人： Naiqi Wu ,  Fajun Yang ,  Yan Qiao ,  Mengchu Zhou

IPC分类号： G05B19/04 ,  G05B19/41 ,  G05B19/042 ,  G05B19/418

摘要： A method determines an optimized production schedule of a production line including a hybrid multi-cluster tool formed by a plurality of single-arm tools and dual-arm tools interconnected with each other. The method includes determining time for individual operations of a robotic arm and a processing module in the plurality of single-arm tools and dual-arm tools; determining robot waiting time of the single-arm tools and dual-arm tools based on the time for individual operations and different connection relationships of the plurality of single-arm tools and dual-arm tools; determining whether the optimized production schedule exists using the determined waiting time, wherein the optimized production schedule only exists if the hybrid multi-cluster tool is process-dominant where the robot activity time of the plurality of single-arm tools and dual-arm tools is substantially shorter than processing time at the processing module; and determining the optimized production schedule if the optimized production schedule exists.

公开(公告)号：US09927816B2

公开(公告)日：2018-03-27

申请号：US15153778

申请日：2016-05-13

申请人： Macau University of Science and Technology

发明人： Zhiwu Li ,  Oussama Karoui ,  Anis Koubaa ,  Mohamed Khalgui ,  Emna Guerfala ,  Eduardo Tovard ,  Naiqi Wu

IPC分类号： G05D1/02 ,  G05D1/00

CPC分类号： G05D1/0295 ,  B60K31/00 ,  B60W30/14 ,  G05D1/0027 ,  G05D1/0212 ,  G05D1/0278 ,  G05D2201/0213 ,  G08G1/22

摘要： A method for operating a follower vehicle in a vehicle platoon includes determining, during operation, whether the follower vehicle is operating in a normal state or an abnormal state based on an operation condition of a component of the follower vehicle, or a communication between the follower vehicle and a preceding vehicle in the vehicle platoon. The method further includes selecting a first control mode if the follower vehicle is in the normal state and a second control mode if the follower vehicle is in the abnormal state so as to control movement of the follower vehicle using the selected control mode. In the first control mode, the follower vehicle uses communication data received from the preceding vehicle in the vehicle platoon to control its movement. In the second control mode, the follower vehicle uses data obtained by one or more of its sensors to control its movement.

公开(公告)号：US20170279298A1

公开(公告)日：2017-09-28

申请号：US15078367

申请日：2016-03-23

申请人： Macau University of Science and Technology

发明人： Zhiwu Li ,  Zhongyuan Jiang ,  Naiqi Wu ,  Mengchu Zhou

IPC分类号： H02J9/06 ,  G01R31/40

CPC分类号： H02J9/06 ,  G01R31/40 ,  H02J3/28 ,  H02J13/001 ,  H02J2003/007 ,  Y02E60/722 ,  Y02E60/723 ,  Y02E60/76 ,  Y04S10/14 ,  Y04S10/16 ,  Y04S10/40 ,  Y04S40/22

摘要： A power transmission system includes a plurality of electrical substations and a plurality of transmission lines arranged to connect the plurality of electrical substations to form a power transmission network; and a controller system arranged to control a power transmission within the power transmission network. The controller system includes: a detection module arranged to detect an occurrence of a fault in at least one faulty electrical substation of the plurality of electrical substations; and a restoration module arranged to at least temporally maintain an output power of the at least one faulty electrical substation; and wherein at least one of the plurality of electrical substations is operable to facilitate maintaining of the output of the at least one faulty electrical substation upon the detection of the occurrence of the fault.

公开(公告)号：US20170131700A1

公开(公告)日：2017-05-11

申请号：US14942031

申请日：2015-11-16

申请人： Macau University of Science and Technology

发明人： Zhiwu Li ,  Lei Feng ,  Huimin Zhang ,  Naiqi Wu

IPC分类号： G05B19/10

摘要： A method for implementing a new reactive system and a new reactive system includes applying at least one input suitable for the new reactive system to an existing reactive system to obtain at least one output produced by the existing reactive system; comparing the at least one output with an expected output representative of an output expected to be obtained by applying the at least one input to the new reactive system; determining if the at least one output would be compatible with the expected output; and using the compatibility between the at least one output and the expected output to generate a supervisory control rule set arranged for supervisory control of the existing reactive system when used as part or whole of the new reactive system.

公开(公告)号：US20170115651A1

公开(公告)日：2017-04-27

申请号：US14920026

申请日：2015-10-22

申请人： Macau University of Science and Technology

发明人： Naiqi Wu ,  Fajun Yang ,  Yan Qiao ,  Mengchu Zhou

IPC分类号： G05B19/042 ,  G05B15/02

CPC分类号： G05B19/0426 ,  G05B19/41865 ,  G05B2219/32291 ,  G05B2219/45031 ,  Y02P90/20 ,  Y10S901/09

摘要： A method determines an optimized production schedule of a production line including a hybrid multi-cluster tool formed by a plurality of single-arm tools and dual-arm tools interconnected with each other. The method includes determining time for individual operations of a robotic arm and a processing module in the plurality of single-arm tools and dual-arm tools; determining robot waiting time of the single-arm tools and dual-arm tools based on the time for individual operations and different connection relationships of the plurality of single-arm tools and dual-arm tools; determining whether the optimized production schedule exists using the determined waiting time, wherein the optimized production schedule only exists if the hybrid multi-cluster tool is process-dominant where the robot activity time of the plurality of single-arm tools and dual-arm tools is substantially shorter than processing time at the processing module; and determining the optimized production schedule if the optimized production schedule exists.