Liquid treatment equipment, liquid treatment method, semiconductor device manufacturing method, and semiconductor device manufacturing equipment
    1.
    发明授权
    Liquid treatment equipment, liquid treatment method, semiconductor device manufacturing method, and semiconductor device manufacturing equipment 失效
    液体处理设备,液体处理方法,半导体器件制造方法和半导体器件制造设备

    公开(公告)号:US06848457B2

    公开(公告)日:2005-02-01

    申请号:US09849347

    申请日:2001-05-07

    摘要: Providing liquid treatment equipment capable of largely reducing a frequency of discarding a treatment solution as a whole and capable of implementing smooth and high quality liquid treatment with less manufacturing burden. Equipment comprises a treatment solution bath capable of accommodating a treatment solution for implementing liquid treatment to a substrate to treat, a treatment solution circulating system circulating the accommodated treatment solution between the outside of the treatment solution bath, and a product removal unit removing a reaction product due to the liquid treatment contained in the circulated treatment solution. By circulating the accommodated treatment solution between the outside of the treatment solution bath, reaction products contained in the circulated treatment solution are removed by means of the product removal unit. Thereby, a chemical change substance and a decomposition product remaining in a treatment solution can be removed, resulting in preventing a treatment solution from deteriorating.

    摘要翻译: 提供液体处理设备能够大大降低整体处理溶液的排放频率,能够以较少的制造负担实现平稳高质量的液体处理。 设备包括能够容纳用于对基板进行液体处理的处理溶液的处理溶液浴,以处理在处理溶液浴的外部之间循环所容纳的处理溶液的处理溶液循环系统和去除反应产物的产物去除单元 由于循环处理溶液中所含的液体处理。 通过将处理溶液的外部循环容纳的处理液,通过产品除去单元除去循环处理液中所含的反应产物。 因此,可以除去残留在处理溶液中的化学变化物质和分解产物,从而防止处理溶液劣化。

    Electroless plating apparatus and electroless plating method
    3.
    发明申请
    Electroless plating apparatus and electroless plating method 审中-公开
    无电镀设备和化学镀方法

    公开(公告)号:US20060037858A1

    公开(公告)日:2006-02-23

    申请号:US10528117

    申请日:2003-05-23

    IPC分类号: C25D17/06

    摘要: A plate is placed near a substrate held by a substrate holding section. A treating liquid is ejected from a treating liquid ejecting section, thereby plating the substrate electrolessly. The treating liquid flows through the gap between the substrate and the plate. Therefore a flow of the treating liquid occurs on the substrate. As a result, a fresh treating liquid can be supplied onto the substrate. Thus, a plating film can be formed very uniformly on the substrate even if the amount of treating liquid is small.

    摘要翻译: 将板放置在由基板保持部保持的基板附近。 处理液从处理液喷射部喷出,由此无电解地镀覆基板。 处理液体流过基板和板之间的间隙。 因此,处理液的流动发生在基板上。 结果,可以将新鲜的处理液体供应到基底上。 因此,即使处理液的量少,也可以在基板上非常均匀地形成镀膜。

    Electroless plating method and apparatus
    4.
    发明申请
    Electroless plating method and apparatus 审中-公开
    化学镀方法及装置

    公开(公告)号:US20050164499A1

    公开(公告)日:2005-07-28

    申请号:US11082807

    申请日:2005-03-18

    摘要: In a method of electroless plating, catalytically active nuclei are formed on a diffusion inhibiting layer (such as a barrier layer), the catalytically active nuclei being catalytically active on a reducing agent contained in an electroless plating solution, and an electroless plating is then carried out by using the electroless plating solution. The method allows the formation of an electrolessly plated coating on a barrier layer through the acceleration of the reaction of a reducing agent contained in an electroless plating solution by catalytically active nucleus.

    摘要翻译: 在化学镀方法中,在扩散抑制层(例如阻挡层)上形成催化活性核,催化活性核在化学镀溶液中包含的还原剂上具有催化活性的核,然后进行化学镀 通过使用化学镀溶液。 该方法允许通过催化活性核加速化学镀溶液中所含的还原剂的反应,在阻挡层上形成无电镀层。

    Imprint apparatus and pattern transfer method
    6.
    发明授权
    Imprint apparatus and pattern transfer method 有权
    印刷装置和图案转印方法

    公开(公告)号:US09244342B2

    公开(公告)日:2016-01-26

    申请号:US12963009

    申请日:2010-12-08

    申请人: Hiroshi Sato

    发明人: Hiroshi Sato

    摘要: An imprint apparatus comprises a scope which observes a mark formed in each shot of a substrate and a mark formed on a mold and a controller. The controller performs observation by the scope, detects an amount of displacement of the shot with respect to the mold based on the observation result, and, if the detected displacement amount falls outside an allowable range, executes at least one of remeasuring a baseline amount and reexecuting a global alignment process.

