公开(公告)号：US20100055459A1

公开(公告)日：2010-03-04

申请号：US12439281

申请日：2007-08-30

Applicant: Joseph M. Desimone ,  Robert L. Henn ,  Jake Sprague

Inventor： Joseph M. Desimone ,  Robert L. Henn ,  Jake Sprague

IPC: B32B1/00 ,  B27N3/02

CPC classification number: H01B1/08 ,  B81C99/0095 ,  B81C2201/034 ,  B81C2201/038 ,  H01B1/02 ,  H01B13/00 ,  H01F1/01 ,  Y10T428/2982

Abstract: A plurality of nanoparticles, a structure assembled therefrom, a method of forming the structure, including a plurality of particles where each particle of the plurality of particles is configured with a substantially predetermined shape and a largest dimension less than about 100 micrometers, and where each particle of the plurality of particles includes an opening through the particle.

Abstract translation: 多个纳米颗粒，由其组装的结构，形成该结构的方法，包括多个颗粒，其中多个颗粒的每个颗粒被构造成具有基本上预定的形状和最小尺寸小于约100微米，并且其中每个 多个颗粒的颗粒包括穿过颗粒的开口。

公开(公告)号：US07445956B2

公开(公告)日：2008-11-04

申请号：US11287427

申请日：2005-11-28

Applicant: Wen-Chang Dong

Inventor： Wen-Chang Dong

IPC: H01L21/44 ,  H01L21/48 ,  H01L21/50

CPC classification number: B81C1/0088 ,  B81C2201/038 ,  H01L2224/16225 ,  H01L2224/48227

Abstract: A process for producing flexible MEMS thin film without a manufactured substrate applied in a MEMS manufacture specially includes a method of forming a component interface in the middle between a manufactured substrate and a MEMS thin film formed on the manufactured substrate as a basis, which component interface is so easily destroyed by an external force that the MEMS thin film produced by the mentioned process is easily separated from the manufactured substrate, and the separated MEMS thin film due to out of limitation from the manufactured substrate may be further processed in later working process to obtain a MEMS thin film with special structural features has flexibility and particularly has electrical circuits, micro structure, or MEMS components integrated and manufactured into inside or on its both sides.

Abstract translation: 用于生产柔性MEMS薄膜的方法，其中没有制造衬底应用于MEMS制造中，特别地包括在所制造的衬底和形成在所制造的衬底上的MEMS薄膜之间的中间形成部件界面的方法， 通过外力容易地破坏由所述工艺制造的MEMS薄膜容易与制造的基板分离，并且由制造的基板不受限制地分离的MEMS薄膜可以在后续工作过程中被进一步处理 获得具有特殊结构特征的MEMS薄膜具有柔性，并且特别地具有集成并制造在其内部或两侧的电路，微结构或MEMS部件。

公开(公告)号：US20240140786A1

公开(公告)日：2024-05-02

申请号：US18496823

申请日：2023-10-27

Applicant: UNM Rainforest Innovations

Inventor： Tito Busani ,  Ravi Kiran Chityala

IPC: B81C99/00

CPC classification number: B81C99/008 ,  B81C2201/038

Abstract: A low-cost, conventional release using low concentrations of HF to overcome the stiction of MEMS structure.

公开(公告)号：US09527729B2

公开(公告)日：2016-12-27

申请号：US14182659

申请日：2014-02-18

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT

Inventor： Eric Ollier

IPC: B81C1/00

CPC classification number: B81C1/00515 ,  B81C1/00206 ,  B81C1/00412 ,  B81C1/00626 ,  B81C2201/0114 ,  B81C2201/0115 ,  B81C2201/038

Abstract: Process for fabrication of a micromechanical and/or nanomechanical structure comprising the following steps, starting from an element comprising a support substrate and a sacrificial layer: a) formation of a first layer, at least part of which is porous, b) formation on the first layer of a layer made of one (or several) materials providing the mechanical properties of the structure, called the intermediate layer, c) formation on the intermediate layer of a second layer, at least part of which is porous, d) formation of said structure in the stack composed of the first layer, the intermediate layer and the second layer, e) release of said structure by at least partial removal of the sacrificial layer.

