摘要:
The invention relates to a microsystem and a method for fabricating a microsystem. The pyrotechnic microsystem (7, 1′) comprises a substrate having at least two separate electrical initiation zones, each of which provides separate electrical initiation of a pyrotechnic material deposited on the substrate. This microsystem (7, 1′) is characterized in that the same pyrotechnic material deposit (721, 721′, 13) covers both initiation zones, said deposit (721, 721′, 13) produced on the substrate having a thickness sufficiently small for the initiation of the pyrotechnic material in the initiation zone to remain localized and not propagate to the other initiation zone, but sufficient to generate a specific gas quantity.
摘要:
The present invention relates to an electrically openable microfluidic valve, which comprises: at least one plane support (12); at least one afferent microchannel (14); at least one efferent microchannel (16); said microchannels being provided in the support, so that at least one of their ends (141) and (161) opens onto the internal face (121) of said support (12), near one another; at least one deposit (18) of a heat-sensitive material laid out on the internal face (121) of the support (12); and at least one heating means (20); so that the deposit (18) of heat-sensitive material at least partly closes off the space separating the ends (141) and (161) of the microchannels (14) and (16), thus preventing the latter from communicating with one another; the increase in temperature by the heating means (20) resulting in a modification of the structure of the heat-sensitive material, thus at least partially clearing the ends of the microchannels and the space between the latter, so as to allow communication between said microchannels and to restore flow of the fluid.
摘要:
The invention relates to an electrically-opened micro fluid-valve. The inventive valve comprises: at least one planar support (12); at least one afferent microchannel (14); at least one efferent microchannel (16), said microchannels being arranged in the support (12); such that at least one of the ends (141 and 161) thereof touch the inner face (121) of the support close to one another; at least one deposit (18) of a heat-sensitive material which is disposed on the inner face (121) of the support (12); and at least one heating means (20). According to the invention, the aforementioned deposit (18) of heat-sensitive material at least partially seals the space separating the ends (141 and 161) of the microchannels (14 and 16), thereby preventing same from intercommunicating. When the temperature of the above-mentioned heating means (20) is raised, the structure of the heat-sensitive material is altered, thereby at least partially opening the ends of the microchannels an the space therebetween, in order to enable communication between said microchannels and to restore the flow of the fluid.
摘要:
The invention concerns the technical field of micro-actuators used for mechanical, chemical, electrical or thermal functions in microsystems, for microelectronic applications such as chips, or biomedical functions such as microfluidics integrating cards. The invention concerns a micro-actuator comprising a so-called main chamber, made in a solid support and containing a so-called main pyrotechnic charge, the main chamber being sealed and delimited by solid support walls and by a deformable membrane, such that the gases emitted by the combustion of the main pyrotechnic charge, enable the volume of the chamber to be increased by deforming the membrane while maintaining intact the solid walls of the main chamber. The invention is characterized in that it comprises means for evacuating the gases from the main chamber.
摘要:
The technical field of the invention is that of microactuators designed for mechanical, chemical, electrical or thermal functions in microsystems, for microelectronic applications such as chips, or biomedical applications such as cards incorporating microfluidics. The invention concerns a microactuator (1, 60) comprising a chamber (2, 63) machined in a solid support (3) and containing a pyrotechnic charge (6). Said microactuator (1, 60) is essentially characterised in that the chamber (2, 63) is partly delimited by a deformable membrane (4, 62), such that the gases emitted by combustion of the pyrotechnic charge (6) enable to increase the volume of said chamber (2, 63) by deforming said membrane (4, 62) while maintaining intact the solid walls of the chamber (2, 63).
摘要:
The microvalve comprises a mini-piston moving due to the thrust of gases given off by firing of a pyrotechnic charge and comprising an aperture designed to enable communication to be established between ends of microchannels of a microfluidic component. When the ends between which communication is to be established open out onto a face of a first planar substrate, the mini-piston is formed in a second planar substrate, adjoined to the first, and comprises a part that is mobile in translation or in rotation in the plane of the second substrate. If a transverse slot is arranged between the ends of the microchannels between which communication is to be established, the mini-piston comprises a rod designed to slide in the slot and the aperture is formed by a transverse orifice formed in the rod of the mini-piston.
摘要:
The technical field of the invention is that of microactuators designed for mechanical, chemical, electrical or thermal functions in microsystems, for microelectronic applications such as chips, or biomedical applications such as cards incorporating microfluidics. The invention concerns a microactuator comprising a chamber machined in a solid support and containing a pyrotechnic charge. Said microactuator is essentially characterised in that the chamber is partly delimited by a deformable membrane, such that the gases emitted by combustion of the pyrotechnic charge enable to increase the volume of said chamber by deforming said membrane while maintaining intact the solid walls of the chamber.
摘要:
The microvalve comprises a mini-piston moving due to the thrust of gases given off by firing of a pyrotechnic charge and comprising an aperture designed to enable communication to be established between ends of microchannels of a microfluidic component. When the ends between which communication is to be established open out onto a face of a first planar substrate, the mini-piston is formed in a second planar substrate, adjoined to the first, and comprises a part that is mobile in translation or in rotation in the plane of the second substrate. If a transverse slot is arranged between the ends of the microchannels between which communication is to be established, the mini-piston comprises a rod designed to slide in the slot and the aperture is formed by a transverse orifice formed in the rod of the mini-piston.
摘要:
The invention relates to a microsystem and a method for fabricating a microsystem. The pyrotechnic microsystem (7, 1′) comprises a substrate having at least two separate electrical initiation zones, each of which provides separate electrical initiation of a pyrotechnic material deposited on the substrate. This microsystem (7, 1′) is characterized in that the same pyrotechnic material deposit (721, 721′, 13) covers both initiation zones, said deposit (721, 721′, 13) produced on the substrate having a thickness sufficiently small for the initiation of the pyrotechnic material in the initiation zone to remain localized and not propagate to the other initiation zone, but sufficient to generate a specific gas quantity.
摘要:
The microvalve comprises a mini-piston moving due to the thrust of gases given off by firing of a pyrotechnic charge and comprising an aperture designed to enable communication to be established between ends of microchannels of a microfluidic component. When the ends between which communication is to be established open out onto a face of a first planar substrate, the mini-piston is formed in a second planar substrate, adjoined to the first, and comprises a part that is mobile in translation or in rotation in the plane of the second substrate. If a transverse slot is arranged between the ends of the microchannels between which communication is to be established, the mini-piston comprises a rod designed to slide in the slot and the aperture is formed by a transverse orifice formed in the rod of the mini-piston.