    摘要翻译: 压印装置包括观察在基板的每个镜头中形成的标记的范围和形成在模具上的标记和控制器。 控制器通过该范围进行观察,基于观察结果检测射出相对于模具的位移量,并且如果检测到的位移量超出允许范围,则执行重新测量基线量和 重新执行全局对齐过程。

    Method and apparatus for detecting and processing specific pattern from image
    7.
    发明授权
    Method and apparatus for detecting and processing specific pattern from image 有权
    用于从图像中检测和处理特定图案的方法和装置

    公开(公告)号:US09239946B2

    公开(公告)日:2016-01-19

    申请号:US13546355

    申请日:2012-07-11

    IPC分类号: G06K9/00 H04N5/232

    摘要: In an image within which a face pattern is detected, when a ratio of a skin color pixel is equal to or smaller than a first threshold value in a first region and a ratio of a skin color pixel is equal to or greater than a second threshold value in a second r region, the vicinity of the first region is determined to be a face candidate position at which the face pattern can exist. Face detection is carried out on the face candidate position. The second region is arranged in a predetermined position relative to the first region.

    摘要翻译: 在其中检测到面部图案的图像中,当皮肤颜色像素的比例在第一区域中等于或小于第一阈值并且皮肤颜色像素的比率等于或大于第二阈值时 在第二r区域中,第一区域附近被确定为可以存在脸部图案的面部候选位置。 脸部检测在脸部候选位置进行。 第二区域相对于第一区域布置在预定位置。

    Mark position detector, imprint apparatus, and article manufacturing method
    8.
    发明授权
    Mark position detector, imprint apparatus, and article manufacturing method 有权
    标记位置检测器,压印装置和制品制造方法

    公开(公告)号:US08953175B2

    公开(公告)日:2015-02-10

    申请号:US12966237

    申请日:2010-12-13

    申请人: Hiroshi Sato

    发明人: Hiroshi Sato

    摘要: A detector for detecting a position of a mark comprises: an image sensing device; an optical system which projects the mark onto an image sensing surface of the image sensing device; a pattern located in a position between the image sensing surface and an optical element located closest to a plane on which the mark is to be located, among optical elements forming the optical system, the position being optically conjugated with the plane; and a processor which calculates a position of the mark with respect to one of a position of the pattern and a position already known from the position of the pattern, based on a moire pattern formed on the image sensing surface by the mark and the pattern.

    摘要翻译: 用于检测标记位置的检测器包括:图像感测装置; 光学系统,其将标记投射到图像感测装置的图像感测表面上; 在形成光学系统的光学元件中位于图像感测表面和位于最靠近标记所在的平面的光学元件之间的位置的图案,该位置与该平面光学共轭; 以及处理器,其基于通过标记和图案形成在图像感测表面上的莫尔图案,计算相对于图案的位置和从图案的位置已知的位置之一的标记的位置。

    Image recognition apparatus, image recognition method, and program
    9.
    发明授权
    Image recognition apparatus, image recognition method, and program 有权
    图像识别装置,图像识别方法和程序

    公开(公告)号:US08861803B2

    公开(公告)日:2014-10-14

    申请号:US13436585

    申请日:2012-03-30

    IPC分类号: G06K9/46 G06K9/00

    CPC分类号: G06K9/00281

    摘要: An image recognition apparatus includes an extraction unit configured to extract a feature quantity for each local area from an input image, a conversion unit configured to convert the feature quantity extracted by the extraction unit into a feature quantity indicating a degree with respect to an attribute for each local area, a verification unit configured to verify the feature quantity converted by the conversion unit against a feature quantity of a registered image, and an identification unit configured to identify whether the input image is identical to the registered image by integrating the verification result for each local area acquired by the verification unit.

    摘要翻译: 图像识别装置包括:提取单元,被配置为从输入图像中提取每个局部区域的特征量;转换单元,被配置为将由提取单元提取的特征量转换为指示相对于属性的属性的度数的特征量 每个局部区域,验证单元,被配置为验证由转换单元转换的特征量相对于注册图像的特征量;以及识别单元,被配置为通过将输入图像与登记图像相一致来识别, 验证单位获取的每个局部区域。

    Information processing apparatus, method of controlling information processing apparatus, and storage medium
    10.
    发明授权
    Information processing apparatus, method of controlling information processing apparatus, and storage medium 有权
    信息处理装置,信息处理装置的控制方法以及存储介质

    公开(公告)号:US08842880B2

    公开(公告)日:2014-09-23

    申请号:US13444738

    申请日:2012-04-11

    IPC分类号: G06K9/00 G06F3/00

    CPC分类号: G06K9/00288

    摘要: An information processing apparatus comprising: an obtaining unit configured to obtain image data; a detection unit configured to detect an object from the image data; an attribute determination unit configured to determine an attribute indicating a characteristic of the object detected by the detection unit; a registration unit configured to register the image data in at least one of a plurality of dictionaries based on the attribute determined by the attribute determination unit; and an adding unit configured to add, when the image data is registered in not less than two dictionaries, link information concerning the image data registered in the other dictionary to the image data registered in one dictionary.

    摘要翻译: 一种信息处理设备,包括:获取单元,被配置为获得图像数据; 检测单元,被配置为从所述图像数据检测对象; 属性确定单元,被配置为确定指示由所述检测单元检测到的所述对象的特征的属性; 注册单元,被配置为基于由属性确定单元确定的属性将多个字典中的至少一个注册图像数据; 以及添加单元,被配置为当图像数据在不少于两个字典中登记时,将登记在其他字典中的图像数据的链接信息添加到登记在一个字典中的图像数据。