Abstract translation: 该方法包括形成第一层即硅层（6），其部分是多孔的，并且在第一层上形成层间（16）以确保结构的机械性能。 第二层形成在层间，其中第二层的一部分是多孔的。 该结构形成在第一层，层间和第二层的堆叠中，其中第一和第二层由多孔硅锗制成，并且层间由非多孔硅锗制成。 通过牺牲层（4）的部分抽出来释放结构。

公开(公告)号：US20150274516A1

公开(公告)日：2015-10-01

申请号：US14182659

申请日：2014-02-18

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT

Inventor： Eric OLLIER

IPC: B81C1/00

CPC classification number: B81C1/00515 ,  B81C1/00206 ,  B81C1/00412 ,  B81C1/00626 ,  B81C2201/0114 ,  B81C2201/0115 ,  B81C2201/038

Abstract: Process for fabrication of a micromechanical and/or nanomechanical structure comprising the following steps, starting from an element comprising a support substrate and a sacrificial layer: a) formation of a first layer, at least part of which is porous, b) formation on the first layer of a layer made of one (or several) materials providing the mechanical properties of the structure, called the intermediate layer, c) formation on the intermediate layer of a second layer, at least part of which is porous, d) formation of said structure in the stack composed of the first layer, the intermediate layer and the second layer, e) release of said structure by at least partial removal of the sacrificial layer.

Abstract translation: 制造微机械和/或纳米机械结构的方法，包括以下步骤：从包括支撑基底和牺牲层的元件开始：a）形成第一层，其中至少一部分是多孔的，b）在 第一层由一种（或多种）材料制成，提供称为中间层的结构的机械性能，c）在第二层的中间层上形成，其中至少一部分是多孔的，d）形成 由第一层，中间层和第二层构成的堆叠中的所述结构，e）通过至少部分去除牺牲层来释放所述结构。

公开(公告)号：US20110259936A1

公开(公告)日：2011-10-27

申请号：US13141821

申请日：2009-12-18

Applicant: Lukas Lichtensteiger

Inventor： Lukas Lichtensteiger

IPC: B26F3/00

CPC classification number: B28D1/221 ,  B81C1/00634 ,  B81C2201/038 ,  H01L21/304 ,  H01L21/76251 ,  Y10T225/10

Abstract: A method of printing comprises the steps of: providing a solid state material having an exposed surface; applying an auxiliary layer to the exposed surface to form a composite structure, the auxiliary layer having a stress pattern; subjecting the composite structure to conditions facilitating fracture of the solid state material along a plane at a depth therein; and removing the auxiliary layer and, therewith, a layer of the solid state material terminating at the fracture depth, wherein an exposed surface of the removed layer of solid state material has a surface topology corresponding to the stress pattern.

Abstract translation: 印刷方法包括以下步骤：提供具有暴露表面的固态材料; 将辅助层施加到暴露的表面以形成复合结构，所述辅助层具有应力图案; 使复合结构受到促进固态材料沿着其深度处的平面断裂的条件; 并且除去辅助层，并且随后移除终止于断裂深度处的固态材料层，其中所述去除的固态材料层的暴露表面具有对应于应力图案的表面拓扑。

公开(公告)号：US5949119A

公开(公告)日：1999-09-07

申请号：US219419

申请日：1998-12-23

Applicant: Michel Vilain

Inventor： Michel Vilain

IPC: G01J5/20 ,  B81B3/00 ,  F15C5/00 ,  H01L21/302 ,  H01L21/3065 ,  H01L49/00 ,  H01L29/82

CPC classification number: B81C1/00658 ,  B81B3/007 ,  F15C5/00 ,  G01J5/20 ,  B81B2203/0118 ,  B81C2201/0109 ,  B81C2201/038

Abstract: A device having at least one element of a floating rigid microstructure element made of a structure layer(s) and a rigidity lining which increases its resistance to flexing and to torsion. The increased rigidity of the microstructure element allows the thickness and/or the width to be reduced, particularly of the structure layer(s) and hence allows an increase in the thermal resistance.

