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    Ultrasonic treatment chamber for preparing emulsions
    5.
    发明授权
    Ultrasonic treatment chamber for preparing emulsions 有权
    用于制备乳液的超声处理室

    公开(公告)号：US09421504B2

    公开(公告)日：2016-08-23

    申请号：US12491735

    申请日：2009-06-25

    申请人： Philip Eugene Kieffer ,  Corey Thomas Cunningham ,  Steven Michael Hurley ,  Scott W. Wenzel ,  Shiming Zhuang

    发明人： Philip Eugene Kieffer ,  Corey Thomas Cunningham ,  Steven Michael Hurley ,  Scott W. Wenzel ,  Shiming Zhuang

    IPC分类号： B01F3/08 ,  B01F11/02 ,  B01J19/00 ,  B01J19/24

    CPC分类号： B01F3/0819 ,  B01F3/088 ,  B01F11/0258 ,  B01F2215/0031 ,  B01F2215/045 ,  B01F2215/0454 ,  B01J19/006 ,  B01J19/0066 ,  B01J19/24

    摘要： An ultrasonic mixing system having a treatment chamber in which at least two separate phases can be mixed to prepare an emulsion is disclosed. The treatment chamber has an elongate housing through which the phases flow longitudinally from a first inlet port and a second inlet port, respectively, to an outlet port thereof. An elongate ultrasonic waveguide assembly extends within the housing and is operable at a predetermined ultrasonic frequency to ultrasonically energize the phases within the housing. An elongate ultrasonic horn of the waveguide assembly is disposed at least in part intermediate the inlet and outlet ports, and has a plurality of discrete agitating members in contact with and extending transversely outward from the horn intermediate the inlet and outlet ports in longitudinally spaced relationship with each other.

    摘要翻译： 公开了一种具有处理室的超声波混合系统，其中至少两个分开的相可以混合以制备乳液。 处理室具有细长的壳体，相位分别从第一入口端口和第二入口端口纵向流到其出口端。 细长的超声波波导组件在壳体内延伸并且可以预定的超声波频率操作以对壳体内的相超声波激励。 波导组件的细长超声波喇叭至少部分地设置在入口和出口的中间，并且具有多个离散的搅拌构件，其与入口和出口端口处的喇叭中的接触并横向向外延伸，与纵向间隔开的关系 彼此。

    Sonic energy to generate active species for surface preparation, cleaning, and etching
    6.
    发明授权
    Sonic energy to generate active species for surface preparation, cleaning, and etching 有权
    声能产生活性物质进行表面处理，清洗和蚀刻

    公开(公告)号：US09327322B2

    公开(公告)日：2016-05-03

    申请号：US13633027

    申请日：2012-10-01

    申请人： TOKYO ELECTRON LIMITED

    发明人： Ian J Brown

    IPC分类号： B08B7/00 ,  B08B3/12 ,  B01F3/08 ,  H01L21/67 ,  H01L21/02 ,  G10K15/04 ,  C02F1/36

    CPC分类号： B08B3/12 ,  B01F3/0819 ,  C02F1/36 ,  G10K15/043 ,  H01L21/02052 ,  H01L21/67057

    摘要： Provided is a method for generating active species in a treatment liquid used in a surface treatment system, the surface treatment system comprising a processing chamber and a treatment liquid delivery system, the treatment liquid delivery system having a mixing zone and an active species generation zone. A substrate and a treatment liquid comprising one or more chemical solutions and/or one or more process gases are provided. Sonic energy is applied to the treatment liquid in a mixing zone and/or an active species generation zone using one or more sonic devices. One or more selected surface treatment operating variables are controlled to optimize generation of active species in the treatment liquid. The one or more selected surface treatment operating variables are adjusted in order to meet one or more surface treatment objectives.

    摘要翻译： 提供了一种用于在表面处理系统中使用的处理液中产生活性物质的方法，所述表面处理系统包括处理室和处理液体输送系统，所述处理液体输送系统具有混合区和活性物种生成区。 提供了包含一种或多种化学溶液和/或一种或多种工艺气体的基底和处理液。 使用一个或多个声音装置将混合区域和/或活性物种生成区域中的声能施加到处理液体。 控制一个或多个选择的表面处理操作变量以优化处理液体中活性物质的产生。 调整一个或多个选定的表面处理操作变量以满足一个或多个表面处理目标。

    High-power sono-chemical reactor
    9.
    发明申请
    High-power sono-chemical reactor 审中-公开
    大功率超声波化学反应堆

    公开(公告)号：US20060050605A1

    公开(公告)日：2006-03-09

    申请号：US11126172

    申请日：2005-05-11

    申请人： Evgeny Markhasin

    发明人： Evgeny Markhasin

    IPC分类号： B01F11/00

    CPC分类号： B01J19/10 ,  B01F3/0819 ,  B01F11/0258 ,  B01F2003/0834 ,  B01F2003/0842 ,  B01F2215/0454 ,  B01J2219/00085 ,  B01J2219/00243 ,  B01J2219/0888 ,  B06B3/00

    摘要： A device and method for sono-chemical processing, including a reactor bounded by a substantially cylindrical wall, the reactor having: a reaction volume, defined by the wall; first and second magnetostrictors, associated with the reaction volume, the wall and the magnetostrictors designed and disposed such that the first magnetostrictor produces a first series of ultrasonic waves having a first frequency within the reaction volume, the second magnetostrictor produces a second series of ultrasonic waves having a second frequency within the reaction volume, wherein the second frequency exceeds the first frequency.

    摘要翻译： 一种用于声化学处理的装置和方法，包括由基本上圆柱形的壁限定的反应器，所述反应器具有由壁限定的反应体积; 与反应体积相关联的第一和第二磁致伸缩器，壁和设置和布置的磁致伸缩器，使得第一磁致伸缩器产生在反应体积内具有第一频率的第一系列超声波，第二磁致伸缩器产生第二系列超声波 在所述反应体积内具有第二频率，其中所述第二频率超过所述第一频率。