Abstract translation: 具有由结构层制成的浮动刚性微结构元件的至少一个元件和刚性衬里的装置，其增加其抵抗挠曲和扭转。 微结构元件的增加的刚度允许减小厚度和/或宽度，特别是结构层的厚度和/或宽度，从而允许增加耐热性。

公开(公告)号：US08877077B2

公开(公告)日：2014-11-04

申请号：US13141821

申请日：2009-12-18

Applicant: Lukas Lichtensteiger

Inventor： Lukas Lichtensteiger

IPC: B44C1/22

CPC classification number: B28D1/221 ,  B81C1/00634 ,  B81C2201/038 ,  H01L21/304 ,  H01L21/76251 ,  Y10T225/10

Abstract: A method of printing comprises the steps of: providing a solid state material having an exposed surface; applying an auxiliary layer to the exposed surface to form a composite structure, the auxiliary layer having a stress pattern; subjecting the composite structure to conditions facilitating fracture of the solid state material along a plane at a depth therein; and removing the auxiliary layer and, therewith, a layer of the solid state material terminating at the fracture depth, wherein an exposed surface of the removed layer of solid state material has a surface topology corresponding to the stress pattern.

Abstract translation: 印刷方法包括以下步骤：提供具有暴露表面的固态材料; 将辅助层施加到暴露的表面以形成复合结构，所述辅助层具有应力图案; 使复合结构受到促进固态材料沿着其深度处的平面断裂的条件; 并且除去辅助层，并且随后移除终止于断裂深度处的固态材料层，其中所述去除的固态材料层的暴露表面具有对应于应力图案的表面拓扑。

公开(公告)号：US20120145572A1

公开(公告)日：2012-06-14

申请号：US13265044

申请日：2010-04-20

Applicant: Juergen Brugger ,  Cristina Martin-Olmos ,  Alcherio Martinoli ,  Gregory Mermoud

Inventor： Juergen Brugger ,  Cristina Martin-Olmos ,  Alcherio Martinoli ,  Gregory Mermoud

IPC: B65D25/08 ,  B32B1/06 ,  B32B5/16

CPC classification number: B81C1/00007 ,  A61J3/07 ,  A61K9/0097 ,  A61K9/5089 ,  B81B2201/06 ,  B81C99/0095 ,  B81C2201/038 ,  B81C2203/051 ,  C09B67/0097 ,  Y10T428/2984

Abstract: A method for fabricating a fluid container, wherein at least two half containers are mated in said fluid to be contained in said container. This method allows the incorporation of prefabricated devices into each half containers as well as the functional coupling of these devices after mating of the half containers, thus resulting in a functional hybrid MEMS fluid container.

Abstract translation: 一种用于制造流体容器的方法，其中至少两个半容器在所述待容纳在所述容器中的流体中配合。 这种方法允许将预制装置并入每个半容器以及这些装置在半容器配合之后的功能耦合，从而导致功能性混合MEMS流体容器。

公开(公告)号：US20110200434A1

公开(公告)日：2011-08-18

申请号：US13060662

申请日：2010-09-17

Applicant: Bernard Dieny ,  Hélène Joisten ,  Philippe Sabon

Inventor： Bernard Dieny ,  Hélène Joisten ,  Philippe Sabon

IPC: F03G7/00 ,  B29C41/02

CPC classification number: B81C1/0019 ,  A61B1/00156 ,  B81B2201/038 ,  B81B2201/06 ,  B81C2201/038

Abstract: A microparticle includes an oblong flexible tail able to propel the microparticle in a solution along a trajectory using beats transverse to the trajectory, the tail including at least one magnetic element such that the magnetic element causes beats of the tail under the action of an external alternating magnetic field non-collinear with the trajectory and a head mechanically connected to a proximal end of the tail. The microparticle includes at least one layer of material formed from one piece and including the tail and the head, the dimensions and/or shape of the head being selected such that the beats of the proximal end of the tail are limited with respect to the beats of the distal end of the tail and such that the head does not perform a complete revolution around an axis parallel to the trajectory under the effect of the external alternating magnetic field.

Abstract translation: 微粒包括长方形柔性尾部，其能够使用横向于轨迹的搏动沿着轨迹将微粒推进到溶液中，尾部包括至少一个磁性元件，使得磁性元件在外部交替作用下引起尾巴的打击 与轨迹非共线的磁场和机械连接到尾端近端的磁头。 微粒包括至少一层材料，其由一个部件形成并包括尾部和头部，头部的尺寸和/或形状被选择为使得尾部的近端的节拍相对于节拍被限制 并且使得头部在外部交变磁场的作用下不围绕平行于轨迹的轴线执行完整的旋转。